Transactions of the Korean Society of Mechanical Engineers B (대한기계학회논문집B)

The Korean Society of Mechanical Engineers (대한기계학회)
권호 표지
DOI QR코드

DOI QR Code

Design and Fabrication of Low-Voltage Twisting-Type Thermal Actuators for Micromirrors

마이크로 거울의 구동을 위한 저전압 비틀림형 열구동기의 설계 및 제작

  • 김동현 (홍익대학교 대학원 기계공학과) ;
  • 박용철 (홍익대학교 대학원 기계공학과) ;
  • 박승호 (홍익대학교 기계시스템디자인공학과) ;
  • 권오명 (고려대학교 기계공학과) ;
  • 최영기 (중앙대학교 기계공학부) ;
  • 이준식 (서울대학교 기계항공공학부)
  • Published : 2009.10.01
Download PDF
⟨ Previous Next ⟩

Abstract

Micromirrors have a wide range of applications such as optical switches, laser scanners, and digital projection displays. Due to their low performances and high costs, however, practical applications of micromirrors are quite limited. At present micromirrors demand not only a better design but also a simple fabrication process. In this study a twisting-type micromirror that can be driven by two thermal bimorph actuators bending in opposite directions is designed from electro-thermo-mechanical theories and fabricated through a simple MEMS process. Each actuator consists of $SiO_2$ and gold thin-film layers. Simplified analytical model has been built to optimize the performance of micromirror. Due to unexpected resistance increase of metal film and alignment mismatch during fabrication process, experimental rotation angles of micromirrors are about $11^{\circ}$ at applied voltages less than 0.6V. From numerical simulation and analytical studies, however, the next design can provide rotation angles over $20^{\circ}$ at the same applied voltage.

Keywords

References

  1. Tsou, C., Lin, W. T., Fan, C. C. and Chou, B. C. S., 2005, 'A Novel Self-Aligned Vertical Electrostatic Comb Drives Actuator for Scanning Micromirrors,' Journal of Micromechanics and Microengineering, Vol. 15, No. 4, pp. 855-860 https://doi.org/10.1088/0960-1317/15/4/025
  2. Schenk, H., Durr, P., Kunze, D., Lakner, H., and Kuck, H., 2001, 'A Resonantly Excited 2D-Micro-Scanning- Mirror with Large Deflection,' Sensors and Actuators A: Physical, Vol. 89, No. 1-2, pp. 104-111 https://doi.org/10.1016/S0924-4247(00)00529-X
  3. Krishnamoorthy, U., Li, K., Yu, K., Lee, D., Heritage, J. P. and Solgaard, O., 2002, 'Dual-Mode Micromirrors for Optical Phased Array Applications,' Sensors and Aactuators. A, Physical, Vol. 97-98, pp. 21-26 https://doi.org/10.1016/S0924-4247(01)00814-7
  4. Nakai, A., Hoshino, K., Matsumoto, K., and Shimoyama, I., 2007, 'Double-Sided Scanning Micromirror Array for Autostereoscopic Display,' Sensors and Actuators A: Physical, Vol. 135, No. 1, pp. 80-85 https://doi.org/10.1016/j.sna.2006.07.036
  5. Judy, J. W., Muller, R. S., 1996, 'Magnetic Microactuation of Torsional Polysilicon Structures,' Sensors and Actuators A: Physical, Vol. 53, No. 1-3, pp. 392-397 https://doi.org/10.1016/0924-4247(96)01138-7
  6. Yalcinkaya, A. D., Ergeneman, O., and Urey, H., 2007, 'Polymer Magnetic Scanners for Bar Code Applications,' Sensors and Actuators A: Physical, Vol. 135, No. 1, pp. 236-243 https://doi.org/10.1016/j.sna.2006.06.059
  7. Kueppers, H., Leuerer, T., Schnakenberg, U., Mokwa, W., Hoffmann, M., Schneller, T., Boettger, U. and Waser, R., 2002, 'PZT Thin Films for Piezoelectric Microactuator Applications,' Sensors and Actuators A: Physical, Vol. 97-98, pp. 680-684 https://doi.org/10.1016/S0924-4247(01)00850-0
  8. Filhol, F., Defaÿ, E., Divoux, C., Zinck, C. and Delaye, M. T., 2002, 'Resonant Micro-Mirror Excited by a Thin-Film Piezoelectric Actuator for Fast Optical Beam Scanning,' Sensors and Actuators A: Physical, Vol. 123-124, pp. 483-489 https://doi.org/10.1016/j.sna.2005.04.029
  9. Schweizer, S., Calmes, S., Laudon, M. and Renaud, P., 1999, 'Thermally Actuated Optical Microscanner with Large Angle and Low Consumption,' Sensors and Actuators A: Physical, Vol. 76, No. 1-3, pp. 470-477 https://doi.org/10.1016/S0924-4247(99)00012-6
  10. Liew, L.-A., Tuantranont, A., and Bright, V. M., 2000, 'Modeling of Thermal Actuation in a Bulk- Micromachined CMOS Micromirror' Microelectronics Journal, Vol. 31, No. 9-10, pp. 791-801 https://doi.org/10.1016/S0026-2692(00)00061-6
  11. Chu, W. H., Mehregany, M. and Mullen, R. L., 1993, 'Analysis of Tip Deflection and Force of a Bimetallic Cantilever Microactuator,' Journal of Micromechanics and Microengineering, Vol. 3, No. 1, pp. 4-7 https://doi.org/10.1088/0960-1317/3/1/002
  12. Pichonat-Gallois, E., Petrini, V., de Labachelerie, M., 2004, 'Design and Fabrication of Thermal Actuators Used for a Micro-Optical Bench: Application to a Tunable Fabry-Perot Filter,' Sensors and Actuators A: Physical, Vol. 114, No. 2-3, pp. 260-266 https://doi.org/10.1016/j.sna.2004.01.035
  13. Kim, D. H., Oh, K. S., Park, Y. C. and Park, S., 2009, 'Design and Analysis of a Twisting-Type Thermal Actuator for Micromirrors,' Journal of Mechanical Science and Technology (to appear) https://doi.org/10.1007/s12206-009-0113-1
  14. Intellisuite 8, Intellisense Software Corp, Boston, Massachusetts, USA, 2005
  15. Tang, W., Xu, K., Wang P. and Li, X., 2003, 'Residual Stress and Crystal Orientation in Magnetron Sputtering Au Films,' Materials Letters, Vol. 57, No. 20, pp. 3101-3106 https://doi.org/10.1016/S0167-577X(03)00004-1