• Title/Summary/Keyword: Optical Films

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RF magnetron sputtering으로 성장된 ZnMgO박막의 구조적, 광학적 특성 분석 (Optical and structural properties of ZnMgO thin films by RF co-sputtering)

  • 강시우;김영이;안철현;조형균
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2007년도 하계학술대회 논문집 Vol.8
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    • pp.178-178
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    • 2007
  • II-VI의 넓은 밴드갭 (3.37 eV)을 가지는 ZnO는 solar cells, transparent conductive electrodes, ultraviolet light emitters, and chemical sensors 등에 응용되고 있다. 특히 고효율 ZnO계 발광 소자 구현을 위하여 MgO (7.7eV), CdO (2.0eV) 등의 고용을 통한 밴드갭을 엔지니어링 하며, 단파장 영역의 광원을 확보하기 위하여 MgO 첨가를 통한 밴드갭 에너지를 증가시키는 방향으로의 연구가 활발하다. 그러나 ZnO의 wurtzite 구조와 MgO의 rocksalt 구조의 상이한 결정구조로 인하여 Mg의 고용한계는 4 at. %, 4.1 eV 알려져 있다. 본 실험에서는 p-type Si (100), c-sapphire (0002)과 GaN 기판 위에 MgO (99.999 %)와 ZnO (99.999 %) 두가지 타겟을 사용하여 RF co-스퍼터링법으로 ZnMgO 박막을 증착 하였다. 이때 ZnO 타겟의 power 밀도는 고정 시키고 MgO 타겟의 power 밀도를 변화 시키며 Mg의 함량을 조절하여 그에 따른 광학적 구조적 특성의 변화를 연구 하였다. 성장된 ZnMgO 박막은 MgO 타겟의 power 밀도가 증가할 때 Mg의 함량이 10 at. %까지 증가 하며, 그에 따른 표면의 거칠기 및 입계 크기가 감소하며, 박막의 성장속도 또한 감소함을 SEM과 AFM을 통하여 알 수 있었다. XRD를 동하여 ZnMgO 박막의 (0002) peak의 위치는 $34.50^{\circ}{\sim}34.7^{\circ}$로 오른쪽으로 이동하며, c-축으로 성장하였음을 알 수 있다. PL과 UV룰 동하여, Mg의 함량이 증가 할수록 박막의 밴드갭 에너지는 3.2 eV에서 4.1 eV 로 증가하였다.

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RF Magnetron Sputtering법에 의해 증착된 ATO박막의 열처리에 따른 구조적, 전기적, 광학적 특성 변화 (Effect of annealing temperature on the Structural, Electrical, Optical Properties of ATO Thin Films by RF Magnetron Sputtering)

  • 문인규;이성욱;박미주;김영렬;최원석;홍병유
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2007년도 추계학술대회 논문집
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    • pp.335-335
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    • 2007
  • 본 연구에서는 RF Magnetron Sputtering 법으로 94:6 wt%의 비율로 Sb가 첨가된 $SnO_2$ 타겟을 사용하여 실온에서 ATO(Antimony doped Tin Oxide) 박막을 증착하고, 열처리가 ATO 박막의 구조적, 전기적, 광학적 특성에 미치는 효과를 연구하고자 하였다. ATO 박막의 두께는 약 200 nm로 증착하였으며, 실험 조건으로는 Ar 유량을 100 seem, 진공도는 1, 5, 10 mTorr로 변화시켰으며 스퍼터링 파워는 100, 150, 200, 250 W로 조절하였다. 증착되어진 박막은 vacuum 상태에서 300, $600^{\circ}C$의 온도에서 열처리를 수행하였으며 결과적으로 스퍼터링 파워가 증가함에 따라 비저항이 감소하였고, 250 W의 파워와 10 mTorr의 공정압력 조건에서 $600^{\circ}C$로 열처리한 ATO 박막은 $5{\times}10^{-3}{\Omega}-cm$의 저항률과 85.3%의 높은 투과도를 가지는 우수한 투명 전도막을 얻을 수 있었다.

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고분자 기판위에 유기 용매를 사용하지 않은 다층 박막 Encapsulation 기술 개발 (Improvement of Permeation of Solvent-free Multi-Layer Encapsulation of thin films on Ethylene Terephthalate(PET))

  • 강희진;한진우;김종연;문현찬;최성호;박광범;김태하;김휘운;서대식
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2006년도 학술대회 및 기술세미나 논문집 디스플레이 광소자
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    • pp.56-57
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    • 2006
  • In this paper, the inorganic multi-layer thin film encapsulation was newly adopted to protect the organic layer from moisture and oxygen. Using the electron beam, Sputter, inorganic multi-layer thin-film encapsulation was deposited onto the Ethylene Terephthalate(PET) and their interface properties between inorganic and organic layer were investigated. In this investigation, the SiON SiO2 and parylene layer showed the most suitable properties. Under these conditions, the WVTR for PET can be reduced from a level of $0.57\;g/m^2/day$ (bare subtrate) to 1*10-5 g/$m^2$/day after application of a SiON and SiO2 layer. These results indicates that the PET/SiO2/SiON/Parylene barrier coatings have high potential for flexible organic light-emitting diode(OLED) applications.

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Spectroscopic Ellipsometry of Si/graded-$Si_{1-x}Ge_x$/Si Heterostructure Films Grown by Reduced Pressure Chemical Vapor Deposition

  • Seo, J.J.;Choi, S.S.;Yang, H.D.;Kim, J.Y.;Yang, J.W.;Han, T.H.;Cho, D.H.;Shim, K.H.
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2006년도 하계학술대회 논문집 Vol.7
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    • pp.190-191
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    • 2006
  • We have investigated optical properties of Si/graded-$Si_{1-x}Ge_x$/Si heterostructures grown by reduced pressure chemical vapor deposition. Compared to standard condition using Si(100) substrate and growth temperature of $650^{\circ}C$, Si(111) resulted in low growth rate and high Ge mole fraction. Also samples grown at higher temperatures exhibited increased growth rate and reduced Ge mole fraction. The features regarding both substrate temperature and crystal orientation, representing high incorporation of silicon supplied from gas stream played as a key parameter, illustrate that reaction control were prevailed in this process growth condition. Using secondary ion mass spectroscopy and spectroscopic ellipsometry, microscopic changes in atomic components could be analyzed for Si/graded-$Si_{1-x}Ge_x$/Si heterostructures.

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Acousto-Optic 기법을 이용한 Pt/Ti 박막 계면의 접합특성 평가 (Evaluating Interfacial Adhesion Properties of Pt/Ti Thin-Film by Using Acousto-Optic Technique)

  • 박해성;;;박익근
    • 비파괴검사학회지
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    • 제36권3호
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    • pp.188-194
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    • 2016
  • 본 연구에서는 Pt/Ti 박막과 기판 사이 계면의 접합특성을 비파괴적으로 평가하는 acousto-optic 기법을 제안한다. 현재 상용화된 기술만으로 마이크로/나노 스케일의 박막을 평가하는데 많은 어려움이 있기 때문에 미세구조 변화에 민감한 광학기술과 음향기술이 결합된 간섭계를 적용하여 연구를 수행하였다. 사용한 기법은 마이켈슨 간섭계를 기반으로 하며, 거울에 의한 광 경로차 대신 박막시험편 계면의 진동 영향에 따라 발생하는 간섭현상을 분석하였다. 박막시험편은 특정 주파수에서 공진과 유사한 현상을 보이고 이로 인해 프린지 패턴의 콘트라스트가 낮아지므로, 각 주파수 대역별 프린지 패턴 변화를 스펙트럼 결과로 정량화하여 제안된 기법을 이용한 박막의 접합특성 평가 가능성을 확인하였다.

Anodic Oxidation Behavior of AZ31 Magnesium Alloy in Aqueous Electrolyte Containing Various Na2CO3 Concentrations

  • Moon, Sungmo;Kim, Yeajin
    • 한국표면공학회지
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    • 제49권4호
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    • pp.331-338
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    • 2016
  • In this work, anodic oxidation behavior of AZ31 Mg alloy was studied as a function of $Na_2CO_3$ concentration in electrolyte by voltage-time curves and observation of surface appearances and morphologies after the anodic treatments, using optical microscopy and confocal scanning laser microscopy (CSLM). The voltage-time curves of AZ31 Mg alloy surface and surface appearances after the anodic treatments showed three different regions with $Na_2CO_3$ concentration : region I, below 0.2 M $Na_2CO_3$ where shiny surface with a number of small size pits; region II, between 0.4 M and 0.6 M $Na_2CO_3$ where dark surface with relatively low number of large size burned or dark spots; region III, more than 0.8 M $Na_2CO_3$ where bright surface with or without large size dark spots were obtained. The anodically treated AZ31 Mg alloy surface became significantly brightened with increasing $Na_2CO_3$ concentration from 0.5 M to 0.8 M which was attribute to the formation of denser and smoother surface films. Pits and porous protruding reaction products were found at relatively large size and small size spots, respectively, on the AZ31 Mg alloy surface in low concentration of $Na_2CO_3$ less than 0.2 M. The formation of pits is attributed to the result of repetition of the formation and detachment of porous anodic reaction products. Based on the experimental results obtained in this work, it is concluded that more uniform, denser and smoother surface of AZ31 Mg alloy could be obtained at more than 0.8 M $Na_2CO_3$ concentration if there is no other oxide forming agent.

나노결정질 다이아몬드가 코팅된 SiC 마모시험기 볼 (Nanocrystalline Diamond Coated SiC Balls in Tribometer)

  • 임종환;강찬형
    • 한국표면공학회지
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    • 제47권5호
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    • pp.263-268
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    • 2014
  • Nanocrystalline diamond(NCD) coated SiC balls were applied in a ball-on-disk tribometer. After seeding in an ultrasonic bath containing nanometer diamond powders, $2.2{\mu}m$ thick NCD films were deposited on sintered 3 mm diameter SiC balls at $600^{\circ}C$ in a 2.45 GHz microwave plasma CVD system. Bare $ZrO_2$ and SiC balls were prepared for comparison as test balls. Tribology tests were performed in air with pairs of three different balls and mirror polished steel(SKH51) disk. The wear tracks on balls and disks were examined by optical microscope and alpha step profiler. Under the load of 3 N, the friction coefficients of steel against $ZrO_2$, SiC and NCD-coated balls were between 0.4 and 0.8. After a few thousands sliding laps, the friction coefficient of NCD-coated balls dropped from 0.45 to below 0.1 and maintained thereafter. Under a higher load of 10 N or 20 N with a long sliding distance of 2 km, $ZrO_2$ and SiC balls exhibited the similar friction coefficients as above. The friction coefficient of NCD-coated balls was less than 0.1 from the beginning and increased to above 0.1 steadily or with some fluctuations as sliding distance increased. NCD coating layers were found worn out after long duration and/or high load sliding test, which resulted in the friction coefficient higher than 0.1.

전방향족 폴리에스터 열경화성 액정의 합성과 특성 (Synthesis and Characterization of Wholly Aromatic Polyester Liquid Crystalline Thermosets)

  • 문현곤;정명섭;장진해
    • 폴리머
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    • 제36권1호
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    • pp.9-15
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    • 2012
  • 용융법을 이용해서 말단에 가교 반응이 가능한 메틸 말레이미드(methyl maleimide)기를 가진 전방향족 에스터 결합의 액정(liquid crystal, LC)을 합성하였고, 합성된 LC를 이용해서 적당한 열처리 과정을 통해 열경화성 액정(liquid crystalline thermoset, LCT) 필름을 제조하였다. 합성된 LC 및 LCT 필름은 FTIR(Fourier transform infrared) 분광기, WAXD(wide angle X-ray diffraction), DSC(differential scanning calorimetry), TGA(thermogravimetric analysis), TMA(thermomechanical analysis), 그리고 가열판이 장착된 편광 현미경으로 특성 분석을 하였다. 유리전이온도($T_g$)와 열팽창 계수는 주사슬 구조의 메소겐에 의해 강한 영향을 받는 것으로 확인되었고, $para$-로 치환된 비페닐구조를 가진 LCT 필름이 가장 좋은 열적 성질을 보여 주었다.

투명전도층이 없는 염료감응형 태양전지의 Ru 상대전극 연구 (Ru employed as Counter Electrode for TCO-less Dye Sensitized Solar Cells)

  • 노윤영;유기천;유병관;한정조;고민재;송오성
    • 대한금속재료학회지
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    • 제50권2호
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    • pp.159-163
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    • 2012
  • A TCO-less ruthenium (Ru) catalytic layer on glass substrate instead of conventional Ru/TCO/ glass substrate was assessed as counter electrode (CE) material in dye sensitized solar cells (DSSCs) by examining the effect of the Ru thickness on the DSSC performance. Ru films with different thicknesses (34, 46, 69, and 90 nm) were deposited by atomic layer deposition (ALD) on glass substrates to replace both existing catalyst and electrode layer. In order to make our comparison, we also prepared an Ru catalytic layer by a similar method on FTO/glass substrate. Finally, we prepared the $0.45cm^2$ DSSC device the properties of the DSSCs were examined by cyclic voltammetry (CV), impedance spectroscopy (EIS), and current-voltage (I-V) method. CV measurements revealed an increase in catalytic activity with increasing film thickness. The charge transfer resistance at the interface between the electrolyte and Rudecreased with increasing Ru thickness. I-V results showed that the energy conversion efficiency increased up to 1.96%. Our results imply that TCO-less Ru/glass might perform as both catalyst and electrode layer when it is used in counter electrodes in DSSCs.

바이오매스 유래 이소소르비드를 이용한 폴리우레탄-우레아의 제조 및 특성 비교 (Preparation and Comparison the Physical Properties of Polyurethane-Urea Using Biomass Derived Isosorbide)

  • 박지현;박종승;최필준;고재왕;이재년;서석훈
    • 한국염색가공학회지
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    • 제31권3호
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    • pp.165-176
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    • 2019
  • Polyurethane-ureas(PUUs) were prepared from 4,4'-methylenebis(cyclohexyl isocyanate) and various diols including isosorbide. Isosorbide is starch-derived monomer that exhibit a wide range of glass transition temperature and are therefore able to be used in many applications. PUU was synthesized by a pre-polymer polymerization using a catalyst. Successful synthesis of the PUU was characterized by fourier transform-infrared spectroscopy. Thermal properties were determined by differential scanning calorimetry, thermogravimetric analysis, and dynamic mechanical analysis. It was found that by tuning isosorbide content in the resin, their glass transition temperature(Tg) slightly decreased. Physical properties were also determined by tensile strength and X-ray diffraction. There is no significant differences between petroleum-derived diol and isosorbide in XRD analysis. Moreover, their physical and optical properties were determined. The result showed that the poly(tetramethylene ether glycol)/isosorbide-based PUU exhibited enhanced tensile strength, transmittance, transparency and biodegradability compared to the existing diols. After 11 weeks composting, the biodegradability of blends increased in ISB-PUU. The morphology of the fractured surface of blend films were investigated by scanning electron microscopy.