Design & Manufacturing

Korean Society of Die & Mold Engineering (한국금형공학회)
권호 표지

Evaluation of micro-channel characteristics of fused silica glass using powder blasting

Powder blasting을 이용한 Fused silica glass의 마이크로 채널 가공 및 특성 평가에 관한 연구

  • Lee, Jung-Won (Department of Semiconductor Quality Measurement, Korea Polytechnics) ;
  • Kim, Tae-Min (Department of Mechanical Engineering, Inha University) ;
  • Shin, Bong-Cheol (Department of Mechanical Engineering, Inha University)
  • 이정원 (한국폴리텍대학 반도체품질측정과) ;
  • 김태민 (인하대학교 기계공학과) ;
  • 신봉철 (인하대학교 기계공학과)
  • Received : 2020.03.16
  • Accepted : 2020.03.31
  • Published : 2020.03.31
Download PDF
⟨ Previous Next ⟩

Abstract

Recently, due to the development of MEMS technology, researches for the production of effective micro structures and shapes have been actively conducted. However, the process technology based on chemical etching has a number of problems such as environmental pollution and time problems due to multi-process. Various processes to cope with this process are being studied, and one of the mechanical etching processes is the powder blasting process. This process is a method of spraying fine particles, which has the advantage of being an effective process in manufacturing hard brittle materials. However, it is also a process that adversely affects the material surface roughness and material properties due to the impact of the injection of fine particles. In this study, after fabricating micro-channels in fused silica glass with excellent optical properties among the hard brittle materials, we used the nano indentation system to analyze the micro parts using nano-particles as well as machinability and surface roughness analysis of the processed surface. The analysis was performed for the effective processing of powder blasting.

Keywords

References

  1. D. S. Park, J. K. Kim, J. Y. Han, E. J. Seong, J. Q. Qia., "Blasted Surface Characteristics in Machining of Glass by Powder Blasting", KSMPE, Vol. 6 pp. 261-266, 2005.
  2. D. Solignac, A. Sayah, S. Constantin, R. Freitag, M.A.M. Gijs., "Powder blasting for the realisation of microchips for bio-analytic applications", Sensors and Actuators A, Vol. 92, pp. 388-392, 2001. https://doi.org/10.1016/S0924-4247(01)00577-5
  3. E. Belloy, S. Thurre, E. Walckiers, A. Sayah, M. A. M. Gijs, "The introduction of powder blasting for sensor and microsystem applications", Sensors and Actuators, Vol. 84, pp. 330-337, 2000. https://doi.org/10.1016/S0924-4247(00)00390-3
  4. G. M. Pharr., "Measurement of mechanical properties by ultra-low load indentation", Materials Science and Engineering A, Vol. 253, pp. 151-159, 1998. https://doi.org/10.1016/S0921-5093(98)00724-2
  5. H. Wensink, H. V. Jansen, J. W. Berenschot, M. C. Elwenspoek, "Mask materials for powder blasting", J. Micromech. Microeng., Vol. 10, pp. 175-180, 2000. https://doi.org/10.1088/0960-1317/10/2/313
  6. D. S. Park, D. K. Kang, J. K. Kim, E. J. Seong, J. Y. Han., "Machining and Crack Characteristics of the Glass Cap for OELD by Powder Blasting", Journal of Korean Society of Machine Tool Engineers, Vol. 15, No. 5, pp. 51-58, 2006.
  7. D. S. Park, M. W. Cho, D. W. Kim, W. S. Cho., "Micro-Pattern Machining Characteristics Evaluation of Si3N4-hBN based Machinable Ceramics Using Powder Blasting Process", Korean Society of Machine Tool Engineers, Vol. 13, No. 2, pp. 33-39, 2004.
  8. M. W. Cho, W. S. Cho, D. S. Park, J. H. Lee, E. S. Lee, T. I. Seo, D. W. Kim., "Application of Powder Blasting Techniques to Micro-pattern Making Process for Si3N4-hBN Composites" Key Engineering Materials, Vol. 287, pp. 51-56 https://doi.org/10.4028/www.scientific.net/KEM.287.51
  9. J. J. Kim, J. J. Lee, Y. H. Lee, J. I. Jang, D. G. Kwon., "Surface roughness effect in instrumented indentation: A simple contact depth model and its verification", J. Mater. Res, Vol. 21, No. 12, pp. 2975-2978, 2006. https://doi.org/10.1557/jmr.2006.0370
  10. Y. H. Lee, J. Y. Kim, Y. H. Huh, S. H. Nahm, and D. I. Kwon., "Strength Assesment of Thin Film Based on the Measurement of Nanoindentation-induced Plastic Deformation Zone", Journal of Korean Institute of Metals and Materials, Vol. 44, No. 10, pp. 678-684, 2006.
  11. Y. H. Lee, D. I. Kwon., "Micromechanical Analysis of the Effect of Residual Stress on the Nanoindentation Curve", Journal of Korean Institute of Metals and Materials, Vol. 40, No. 12, pp. 1236-1243, 2002.
  12. D. I. Son, Y. C. Joo, D. I. Kwon., "Evaluation of Young's Modulus and Yield Strength of Al Film Using Microcantilever Beams", Journal of Korean Institute of Metals and Materials, Vol. 39, No. 3, pp. 274-282, 2001.