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http://dx.doi.org/10.14702/JPEE.2018.125

Problem Solving about Practical Engineering Education based on Analysis on Optimized Internal Flow of LTP Furnace and Uniformity of Temperature  

Kim, Jin-woo (Department of Automation System, Korea Polytechnics)
Youn, Gi-man (Department of Computer Aided Machine, Korea Polytechnics)
Jo, Eunjeong (Department of Mechatronics Engineering, KOREATECH)
Publication Information
Journal of Practical Engineering Education / v.10, no.2, 2018 , pp. 125-129 More about this Journal
Abstract
This paper is about the numerical analysis on optimized internal flow of LTP furnace and uniformity of temperature. The LTP Furnace is the device that generates heat by electricity. And performs an annealing function for annealing the silicon wafer in the pre-semiconductor manufacturing process. Especially, the maximum temperature inside the chamber is maintained at a high temperature of about $400^{\circ}C$ to strengthen the wafer. When the process is completed at high temperature, the operation is repeated to reduce the temperature through the heat exchanger and carry it out. From this analysis, the ultimate goal is to derive the optimum design of the insulation volume supply/exhaust structure of the chamber through the flow analysis of the LTPS furnace. And to find cases for curriculum development.
Keywords
CAE; Numerical analysis; Furnace; Temperature;
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