• Title/Summary/Keyword: OLED on silicon substrate

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Influence of Substrate Thermal Conductivity on OLED Lifetime

  • Chung, Seung-Jun;Lee, Jae-Hyun;Jeong, Jae-Wook;Kim, Jang-Joo;Hong, Yong-Taek
    • 한국정보디스플레이학회:학술대회논문집
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    • 2008.10a
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    • pp.1026-1029
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    • 2008
  • Temperature increase during OLED operation can significantly degrade the device lifetime. By using top-emission OLEDs fabricated on glass and silicon substrates that have different thermal conductivities, we found that efficient heat dissipation and corresponding lifetime improvement can be obtained by making a direct contact between the OLED anode and the high thermally-conductive silicon substrate. We describe substrate-dependent OLED heat dissipation behavior and OLED lifetime improvement by using infrared camera images and constant current stress test methods.

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Thermal Analysis on Glass Backplane of OLED Displays During Joule Induced Crystallization Process (OLED 디스플레이 제작을 위한 Joule 유도 결정화 공정에서의 유리기판에 대한 열해석)

  • Kim, Dong-Hyun;Park, Seung-Ho;Hong, Won-Eui;Chung, Jang-Kyun;Ro, Jae-Sang;Lee, Seung-Hyuk
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.33 no.10
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    • pp.797-802
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    • 2009
  • Large area crystallization of amorphous silicon thin-films on glass substrates is one of key technologies in manufacturing flat displays. Among various crystallization technologies, the Joule induced crystallization (JIC) is considered as the highly promising one in the OLED fabrication industries, since the amorphous silicon films on the glass can be crystallized within tens of microseconds, minimizing the thermally and structurally harmful influence on the glass. In the JIC process the metallic layers can be utilized to heat up the amorphous silicon thin films beyond the melting temperatures of silicon and can be fabricated as electrodes in OLED devices during the subsequent processes. This numerical study investigates the heating mechanisms during the JIC process and estimates the deformation of the glass substrate. Based on the thermal analysis, we can understand the temporal and spatial temperature fields of the backplane and its warping phenomena.

A High Voltage NMOSFET Fabricated by using a Standard CMOS Logic Process as a Pixel-driving Transistor for the OLED on the Silicon Substrate

  • Lee, Cheon-An;Jin, Sung-Hun;Kwon, Hyuck-In;Cho, Il-Whan;Kong, Ji-Hye;Lee, Chang-Ju;Lee, Myung-Won;Kyung, Jae-Woo;Lee, Jong-Duk;Park, Byung-Gook
    • Journal of Information Display
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    • v.5 no.1
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    • pp.28-33
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    • 2004
  • A high voltage NMOSFET is proposed to drive top emission organic light emitting device (OLED) used in the organic electroluminescent (EL) display on the single crystal silicon substrate. The high voltage NMOSFET can be fabricated by utilizing a simple layout technique with a standard CMOS logic process. It is clearly shown that the maximum supply voltage ($V_{DD}$) required for the pixel-driving transistor could reach 45 V through analytic and experimental methods. The high voltage NMOSFET was fabricated by using a standard 1.5 ${\mu}m$, 5 V CMOS logic process. From the measurements, we confirmed that the high voltage NMOSFET could sustain the excellent saturation characteristic up to 50 V without breakdown phenomena.

Enhancement of Light Extraction Efficiency of OLED Using Si3N4 Nano Pattern on Glass Substrate

  • Park, Sang-Jun;Jo, Jung-Yeon;Kim, Yang-Du;Yu, Sang-U;Heo, Ju-Hyeok;Seong, Yeong-Hun
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.251.1-251.1
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    • 2014
  • Oraganic Light Emitting Diodes (OLED) 소자의 광추출 효율을 향상시키기 위한 방안으로 나노급 사이즈의 고 굴절률 패턴을 기판의 내부 패턴에 적용하였다. 100 nm 및 300 nm의 직경을 갖는 Si3N4 나노 패턴을 나노 임프린트 리소그래피와 건식 식각 공정을 통하여 OLED의 유리기판에 형성을 하였다. 그리고 Silicon On Glass (SOG) 물질을 패턴이 전사된 기판에 스핀 코팅으로 평탄화 공정을 진행 함으로써 OLED소자의 전기적인 특성이 떨어지는 문제점을 개선하였다. 그러고 나서 Si3N4 나노 패턴이 형성되고 평탄화 공정을 마친 기판상 OLED 소자를 제작하였다. OLED의 발광층에서 발생한 빛은 Si3N4 나노패턴에 의해 산란되어 광 추출 효율을 개선할 수 있다. 본 연구에서 두 가지 종류 100nm, 300nm 높이의 Si3N4 나노패턴으로 높이에 따른 광 추출 효율을 비교하고자 OLED 소자를 제작하였다. 기판에 Si3N4 패턴이 형성된 OLED의 효율은 Si3N4 300nm에서 13.1% 증가하였다.

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Silicon Carbide Barrier Technology to Enable Flexible OLED Displays

  • Kim, Sang-Jin;Zambov, Ludmil;Weidner, Ken;Shamamian, Vasgen;Cerny, Glenn
    • 한국정보디스플레이학회:학술대회논문집
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    • 2007.08a
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    • pp.452-455
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    • 2007
  • This paper provides an overview on the characteristics of a-SiC:H barrier film deposited for flexible display applications. Key characteristics such as high crack resistance, high thermal/hydro stability, excellent adhesion to the polymer substrate, as well as very low permeance has been demonstrated. The excellence of this barrier film has been shown from competitive analysis compared with other barrier coating materials. Finally, flexible Polymer Light Emitting Diode (PLED) test pixels have been fabricated on the barrier coated plastic substrate, demonstrating the viability of the device with lifetime data.

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Poly-Silicon TFT's on Metal Foil Substrates for Flexible Displays

  • Hatalis, Miltiadis;Troccoli, M.;Chuang, T.;Jamshidi, A.;Reed, G.
    • 한국정보디스플레이학회:학술대회논문집
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    • 2005.07a
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    • pp.692-696
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    • 2005
  • In an attempt to fabricate all inclusive display systems we are presenting a study on several elements that would be used as building blocks for all-on-board integrated applications on stainless steel foils. These systems would include in the same substrate all or many of the components needed to drive a flat panel OLED display. We are reporting results on both digital and analog circuits on stainless steel foils. Shift registers running at speeds greater than 1.0MHz are shown as well as oscillators operating at over 40MHz. Pixel circuits for driving organic light emitting diodes are presented. The device technology of choice is that based on poly-silicon TFT technology as it has the potential of producing circuits with good performance and considerable cost savings over the established processes on quartz or glass substrates (amorphous Silicon a-Si:H or silicon on Insulator SOI).

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Fabrication and characteristic evaluation of microfluidics chip integrated OLED for the light sources (OLED광원이 집적화된 마이크로 플루이딕칩의 제작 및 특성 평가)

  • Kim, Young-Hwan;Han, Jin-Woo;Kim, Jong-Yeon;Kim, Byoung-Yong;Seo, Dae-Shik
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2007.06a
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    • pp.377-377
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    • 2007
  • A simplified integration process including packaging is presented, which enables the realization of the portable fluorescence detection system. A fluorescence detection microchip system consisting of an integrated PIN photodiode, an organic light emitting diode (OLED) as the light source, an interference filter, and a microchannel was developed. The on-chip fluorescence detector fabricated by poly(dimethylsiloxane) (PDMS)-based packaging had thin-film structure. A silicon-based integrated PIN photo diode combined with an optical filter removed the background noise, which was produced by an excitation source, on the same substrate. The active area of the finger-type PIN photo diode was extended to obtain a higher detection sensitivity of fluorescence. The sensitivity and the limit of detection (LOD S/N = 3) of the system were $0.198\;nA/{\mu}M$ and $10\;{\mu}M$, respectively.

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Enhanced LTPS Manufacturing Equipment employing Excimer Laser Crystallization

  • Herbst, Ludolf;Simon, Frank;Rebhan, Ulrich;Geuking, Thorsten;Klaft, Ingo;Fechner, Burkhard
    • 한국정보디스플레이학회:학술대회논문집
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    • 2005.07b
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    • pp.1123-1126
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    • 2005
  • For creation of low temperature polycrystallinesilicon (LTPS) the line beam excimer laser annealing (ELA) is a well known and established technique in mass production. With introduction of Sequential Lateral Solidification (SLS) some aspects such as crystalline quality, throughput and flexibility regarding the substrate size could be improved, but for OLED manufacturing still further process development is necessary. This paper discusses line beam ELA and SLS techniques that might enable process engineers to make polycrystalline-silicon (poly-Si) films with a high degree of uniformity and quality as required for system on glass (SOG) and active matrix organic light emitting displays (AMOLED). Equipment requirements are discussed and compared to previous standards. SEM images of process examples are shown in order to demonstrate the viability.

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Thermal Transfer Pixel Patterning by Using an Infrared Lamp Source for Organic LED Display (유기 발광 소자 디스플레이를 위한 적외선 램프 소스를 활용한 열 전사 픽셀 패터닝)

  • Bae, Hyeong Woo;Jang, Youngchan;An, Myungchan;Park, Gyeongtae;Lee, Donggu
    • Journal of Sensor Science and Technology
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    • v.29 no.1
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    • pp.27-32
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    • 2020
  • This study proposes a pixel-patterning method for organic light-emitting diodes (OLEDs) based on thermal transfer. An infrared lamp was introduced as a heat source, and glass type donor element, which absorbs infrared and generates heat and then transfers the organic layer to the substrate, was designed to selectively sublimate the organic material. A 200 nm-thick layer of molybdenum (Mo) was used as the lightto-heat conversion (LTHC) layer, and a 300 nm-thick layer of patterned silicon dioxide (SiO2), featuring a low heat-transfer coefficient, was formed on top of the LTHC layer to selectively block heat transfer. To prevent the thermal oxidation and diffusion of the LTHC material, a 100 nm-thick layer of silicon nitride (SiNx) was coated on the material. The fabricated donor glass exhibited appropriate temperature-increment property until 249 ℃, which is enough to evaporate the organic materials. The alpha-step thickness profiler and X-ray reflection (XRR) analysis revealed that the thickness of the transferred film decreased with increase in film density. In the patterning test, we achieved a 100 ㎛-long line and dot pattern with a high transfer accuracy and a mean deviation of ± 4.49 ㎛. By using the thermal-transfer process, we also fabricated a red phosphorescent device to confirm that the emissive layer was transferred well without the separation of the host and the dopant owing to a difference in their evaporation temperatures. Consequently, its efficiency suffered a minor decline owing to the oxidation of the material caused by the poor vacuum pressure of the process chamber; however, it exhibited an identical color property.

2.2 inch qqVGA AMOLED drived by ultra low temperature poly silicon (ULTPS) TFT direct fabricated below $200^{\circ}C$

  • Kwon, Jang-Yeon;Jung, Ji-Sim;Park, Kyung-Bae;Kim, Jong-Man;Lim, Hyuck;Lee, Sang-Yoon;Kim, Jong-Min;Noguchi, Takashi;Hur, Ji-Ho;Jang, Jin
    • 한국정보디스플레이학회:학술대회논문집
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    • 2006.08a
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    • pp.309-313
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    • 2006
  • We demonstrated 2.2inch qqVGA AMOLED display drived by ultra low temperature poly-Si (ULTPS) TFT not transferred but direct fabricated below $200^{\circ}C$. Si channel was crystallized by decreasing impurity concentration even at room temperature. Gate insulator with a breakdown field exceeding 8 MV/cm was realized by Inductively coupled plasma - CVD. In order to reduce stress of plastic, organic film was coated as inter-dielectric and passivation layers. Finally, ULTPS TFT of which mobility is over $20cm^2/Vsec$ was fabricated on transparent plastic substrate and drived OLED display successfully.

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