• 한국세라믹학회지
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• 제42권4호
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• pp.232-236
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• 2005

$LiNbO_{3}$ optical waveguide 구조를 neutral loop discharge plasma 방법으로 식각시 As과 $C\_{3}F_{8}$가 혼합된 가스 유량에 따른 식각속도와 표면조도 값의 특성을 관찰하였다. 식각 후 식각속도와 식각단면은 scanning electron microscopy로 비교 분석하였으며, 표면조도는 atomic force microscopy로 측정하였다. Ar과 $C_{3}F_{8}$가 혼합된 가스 유량비를 각각 0.1-0.5로 증가시킴에 따라 식각속도와 표면조도는 0.2에서 가장 높게 나타났으며, bias power를 증가함에 따라 300W에서 가장 우수한 식각속도와 가장 평탄한 표면 형상을 얻을 수 있었다.

• Tribology and Lubricants
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• 제29권3호
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• pp.160-166
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• 2013

There is an indispensable need for force calibration for quantitative nanoscale force measurement using atomic force microscopy. Calibrating the normal force is relatively straightforward, whereas doing so for the lateral force is often complicated because of the difficulty in determining the optical lever sensitivity. In particular, the lateral force calibration of a colloidal probe in a liquid environment often has a larger uncertainty as a result of the effects of the epoxy, the location of the colloidal particle on the cantilever, and a decrease in the quality factor. In this work, the lateral force of a colloidal probe using a reference cantilever with a known spring constant was calibrated in a liquid environment. By obtaining the spring constant and the lateral sensitivity at the equator of a spherical colloidal particle, the damage to the bottom surface of the colloidal particle could be eliminated. Further, it was shown that the effect of the contact stiffness on the determination of the lateral spring constant of the cantilever could be minimized. It was concluded that this method can be effectively used for the lateral force calibration of a colloidal probe in a liquid environment.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2004년도 추계학술대회
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• pp.811-816
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• 2004

The tactile force sensor was studied using Fiber Bragg Grating (FBG). The FBG is able to multiplex easily and is immune to electromagnetic environment. A sensor frame was designed to a cantilever beam type. Strain of a beam is related with the peak shift of a bragg wavelength. Finite Element Method (FEM) was used for getting an appropriate thickness from 0.2 mm to 0.3 mm thick. FEM results showed that 0.3 mm thick was suitable for the force range 10 N. The force resolutions of 0.039 N and 0.113 N were obtained with optical spectrum analyser and tunable Fabry-Perot filter, respectively.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 2002년도 제35회 춘계학술대회
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• pp.267-271
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• 2002

Most studies of elsatohydrodynamic lubrication are oriented only to the measurement of film thickness itself with optical interferometer. In order to exactly investigate the characteristics of a certain lubricant, it is also important to get the information of traction force as well. In this work, we developed the device for measuring friction force of ehl contact condition together with the film thickness. To verify the validity of the measuring system, the friction force and film thickness under ehl condition are measured with the variation of additive ratios of viscosity index Improvers.

• 한국재료학회지
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• 제23권8호
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• pp.462-468
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• 2013

We study and describe-from the point of view of the interactions of the adsorbed particles-three types of the adsorption isotherms, namely, Langmuir type adsorption isotherms, phase transition type adsorption isotherms, and adsorption limited type adsorption isotherms, which are observed by experiments. By introducing and using a one dimensional statistical occupancy model, we derived analytical adsorption isotherms for the no force, the attractive force, and the repulsive force exerted on the other adsorbed particles. Our derived adsorption isotherms qualitatively pretty well agree with the experimental results of the adsorption isotherms. To specify each adsorption type, Langmuir type adsorption is a phenomenon that occurs with no forces between the adsorbed particles, phase transition type adsorption is a phenomenon that occurs with the strong attractive forces between the adsorbed particles, and adsorption limited type adsorption is a phenomenon that occurs with the repulsive forces between the adsorbed particles. The theoretical analysis-only using fundamental thermodynamics and occupancy statistics though-qualitatively quite well explains the experimental results.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 1998년도 제13차 학술회의논문집
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• pp.484-489
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• 1998

In this paper, we examine the displacement characteristics of the parallel leaf spring mechanism with large-deflective elastic hinges, and the validity of this mechanism as a translational and rotational mechanism is confirmed with multi-input system. This study is focused on the linear driving force as an input force, which is applied to the large-deflective elastic mechanism, and the displacement characteristics are discussed with theoretically and experimentally. The motions of this mechanism due to large-deflective hinges are changed by the position of loading force regardless of a single driving force. The numbers of degree of freedom are increased with the hinges, and we can be used to a multiple driving force in order to obtain many types of Output.

• Journal of the Korean Physical Society
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• 제73권9호
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• pp.1399-1404
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• 2018

This study used an inductively coupled plasma (ICP) dry etching process with a metal amplitude mask to fabricate a double-side notched long-period fiber grating (DNLPFG) for loading sensing. The DNLPFG exhibited increasing resonance attenuation loss for a particular wavelength when subjected to loading. When the DNLPFG was subjected to force loading, the transmission spectra were changed, showing a with wavelength shift and resonance attenuation loss. The experimental results showed that the resonant dip of the DNLPFG increased with increasing loading. The maximum resonant dip of the $40-{\mu}m$ DNLPFG sensor was -26.522 dB under 0.049-N loading, and the largest force sensitivity was -436.664 dB/N. The results demonstrate that the proposed DNLPFG has potential for force sensing applications.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2000년도 추계학술대회 논문집
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• pp.939-942
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• 2000

Single point diamond turning technique for optical crystals is reported in this paper. The main factors influencing the machined surface quality are discovered and regularities of machining process are drawn. Optical crystals have found more and more important applications in the field of modern optics. Optical crystals are mostly brittle materials of poor machinability. The traditional machining method is polishing which has many shortcomings such as low production efficiency, poor ability to be automatically controlled and edge effect of the workpiece. The purpose of our research is to find the optimum machining conditions for ductile cutting of optical crystals and apply the SPDT technique to the manufacturing of ultra precision optical components of brittle material.

• 대한기계학회논문집A
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• 제33권3호
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• pp.196-200
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• 2009

Lithium niobate ($LN:LiNbO_3$) is a compound of niobium, lithium and oxygen. The characteristics of LN are piezoelectricity, ferroelectricity and photoelectricity, and which is widely used in surface acoustic wave (SAW). To manufacture LN devices, the LN surface should be a smooth surface and defect-free because of optical property, but the LN material is processed difficult b traditional processes such as grinding and mechanical polishing (MP) because of its brittleness. To decrease defects, chemical mechanical polishing (CMP) was applied to the LN wafer. In this study, the suitable parameters such as down force and relative velocity, were investigated for the LN CMP process To improve roughness, the LN CMP was performed using the parameters that were the highest removal rate among process parameters. And, evaluation of optical property was performed by the optical reflectance.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2003년도 추계학술대회논문집
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• pp.234-238
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• 2003

Ultra small optical drive or PCMCIA type needs a focusing actuator because or applying Blue Laser and enhancing compatibility according to disk physical specification. Based on this need, this paper presents a novel focusing actuator adapted for ultra small optical drive of PCMCIA type. The focusing actuator using Lorenz force generated consists of coil, magnets and plate springs of pivoting. The design issues of the focusing actuator are the flexibility to focus direction, the rigidity to track direction and the higher natural mode of the moving part. For settling these Issues, this paper present mechanical design, computer simulations and test results of the realized focusing actuator. Finally, suitability and usefulness of the focusing actuator was demonstrated by the comparison of simulations and test results in a view of the possibility adapted for ultra small optical drive.