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http://dx.doi.org/10.3795/KSME-B.2009.33.10.803

Design and Fabrication of Low-Voltage Twisting-Type Thermal Actuators for Micromirrors  

Kim, Dong-Hyun (홍익대학교 대학원 기계공학과)
Park, Yong-Chul (홍익대학교 대학원 기계공학과)
Park, Seung-Ho (홍익대학교 기계시스템디자인공학과)
Kwon, Oh-Myoung (고려대학교 기계공학과)
Choi, Young-Ki (중앙대학교 기계공학부)
Lee, Joon-Sik (서울대학교 기계항공공학부)
Publication Information
Transactions of the Korean Society of Mechanical Engineers B / v.33, no.10, 2009 , pp. 803-810 More about this Journal
Abstract
Micromirrors have a wide range of applications such as optical switches, laser scanners, and digital projection displays. Due to their low performances and high costs, however, practical applications of micromirrors are quite limited. At present micromirrors demand not only a better design but also a simple fabrication process. In this study a twisting-type micromirror that can be driven by two thermal bimorph actuators bending in opposite directions is designed from electro-thermo-mechanical theories and fabricated through a simple MEMS process. Each actuator consists of $SiO_2$ and gold thin-film layers. Simplified analytical model has been built to optimize the performance of micromirror. Due to unexpected resistance increase of metal film and alignment mismatch during fabrication process, experimental rotation angles of micromirrors are about $11^{\circ}$ at applied voltages less than 0.6V. From numerical simulation and analytical studies, however, the next design can provide rotation angles over $20^{\circ}$ at the same applied voltage.
Keywords
Micromirror; Thermal Actuator; Twisting-Type;
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Times Cited By KSCI : 1  (Citation Analysis)
Times Cited By SCOPUS : 0
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1 Schweizer, S., Calmes, S., Laudon, M. and Renaud, P., 1999, 'Thermally Actuated Optical Microscanner with Large Angle and Low Consumption,' Sensors and Actuators A: Physical, Vol. 76, No. 1-3, pp. 470-477   DOI   ScienceOn
2 Nakai, A., Hoshino, K., Matsumoto, K., and Shimoyama, I., 2007, 'Double-Sided Scanning Micromirror Array for Autostereoscopic Display,' Sensors and Actuators A: Physical, Vol. 135, No. 1, pp. 80-85   DOI   ScienceOn
3 Schenk, H., Durr, P., Kunze, D., Lakner, H., and Kuck, H., 2001, 'A Resonantly Excited 2D-Micro-Scanning- Mirror with Large Deflection,' Sensors and Actuators A: Physical, Vol. 89, No. 1-2, pp. 104-111   DOI   ScienceOn
4 Krishnamoorthy, U., Li, K., Yu, K., Lee, D., Heritage, J. P. and Solgaard, O., 2002, 'Dual-Mode Micromirrors for Optical Phased Array Applications,' Sensors and Aactuators. A, Physical, Vol. 97-98, pp. 21-26   DOI   ScienceOn
5 Yalcinkaya, A. D., Ergeneman, O., and Urey, H., 2007, 'Polymer Magnetic Scanners for Bar Code Applications,' Sensors and Actuators A: Physical, Vol. 135, No. 1, pp. 236-243   DOI   ScienceOn
6 Kueppers, H., Leuerer, T., Schnakenberg, U., Mokwa, W., Hoffmann, M., Schneller, T., Boettger, U. and Waser, R., 2002, 'PZT Thin Films for Piezoelectric Microactuator Applications,' Sensors and Actuators A: Physical, Vol. 97-98, pp. 680-684   DOI   ScienceOn
7 Pichonat-Gallois, E., Petrini, V., de Labachelerie, M., 2004, 'Design and Fabrication of Thermal Actuators Used for a Micro-Optical Bench: Application to a Tunable Fabry-Perot Filter,' Sensors and Actuators A: Physical, Vol. 114, No. 2-3, pp. 260-266   DOI   ScienceOn
8 Kim, D. H., Oh, K. S., Park, Y. C. and Park, S., 2009, 'Design and Analysis of a Twisting-Type Thermal Actuator for Micromirrors,' Journal of Mechanical Science and Technology (to appear)   DOI   ScienceOn
9 Intellisuite 8, Intellisense Software Corp, Boston, Massachusetts, USA, 2005
10 Tang, W., Xu, K., Wang P. and Li, X., 2003, 'Residual Stress and Crystal Orientation in Magnetron Sputtering Au Films,' Materials Letters, Vol. 57, No. 20, pp. 3101-3106   DOI   ScienceOn
11 Chu, W. H., Mehregany, M. and Mullen, R. L., 1993, 'Analysis of Tip Deflection and Force of a Bimetallic Cantilever Microactuator,' Journal of Micromechanics and Microengineering, Vol. 3, No. 1, pp. 4-7   DOI   ScienceOn
12 Liew, L.-A., Tuantranont, A., and Bright, V. M., 2000, 'Modeling of Thermal Actuation in a Bulk- Micromachined CMOS Micromirror' Microelectronics Journal, Vol. 31, No. 9-10, pp. 791-801   DOI   ScienceOn
13 Tsou, C., Lin, W. T., Fan, C. C. and Chou, B. C. S., 2005, 'A Novel Self-Aligned Vertical Electrostatic Comb Drives Actuator for Scanning Micromirrors,' Journal of Micromechanics and Microengineering, Vol. 15, No. 4, pp. 855-860   DOI   ScienceOn
14 Judy, J. W., Muller, R. S., 1996, 'Magnetic Microactuation of Torsional Polysilicon Structures,' Sensors and Actuators A: Physical, Vol. 53, No. 1-3, pp. 392-397   DOI   ScienceOn
15 Filhol, F., Defaÿ, E., Divoux, C., Zinck, C. and Delaye, M. T., 2002, 'Resonant Micro-Mirror Excited by a Thin-Film Piezoelectric Actuator for Fast Optical Beam Scanning,' Sensors and Actuators A: Physical, Vol. 123-124, pp. 483-489   DOI   ScienceOn