• Title/Summary/Keyword: Oxide thin film transistors

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A Transparent Logic Circuit for RFID Tag in a-IGZO TFT Technology

  • Yang, Byung-Do;Oh, Jae-Mun;Kang, Hyeong-Ju;Park, Sang-Hee;Hwang, Chi-Sun;Ryu, Min Ki;Pi, Jae-Eun
    • ETRI Journal
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    • v.35 no.4
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    • pp.610-616
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    • 2013
  • This paper proposes a transparent logic circuit for radio frequency identification (RFID) tags in amorphous indium-gallium-zinc-oxide (a-IGZO) thin-film transistor (TFT) technology. The RFID logic circuit generates 16-bit code programmed in read-only memory. All circuits are implemented in a pseudo-CMOS logic style using transparent a-IGZO TFTs. The transmittance degradation due to the transparent RFID logic chip is 2.5% to 8% in a 300-nm to 800-nm wavelength. The RFID logic chip generates Manchester-encoded 16-bit data with a 3.2-kHz clock frequency and consumes 170 ${\mu}W$ at $V_{DD}=6$ V. It employs 222 transistors and occupies a chip area of 5.85 $mm^2$.

Electrical Properties of Metal-Ferroelectric-Insulator-Semiconductor Field-Effect Transistor Using an Au/$(Bi,La)_4Ti_3O_{12}/LaZrO_x$/Si Structure

  • Jeon, Ho-Seung;Lee, Gwang-Geun;Kim, Joo-Nam;Park, Byung-Eun;Choi, Yun-Soo
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2007.11a
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    • pp.171-172
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    • 2007
  • We fabricated the metal-ferroelectric-insulator-semiconductor filed-effect transistors (MFIS-FETs) using the $(Bi,La)_4Ti_3O_{12}\;and\;LaZrO_x$ thin films. The $LaZrO_x$ thin film had a equivalent oxide thickness (EOT) value of 8.7 nm. From the capacitance-voltage (C-V) measurements for an Au/$(Bi,La)_4Ti_3O_{12}/LaZrO_x$/Si MFIS capacitor, a hysteric shift with a clockwise direction was observed and the memory window width was about 1.4 V for the bias voltage sweeping of ${\pm}9V$. From drain current-gate voltage $(I_D-V_G)$ characteristics of the fabricated Fe-FETs, the obtained threshold voltage shift (memory window) was about 1 V due to ferroelectric nature of BLT film. The drain current-drain voltage $(I_D-V_D)$ characteristics of the fabricated Fe-FETs showed typical n-channel FETs current-voltage characteristics.

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Study on Electrical Characteristic Improvement of PVP-IZO TFT Prepared by Solution Process Using UV-O3 Treatment (용액공정으로 제작한 PVP-IZO TFT의 UV-O3 처리를 통한 전기적 특성 향상 연구)

  • Kim, Yu Jung;Jeong, Jun Kyo;Park, Jung Hyun;Jung, Byung Jun;Lee, Ga Won
    • Journal of the Semiconductor & Display Technology
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    • v.16 no.2
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    • pp.66-69
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    • 2017
  • In this paper, solution based Indium Zinc Oxide thin film transistors (IZO TFTs) were fabricated with PVP gate dielectric. To enhance the electrical properties, UV-O3 treatment is proposed on solution based IZO TFTs. The gate leakage current and interface trap density is compatible with conventional ZnO-based TFT with inorganic gate insulator. Especially, the UV-treated device shows improved electrical characteristics compared to the untreated device. These results can be explained by X-ray photoelectron spectroscopy (XPS) analysis, which shows that the oxygen vacancy of UV-O3 treatment is higher than that of no treatment.

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Effects of Mg Suppressor Layer on the InZnSnO Thin-Film Transistors

  • Song, Chang-Woo;Kim, Kyung-Hyun;Yang, Ji-Woong;Kim, Dae-Hwan;Choi, Yong-Jin;Hong, Chan-Hwa;Shin, Jae-Heon;Kwon, Hyuck-In;Song, Sang-Hun;Cheong, Woo-Seok
    • JSTS:Journal of Semiconductor Technology and Science
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    • v.16 no.2
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    • pp.198-203
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    • 2016
  • We investigate the effects of magnesium (Mg) suppressor layer on the electrical performances and stabilities of amorphous indium-zinc-tin-oxide (a-ITZO) thin-film transistors (TFTs). Compared to the ITZO TFT without a Mg suppressor layer, the ITZO:Mg TFT exhibits slightly smaller field-effect mobility and much reduced subthreshold slope. The ITZO:Mg TFT shows improved electrical stabilities compared to the ITZO TFT under both positive-bias and negative-bias-illumination stresses. From the X-ray photoelectron spectroscopy O1s spectra with fitted curves for ITZO and ITZO:Mg films, we observe that Mg doping contributes to an enhancement of the oxygen bond without oxygen vacancy and a reduction of the oxygen bonds with oxygen vacancies. This result shows that the Mg can be an effective suppressor in a-ITZO TFTs.

Experimental Investigation of Physical Mechanism for Asymmetrical Degradation in Amorphous InGaZnO Thin-film Transistors under Simultaneous Gate and Drain Bias Stresses

  • Jeong, Chan-Yong;Kim, Hee-Joong;Lee, Jeong-Hwan;Kwon, Hyuck-In
    • JSTS:Journal of Semiconductor Technology and Science
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    • v.17 no.2
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    • pp.239-244
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    • 2017
  • We experimentally investigate the physical mechanism for asymmetrical degradation in amorphous indium-gallium-zinc oxide (a-IGZO) thin-film transistors (TFTs) under simultaneous gate and drain bias stresses. The transfer curves exhibit an asymmetrical negative shift after the application of gate-to-source ($V_{GS}$) and drain-to-source ($V_{DS}$) bias stresses of ($V_{GS}=24V$, $V_{DS}=15.9V$) and ($V_{GS}=22V$, $V_{DS}=20V$), but the asymmetrical degradation is more significant after the bias stress ($V_{GS}$, $V_{DS}$) of (22 V, 20 V) nevertheless the vertical electric field at the source is higher under the bias stress ($V_{GS}$, $V_{DS}$) of (24 V, 15.9 V) than (22 V, 20 V). By using the modified external load resistance method, we extract the source contact resistance ($R_S$) and the voltage drop at $R_S$ ($V_{S,\;drop}$) in the fabricated a-IGZO TFT under both bias stresses. A significantly higher RS and $V_{S,\;drop}$ are extracted under the bias stress ($V_{GS}$, $V_{DS}$) of (22 V, 20V) than (24 V, 15.9 V), which implies that the high horizontal electric field across the source contact due to the large voltage drop at the reverse biased Schottky junction is the dominant physical mechanism causing the asymmetrical degradation of a-IGZO TFTs under simultaneous gate and drain bias stresses.

Effects of Simultaneous Bending and Heating on Characteristics of Flexible Organic Thin Film Transistors

  • Cho, S.W.;Kim, D.I.;Lee, N.E.
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.470-470
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    • 2013
  • Recently, active materials such as amorphous silicon (a-Si), poly crystalline silicon (poly-Si), transition metal oxide semiconductors (TMO), and organic semiconductors have been demonstrated for flexible electronics. In order to apply flexible devices on the polymer substrates, all layers should require the characteristic of flexibility as well as the low temperature process. Especially, pentacene thin film transistors (TFTs) have been investigated for probable use in low-cost, large-area, flexible electronic applications such as radio frequency identification (RFID) tags, smart cards, display backplane driver circuits, and sensors. Since pentacene TFTs were studied, their electrical characteristics with varying single variable such as strain, humidity, and temperature have been reported by various groups, which must preferentially be performed in the flexible electronics. For example, the channel mobility of pentacene organic TFTs mainly led to change in device performance under mechanical deformation. While some electrical characteristics like carrier mobility and concentration of organic TFTs were significantly changed at the different temperature. However, there is no study concerning multivariable. Devices actually worked in many different kinds of the environment such as thermal, light, mechanical bending, humidity and various gases. For commercialization, not fewer than two variables of mechanism analysis have to be investigated. Analyzing the phenomenon of shifted characteristics under the change of multivariable may be able to be the importance with developing improved dielectric and encapsulation layer materials. In this study, we have fabricated flexible pentacene TFTs on polymer substrates and observed electrical characteristics of pentacene TFTs exposed to tensile and compressive strains at the different values of temperature like room temperature (RT), 40, 50, $60^{\circ}C$. Effects of bending and heating on the device performance of pentacene TFT will be discussed in detail.

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Photofield-Effect in Amorphous In-Ga-Zn-O (a-IGZO) Thin-Film Transistors

  • Fung, Tze-Ching;Chuang, Chiao-Shun;Nomura, Kenji;Shieh, Han-Ping David;Hosono, Hideo;Kanicki, Jerzy
    • Journal of Information Display
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    • v.9 no.4
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    • pp.21-29
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    • 2008
  • We studied both the wavelength and intensity dependent photo-responses (photofield-effect) in amorphous In-Ga-Zn-O (a-IGZO) thin-film transistors (TFTs). During the a-IGZO TFT illumination with the wavelength range from $460\sim660$ nm (visible range), the off-state drain current $(I_{DS_off})$ only slightly increased while a large increase was observed for the wavelength below 400 nm. The observed results are consistent with the optical gap of $\sim$3.05eV extracted from the absorption measurement. The a-IGZO TFT properties under monochromatic illumination ($\lambda$=420nm) with different intensity was also investigated and $I_{DS_off}$ was found to increase with the light intensity. Throughout the study, the field-effect mobility $(\mu_{eff})$ is almost unchanged. But due to photo-generated charge trapping, a negative threshold voltage $(V_{th})$ shift is observed. The mathematical analysis of the photofield-effect suggests that a highly efficient UV photocurrent conversion process in TFT off-region takes place. Finally, a-IGZO mid-gap density-of-states (DOS) was extracted and is more than an order of magnitude lower than reported value for hydrogenated amorphous silicon (a-Si:H), which can explain a good switching properties observed for a-IGZO TFTs.

Effect of gate electrode material on electrical characteristics of a-IGZO thin-film transistors (게이트 전극 물질이 a-IGZO 박막트랜지스터의 전기적 특성에 미치는 영향)

  • Oh, Hyungon;Cho, Kyoungah;Kim, Sangsig
    • Journal of IKEEE
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    • v.21 no.2
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    • pp.170-173
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    • 2017
  • In this study, we fabricate amorphous indium gallium zinc oxide (a-IGZO) thin-film transistors (TFTs) with three different gate electrode materials of Al, Mo and Pt on plastic substrates and investigate their electrical characteristics. Compared to an a-IGZO TFT with Al gate electrode, the threshold voltage of an a-IGZO TFT with a Pt electrode decreases from -4.2 to -0.3 V. and the filed-effect mobility is improved from 15.8 to $22.1cm^2/V{\cdot}s$. The threshold voltage shift of the TFT is affected by the difference between the work function of the gate electrode and the Fermi energy of the channel layer. Moreover, the Pt gate electrode is considered to be the suitable material in terms of the electrical characteristics of the TFT. In addition, an description on an a-IGZO TFT with a Mo electrode will be given here.

Changes of dielectric surface state In organic TFTs on flexible substrate (유연한 기판상의 유기 트랜지스터의 절연 표면층 상태 변화에 의한 전기적 특성 향상)

  • Kim, Jong-Moo;Lee, Joo-Woo;Kim, Young-Min;Park, Jung-Soo;Kim, Jae-Gyeong;Jang, Jin;Oh, Myung-Hwan;Ju, Byeong-Kwon
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2004.05a
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    • pp.86-89
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    • 2004
  • Organic thin film transistors (OTFTs) are fabricated on the plastic substrate through 4-level mask process without photolithographic patterning to yield the simple fabrication process. And we herewith report for the effect of dielectric surface modification on the electrical characteristics of OTFTs. The KIST-JM-1 as an organic molecule for the surface modification is deposited onto the surface of zirconium oxide $(ZrO_2)$ gate dielectric layer. In this work, we have examined the dependence of electrical performance on the interface surface state of gate dielectric/pentacene, which may be modified by chemical properties in the gate dielectric surface.

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Study on the Electrical Characteristics of Solution-processed ZrInZnO Thin-film Transistors (액상공정으로 제작된 ZrInZnO 박막 트랜지스터의 전기적 특성에 관한 연구)

  • Jeong, Tae-Hoon;Kim, Si-Joon;Yoon, Doo-Hyun;Jeong, Woong-Hee;Kim, Dong-Lim;Lim, Hyun-Soo;Kim, Hyun-Jae
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.24 no.6
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    • pp.458-462
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    • 2011
  • Soution-processed ZrInZnO (ZIZO) thin-film transistors (TFTs) with varying Zr content were fabricated. The ZIZO TFT (Zr=20 at. %/Zn) has an optimal performance with the saturation field effect mobility of 0.77 $cm^2/Vs$, the threshold voltage (Vth) of 2.1 V, the on/off ratio of $4.95{\times}10^6$, and subthreshold swing (S.S) of 0.73 V/decade. Using this optimized ZIZO TFT, the positive and negative gate bias stress according to annealing temperature was also investigated. While the Vth shifts dramatically after 1,000 s of both gate bias stresses, variations in the S.S are negligible. It suggests that electrons or holes are tem porarily trapped in the gate insulator, the semiconductor, or the interface between both layers.