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http://dx.doi.org/10.4313/JKEM.2006.19.7.618

A Study on Detailed Structural Variation of Diamond-like Carbon Thin Film by a Novel Raman Mapping Method  

Choi, Won-Seok (성균관대학교 플라스마 응용 표면기술 연구센터)
Publication Information
Journal of the Korean Institute of Electrical and Electronic Material Engineers / v.19, no.7, 2006 , pp. 618-623 More about this Journal
Abstract
Hydrogenated Diamond-like carbon (DLC) films were prepared by the radio frequency plasma enhanced chemical vapor deposition (RF PECVD) method on silicon substrates using methane $(CH_4)$ and hydrogen $(H_2)$ gas. The wear track on the DLC films was examined after the ball-on disk (BOD) measurement with a Raman mapping method. The BOD measurement of the DLC films was performed for 1 to 3 hours with a 1-hour step time. The sliding traces on the hydrogenated DLC film after the BOD measurement were also observed using an optical microscope. The surface roughness and cross-sectional images of the wear track were obtained using an atomic force microscope (AFM). The novel Raman mapping method effectively shows the graphitization of DLC films of $300{\mu}m\times300{\mu}m$ area according to the sliding time by G-peak positions (intensities) and $I_D/I_G$ ratios.
Keywords
DLC(Diamond-like carbon); PECVD(Plasma enhanced vapor deposition); BOD(Ball-on disk); MEMS(Micro electro mechanical system); Raman mapping method;
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