• Journal of Institute of Control, Robotics and Systems
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• v.19 no.3
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• pp.268-274
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• 2013

In this paper, the performance analysis of optics-based sensor node localization using ToF (Time of Flight) scheme is conducted. Generally, the position of the sensor node is calculated on the base station. And the base station scans neighboring sensor nodes with a laser. The laser which is reflected from one sensor node, however, can be reached to the base station at different angles according to the scanning resolution. This means that the error of the reached angle can increase and one node may be recognized as different nodes. Also the power of laser can decrease because the laser signal spread. Thus the sensor node which is located at a long distance from the base station cannot be detected. In order to overcome these problems which can be occurred in localization using ToF, the beam spot, the scanning resolution, the size of reflector and the power of laser at the sensor node were analyzed. It can be expected that the consequence of analysis can be provided in acquisition of accurate position of sensor node and construction of optics-based sensor node localization system.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.05b
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• pp.74-77
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• 2002

Ferroelectric Random Access Memory(FRAM) and MEMS applications require noble metal or refractory metal oxide electrodes. In this study, Ru thin films were etched using $O_2$+10% $CF_4$ plasma in an inductively coupled plasma(ICP) etching system. The etch rate of Ru thin films was examined as function of rf power, DC bias applied to the substrate. The enhanced etch rate can be obtained not only with increasing rf power and DC bias voltage, but also with small addition $CF_4$ gas. The selectivity of $SiO_2$ over Ru are 1.3. Radical densities of oxygen and fluorine in $CF_4/O_2$ plasma have been investigated by optical emission spectroscopy(OES). The etching profiles of Ru films with an photoresist pattern were measured by a field emission scanning electron microscope (FE-SEM). The additive gas increases the concentration of oxygen radicals, therefore increases the etch rate of the Ru thin films and enhances the etch slope. In $O_2$+10% $CF_4$ plasma, the etch rate of Ru thin films increases up to 10% $CF_4$ but decreases with increasing $CF_4$ mixing ratio.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.19 no.7
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• pp.618-623
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• 2006

Hydrogenated Diamond-like carbon (DLC) films were prepared by the radio frequency plasma enhanced chemical vapor deposition (RF PECVD) method on silicon substrates using methane $(CH_4)$ and hydrogen $(H_2)$ gas. The wear track on the DLC films was examined after the ball-on disk (BOD) measurement with a Raman mapping method. The BOD measurement of the DLC films was performed for 1 to 3 hours with a 1-hour step time. The sliding traces on the hydrogenated DLC film after the BOD measurement were also observed using an optical microscope. The surface roughness and cross-sectional images of the wear track were obtained using an atomic force microscope (AFM). The novel Raman mapping method effectively shows the graphitization of DLC films of $300{\mu}m\times300{\mu}m$ area according to the sliding time by G-peak positions (intensities) and $I_D/I_G$ ratios.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.467-470
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• 2004

Diamond-Like Carbon (DLC) thin film is a semiconductor with high mechanical hardness, low friction coefficient, high chemical inertness, and optical transparency. DLC thin films have widespread applications as protective coatings and solid lubricant coatings in areas such as Hard Disk Drive (HDD) and Micro-Electro-Mechanical-Systems (MEMS). In this work, the wear characteristics of DLC thin films deposited on silicon substrates using a DC-magnetron sputtering system were analyzed. The wear tracks were measured with an Atomic Force Microscope (AFM). To identify the sp2 and sp3 hybridization of carbon bonds and other bonds Raman spectroscopy was used. The structural information of DLC thin films was obtained with Fourier transform infrared spectroscopy and wear tests were conducted by using a micro-pin-on-reciprocator tester. Results showed that the wear characteristics were dependent on the sputtering conditions. The wear rate could be correlated with the bonding state of the DLC thin film.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.33 no.10
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• pp.803-810
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• 2009

Micromirrors have a wide range of applications such as optical switches, laser scanners, and digital projection displays. Due to their low performances and high costs, however, practical applications of micromirrors are quite limited. At present micromirrors demand not only a better design but also a simple fabrication process. In this study a twisting-type micromirror that can be driven by two thermal bimorph actuators bending in opposite directions is designed from electro-thermo-mechanical theories and fabricated through a simple MEMS process. Each actuator consists of $SiO_2$ and gold thin-film layers. Simplified analytical model has been built to optimize the performance of micromirror. Due to unexpected resistance increase of metal film and alignment mismatch during fabrication process, experimental rotation angles of micromirrors are about $11^{\circ}$ at applied voltages less than 0.6V. From numerical simulation and analytical studies, however, the next design can provide rotation angles over $20^{\circ}$ at the same applied voltage.

• Journal of the Korean Vacuum Society
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• v.8 no.4A
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• pp.425-431
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• 1999

$Pb(Zr_{0.52}, Ti_{0.48})O_3$ (PZT) thick films as an actuating material with conducting oxides, $(La_{0.5}Sr_{0.5}) CoO_3$ (LSCO), have been fabricated by sol-gel method for Optical Micro-Electro-Mechanical System (MEMS) devices, in which PZT/LSCO/SiO2 structures were used. In order to improve the adhesion to LSCO solution in order to enhance the wetting behavior of a water-based LSCO precursor solution and further to improve the adhesion between LSCO and $SiO_2$ layers. PZT films were made using 1-3 propanediol based precursor solution which has a high viscosity and a boiling point appropriate for thick film fabrication. In the precursor solution, Ti-propoxied and Zr-propoxied are partially substituted with acetylacetone to achieve the solution stability while maintaining reactivity. Crack free PZT films (0.8~1$\mu\textrm{m}$) have been successfully fabricated at crystallization temperatures above $700^{\circ}C$. Dielectric constants and dielectric losses of the PZT films were 900~1200and 2~5%, respectively. Piezoelectric constant $d_{33}$ of the PZT films constrained by a substrate were 200pm/V at 100kV/cm.

• Electronics and Telecommunications Trends
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• v.16 no.2 s.68
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• pp.10-30
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• 2001

본 고에서는 차세대 인터넷 구축을 위한 요소 기술에 대하여 전반적으로 살펴본다. 우리는 현재보다 1,000배 빠른 차세대 인터넷의 구축을 목표로 하고 있다. 따라서 과연 그만큼 빠른 인터넷의 구축이 필요할 것인가를 검증하는 차원에서 향후 5년 정도의 가까운 시일 내에 있을 인터넷 트래픽의 증대에 대한 수요를 서비스 측면에서 살펴본다. 차세대 인터넷은 풍부한 전송대역폭의 제공과 QoS를 기반으로 한 신뢰성 있는 데이터의 전달을 특징으로 하며, 이를 위해서 광스위칭 기반의 전송 하부구조 위에 MPLS 기술이 사용될 것으로 예상된다. 이를 위한 요소기술로 DWDM 전송기술, MEMS 기반의 광스위칭 소자기술과 함께 광스위칭 기술에 지능을 부여하기 위한 표준화 동향에 대하여 살펴본다. 현재의 IP 기반 인터넷에서 제공하지 못하는 QoS 기능은 MPLS에서 가능하게 될 것이다. MPLS에서의 중요한 응용인 트래픽 엔지니어링과 VPN 서비스는 망이 보다 안정적으로 유지될 수 있도록 지원하면서 기업들이 MPLS 망을 이용하여 자신의 망을 구축할 수 있도록 지원할 것이다. MPLS 기술은 IETF에서 표준화가 진행되고 있으며 라우터 개발업체 및 ISP의 큰 지원을 받고 있다. 차세대 인터넷을 위해서는 전달망의 구축도 필요하지만 이와 함께 차세대 인터넷 응용을 위한 컴퓨팅 인프라도 균형있게 개발되어야 한다. 따라서 현재 그 윤곽을 드러내고 있는 차세대 인터넷 응용 인프라 환경에 대하여 그 등장 배경과 관련 기술에 대하여 조망한다. 차세대 인터넷의 개발을 위해서는 광처리 관련 원천 기술, 프로세서 개발 기술, 라우터 설계 기술 및 서버 개발 기술, 어플리케이션 기반 기술 및 사용자 인터페이스 기술들이 전략적으로 이음새 없이 매끄럽게 통합되어야 한다. 이러한 관점에서 필요한 요소기술들을 다수 보유하고 있는 ETRI의 역할은 매우 중요하리라 생각된다.

• Design & Manufacturing
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• v.14 no.1
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• pp.36-41
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• 2020

Recently, due to the development of MEMS technology, researches for the production of effective micro structures and shapes have been actively conducted. However, the process technology based on chemical etching has a number of problems such as environmental pollution and time problems due to multi-process. Various processes to cope with this process are being studied, and one of the mechanical etching processes is the powder blasting process. This process is a method of spraying fine particles, which has the advantage of being an effective process in manufacturing hard brittle materials. However, it is also a process that adversely affects the material surface roughness and material properties due to the impact of the injection of fine particles. In this study, after fabricating micro-channels in fused silica glass with excellent optical properties among the hard brittle materials, we used the nano indentation system to analyze the micro parts using nano-particles as well as machinability and surface roughness analysis of the processed surface. The analysis was performed for the effective processing of powder blasting.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 2003.11a
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• pp.360-367
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• 2003

Diamond-like carbon(DLC) films are considerable research interest because of their widespread applications as protective coatings in areas such as optical windows, magnetic storage disks, car parts, biomedical coatings and as micro-electromechanical devices(MEMs). DLC films were deposited on WC-Co by PECVD using Ar, $C_2H_4$ gas. Tribological tests were conducted using a ball-on-disk type tribometer in dry air. Three kinds of counter-bodies balls were used. The counter-bodies balls are SM45C, SUJ2 and $ZrO_2$(3.17mm in diameter). Wear rate of the samples were calculated after measuring the worn-out volume of the wear track. As results wear test, the higher hardness of counter-bodies, friction coefficient low. As result of XPS estimation, wear debris generated as an oxide lower the friction coefficient.

• Journal of Information Display
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• v.11 no.2
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• pp.84-90
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• 2010

This paper presents the effects of a dielectric layer and an electrolyte on the driving performance of an electrowetting on dielectric (EWOD)-based liquid lens. The range of tunable focal length of the EWOD-based liquid lens was highly dependent on the conditions of the dielectric layer, which included an inorganic oxide layer and an organic hydrophobic layer. Moreover, experiments on the physical and optical durability of electrolyte by varying temperature conditions, were conducted and their results were discussed. Finally, the lens with a truncated-pyramid silicon cavity having a sidewall dielectrics and electrode was fabricated by anisotropic etching and other micro-electromechanical systems (MEMS) technologies in order to demonstrate its performance. The lens with $0.6-{\mu}m$-thick $SiO_2$ layer and 10 wt% LiCl-electrolyte exhibited brilliant focal-length tunability from infinity to 3.19 mm.