• Journal of the Korean Institute of Electrical and Electronic Material Engineers
• /
• v.18 no.1
• /
• pp.1-5
• /
• 2005

A new model of plasma etch process was constructed by using a radial basis function network (RBFN). This technique was applied to an etching of silicon carbide films in a NF$_3$ inductively coupled plasma. Experimental data to train RBFN were systematically collected by means of a 2$^4$ full factorial experiment. Appropriateness of prediction models was tested with test data consisted of 16 experiments not pertaining to the training data. Prediction performance was optimized with variations in three training factors, the number of pattern units, width of radial basis function, and initial weight distribution between the pattern and output layers. The etch responses to model were an etch rate and a surface roughness measured by atomic force microscopy. Optimized models had the root mean-squared errors of 26.1 nm/min and 0.103 nm for the etch rate and surface roughness, respectively. Compared to statistical regression models, RBFN models demonstrated an improvement of more than 20 % and 50 % for the etch rate and surface roughness, respectively. It is therefore expected that RBFN can be effectively used to construct prediction models of plasma processes.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2012.02a
• /
• pp.331-331
• /
• 2012

With the NAND Flash scaling down, it becomes more and more difficult to follow Moore's law to continue the scaling due to physical limitations. Recently, three-dimensional (3D) flash memories have introduced as an ideal solution for ultra-high-density data storage. In 3D flash memory, as the process reason, we need to use poly-Si TFTs instead of conventional transistors. So, after combining charge trap flash (CTF) structure and poly-Si TFTs, the emerging device SONOS-TFTs has also suffered from some reliability problem such as hot carrier degradation, charge-trapping-induced parasitic capacitance and resistance which both create interface traps. Charge pumping method is a useful tool to investigate the degradation phenomenon related to interface trap creation. However, the curves for charge pumping current in SONOS TFTs were far from ideal, which previously due to the fabrication process or some unknown traps. It needs an optimization and the important geometrical effect should be eliminated. In spite of its importance, it is still not deeply studied. In our work, base-level sweep model was applied in SONOS TFTs, and the nonideal charge pumping current was optimized by adjusting the gate pulse transition time. As a result, after the optimizing, an improved charge pumping current curve is obtained.

• Electrical & Electronic Materials
• /
• v.8 no.2
• /
• pp.171-175
• /
• 1995

Optimum condition of remote plasma enhanced chemical vapor deposition using orthogonal array method was chosen. Characteristics of oxide films deposited by RPECVD with SiH$_{4}$ and N$_{2}$O gases were investigated. Etching rate of the optimized SiO$_{2}$ films in P-etchant was about 6[A/s] that was almost the same as that the high temperature thermal oxide. The films showed high dielectric breakdown field of more than 7[MV/cm] and a resistivity of 8*10$^{13}$ [.ohmcm] around at 7[MV/cm]. The interface trap density of SiO$_{2}$/Si interface around the midgap derived from the high frequency C-V curve was about 5*10$^{10}$ [/cm$^{2}$eV]. It was observed that the dielectric constant of the optimized SiO$_{2}$ film was 4.29.

• Journal of the Korean Society of Manufacturing Process Engineers
• /
• v.11 no.6
• /
• pp.195-200
• /
• 2012

In this study, parameters and requirements of an 120kW class monorail planetary gearbox was analysed and the adaptive planetary gearbox design was selected. The specification of the sun gear, planetary gear and carrier was set and the profile & lead was optimized. The mechanical efficiency of the optimized one and the original one was observed. Dynamo-tester system was used to observe the mechanical efficiency of the planetary gearbox. A dynamo unit was connected with the planetary gearbox which straightened through the motor by a coupling. The standard tooth shape planetary gearbox and modified tooth shape planetary gearbox were used as test pieces and the rotation speed was set from 600 to 6000rpm with 600rpm, 2.5min one step. In order to check the mechanical efficiency of the planetary gearbox, the tests were done as follows. 1) The power loss between driving motor and dynamo tester. 2) Temperature variation by different rotation speeds. 3) Noise variation by different rotation speeds.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
• /
• v.33 no.6
• /
• pp.495-499
• /
• 2020

Power factor improvement at high temperatures has been a major research topic for the development of skutterudite thermoelectric materials. Here, we attempted to optimize the process parameters for manufacturing skutterudite materials, especially for p-type systems. We focused on the effect of aging time variation to maximize the high-temperature performance of the Ce-filled Fe³CoSb¹² skutterudite system. The optimized aging time was concluded to be a key parameter for the formation of single-phase nanostructures in this p-type skutterudite system. The optimized condition was effective in reducing the bipolar effect at high temperature ranges by increasing the carrier concentration in the p-type system. To confirm the conclusions, the electrical conductivity, Seebeck coefficient, and power factor were measured. The results matched well with the microstructure and with those of an XRD analysis performed for the system.

• Journal of Internet Computing and Services
• /
• v.4 no.5
• /
• pp.69-76
• /
• 2003

In this paper we show a new learning algorithm for pattern classification. This algorithm considered a scheme to find a solution to a problem of incremental learning algorithm when the structure becomes too complex by noise patterns included in learning data set. Our approach for this problem uses a pruning method which terminates the learning process with a predefined criterion. In this process, an iterative model with 3 layer feedforward structure is derived from the incremental model by an appropriate manipulations. Notice that this network structure is not full-connected between upper and lower layers. To verify the effectiveness of pruning method, this network is retrained by EBP. From this results, we can find out that the proposed algorithm is effective, as an aspect of a system performence and the node number included in network structure.

• Membrane and Water Treatment
• /
• v.6 no.4
• /
• pp.277-292
• /
• 2015

The extraction of lactic acid by an emulsion liquid membrane (ELM), in batch and continuous mode, has been reported. On the basis of preliminary experiments, the optimum composition of the organic phase (membrane) is determined. When the SPan 80 is used as surfactant, the emulsion breakage exceeds 50%, but only 10% is obtained when the ECA4360 is used. The effects of surfactant, carrier and solute concentrations, phase volume ratio, and stirring speed on the extraction yield were examined and optimized. Surfactant, carrier and diluent used were ECA4360, trilaurylamine (TLA) and dodecane, respectively; 2-ethylhexane-1,3-diol (EHD) is used as a co-surfactant. Under optimal conditions, emulsion breaking is very low and the swelling is kept at its lowest level. Under the pH conditions of fermentation medium, the extraction yield is lower. A mixer-settler continuous system was used for testing these conditions. The residence time, the number of extraction stages and the stability of the emulsion were studied and optimized. The extraction yield obtained exceeds 90%.

• Journal of Ship and Ocean Technology
• /
• v.9 no.3
• /
• pp.1-13
• /
• 2005

A design procedure for a ship with minimum total resistance has been developed using a numerical optimization method called SQP (Sequential Quadratic Programming) to search for optimized hull form and CFD(Computational Fluid Dynamics) technique. The friction resistance is estimated using the ITTC 1957 model-ship correlation line formula and the wave making resistance is evaluated using a potential-flow panel method based on Rankine sources with nonlinear free surface boundary conditions. The geometry of hull surface is represented and modified using B-spline surface patches during the optimization process. Using the Series 60 hull ($C_B$ =0.60) as a base hull, the optimization procedure is applied to obtain an optimal hull that produces the minimum total resistance for the given constraints. To verify the validity of the result, the original model and the optimized model obtained by the optimization process have been built and tested in a towing tank. It is shown that the optimal hull obtained around $13\%$ reduction in the total resistance and around $40\%$ reduction in the residual resistance at a speed tested compared with that of the original one, demonstrating that the present optimization tool can be effectively used for efficient hull form designs.

• Journal of Practical Engineering Education
• /
• v.10 no.2
• /
• pp.125-129
• /
• 2018

This paper is about the numerical analysis on optimized internal flow of LTP furnace and uniformity of temperature. The LTP Furnace is the device that generates heat by electricity. And performs an annealing function for annealing the silicon wafer in the pre-semiconductor manufacturing process. Especially, the maximum temperature inside the chamber is maintained at a high temperature of about $400^{\circ}C$ to strengthen the wafer. When the process is completed at high temperature, the operation is repeated to reduce the temperature through the heat exchanger and carry it out. From this analysis, the ultimate goal is to derive the optimum design of the insulation volume supply/exhaust structure of the chamber through the flow analysis of the LTPS furnace. And to find cases for curriculum development.

• Transactions of the Korean hydrogen and new energy society
• /
• v.32 no.6
• /
• pp.663-668
• /
• 2021

For the development of highly efficient quantum dot-sensitized solar cells (QDSCs), it is important to enhance the electrocatalytic activity of the counter electrodes (CEs). Herein, a fabrication process of Cu₂S CEs are optimized for the development highly efficient QDSCs. The surface of brass film is treated with HCl solution to prepare the Cu₂S CEs, and the concentraion as well as the temperature of HCl solution are controlled. It is found that the uniformity for the thickness of prepared Cu₂S CEs is enhanced when the diluted HCl solution is used, compared to the HCl solution of standard concentration. In addition, the electrocatalytic activity of the Cu₂S CEs is also increased with the modificed process, which is confirmed by impedance data and Tafel polarization curves. As a result, the photoconversion efficiency of QDSCs is improved from 4.49% up to 5.73%, when the concentraion and temperature of the HCl treatment are efficiently optimized.