Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2006.06a
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- Pages.190-191
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- 2006
Spectroscopic Ellipsometry of Si/graded-$Si_{1-x}Ge_x$ /Si Heterostructure Films Grown by Reduced Pressure Chemical Vapor Deposition
- Seo, J.J. (Department or Semiconductor Science and Technology, Semiconductor Physics Research Center Chonbuk National University) ;
- Choi, S.S. (Department or Semiconductor Science and Technology, Semiconductor Physics Research Center Chonbuk National University) ;
- Yang, H.D. (Department or Semiconductor Science and Technology, Semiconductor Physics Research Center Chonbuk National University) ;
- Kim, J.Y. (Department or Semiconductor Science and Technology, Semiconductor Physics Research Center Chonbuk National University) ;
- Yang, J.W. (Department or Semiconductor Science and Technology, Semiconductor Physics Research Center Chonbuk National University) ;
- Han, T.H. (R&D Center, Tachyonics) ;
- Cho, D.H. (R&D Center, Tachyonics) ;
- Shim, K.H. (Department or Semiconductor Science and Technology, Semiconductor Physics Research Center Chonbuk National University)
- Published : 2006.06.22
Abstract
We have investigated optical properties of Si/graded-