• Journal of the Korean Vacuum Society
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• v.22 no.5
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• pp.245-249
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• 2013

The $HfO_X$ thin film was deposited what it has been paid attention to the next generation oxide thin layer of MOSFET (metal-Oxide semiconductor field-effect-transistor) by rf magnetron sputter on Si (100) substrate. The $HfO_X$ thin film was deposited using a various oxygen gas flows (5, 10, 15 sccm). After deposition, $HfO_X$ thin films were annealed from 400 to $800^{\circ}C$ for 20 min in nitrogen ambient. The electrical characteristics of the $HfO_X$ thin film was improved by leakage current properties, depending on the increase of oxygen gas flow and annealing temperature. In particular, the properties of nano-mechanics of $HfO_X$ thin films were measured by AFM and Nano-indenter. From the results, the maximum indentation depth at the basis of maximum indentation force was increased from 24.9 to 38.8 nm according to increase the annealing temperature. Especially, the indentation depth was increased rapidly at $800^{\circ}C$. The rapid increasement of indentation depth was expected to be due to the change of residual stress in the $HfO_X$ thin film, and this result was caused by relative flux of oxygen outgasing during the annealing process.

• Korean Journal of Materials Research
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• v.20 no.11
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• pp.586-591
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• 2010

Solar cells have been more intensely studied as part of the effort to find alternatives to fossil fuels as power sources. The progression of the first two generations of solar cells has seen a sacrifice of higher efficiency for more economic use of materials. The use of a single junction makes both these types of cells lose power in two major ways: by the non-absorption of incident light of energy below the band gap; and by the dissipation by heat loss of light energy in excess of the band gap. Therefore, multi junction solar cells have been proposed as a solution to this problem. However, the $1^{st}$ and $2^{nd}$ generation solar cells have efficiency limits because a photon makes just one electron-hole pair. Fabrication of all-silicon tandem cells using an Si quantum dot superlattice structure (QD SLS) is one possible suggestion. In this study, an $SiO_x$ matrix system was investigated and analyzed for potential use as an all-silicon multi-junction solar cell. Si quantum dots with a super lattice structure (Si QD SLS) were prepared by alternating deposition of Si rich oxide (SRO; $SiO_x$ (x = 0.8, 1.12)) and $SiO_2$ layers using RF magnetron co-sputtering and subsequent annealing at temperatures between 800 and $1,100^{\circ}C$ under nitrogen ambient. Annealing temperatures and times affected the formation of Si QDs in the SRO film. Fourier transform infrared spectroscopy (FTIR) spectra and x-ray photoelectron spectroscopy (XPS) revealed that nanocrystalline Si QDs started to precipitate after annealing at $1,100^{\circ}C$ for one hour. Transmission electron microscopy (TEM) images clearly showed SRO/$SiO_2$ SLS and Si QDs formation in each 4, 6, and 8 nm SRO layer after annealing at $1,100^{\circ}C$ for two hours. The systematic investigation of precipitation behavior of Si QDs in $SiO_2$ matrices is presented.

• Journal of the Korean Society of Marine Environment & Safety
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• v.15 no.1
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• pp.71-78
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• 2009

Korea Marine Environment Management Corporation (KOEM) has waste oil facilities in 13 ports to collect and treat waste oil, bilge, etc. from ships based upon the Marine Environment Management Act of Korea and MARPOL 73/78 convention. Those facilities were designed and have been operated simply to discharge water under the level 15 ppm of oil contents. However, bad smells occurred from rotten organic matters in waste water and direct discharge of harmful substances to receiving water caused civil appeals. Therefore, KOEM tried to develop new process for treatment of oily waste water from ships, which could mitigate harmful substances, save cost, calm down civil appeals and contribute to marine environment preservation. This process consists of 3 steps to remove oil contents via gravity variation at first, $O_3$ input to contact water and organism deposition by inputting condensate deposits. Then finally upper water will be discharged, and the deposited substances in the bottom will be compressed through spinning machine to transfer to the designated contractors for treatment of wastes. This is very effective and innovative in that it could reduce 3 or 4 steps compared with existing process and mitigate not only waste oil concentration but also hard resolving materials such as colloid, ABS, phosphorus, nitrogen and bad smells. This method is expected to minimize bad smells and harmful gases, to save more than 10% of maintenance cost, and to arrange the good base for garbage treatment business dealing with waste water and bad smell.

• Journal of the Korean Vacuum Society
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• v.9 no.2
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• pp.155-161
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• 2000

BN films composed of c-BN(70%) and h-BN(30%) phases have been synthesized by the ion beam assisted deposition (IBAD) process and stabilized by post-annealing. Boron was e-beam evaporated at 1.2 $\AA$/sec and nitrogen was ionized and accelerated at about 100 eV by the end-hall type ion gun. Substrates were negatively biased by DC 400 and 500 V, respectively, and heated at $700^{\circ}C$. Synthesized BN films were in-situ post-annealed at 700 or $800^{\circ}C$, respectively, for 1 hr without breaking vacuum. BN films without post-annealing were peeled off from substrates immediately when they were exposed to the air while those with post-annealing at $800^{\circ}C$ were stabilized. Post annealing reduced the film stress from 4.9 GPa to 3.4 GPa, but no considerable stress release in the c-BN phase was observed, contrary to previous reports that the stress relaxation in the c-BN phase is the main mechanism for the stabilization. Structural and chemical relaxation of non c-BN phase is supposed to be responsible for the film stress reduction and, in turn, stabilization, especially when the c-Bn content of the film is not high.

• Journal of Sensor Science and Technology
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• v.29 no.1
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• pp.14-18
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• 2020

This study investigates the nitrogen dioxide (NO₂) sensing characteristics of an Si MOSFET gas sensor with a tungsten trioxide (WO₃) sensing layer deposited using the sputtering method. The Si MOSFET gas sensor consists of a horizontal floating gate (FG) interdigitated with a control gate (CG). The WO₃ sensing layer is deposited on the interdigitated CG-FG of a field effect transistor(FET)-type gas sensor platform. The sensing layer is deposited with different thicknesses of the film ranging from 100 nm to 1 ㎛ by changing the deposition times during the sputtering process. The sensing characteristics of the fabricated gas sensor are measured at different NO₂ concentrations and operating temperatures. The response of the gas sensor increases as the NO₂ concentration and operating temperature increase. However, the gas sensor has an optimal performance at 180℃ considering both response and recovery speed. The response of the gas sensor increases significantly from 24% to 138% as the thickness of the sensing layer increases from 100 nm to 1 ㎛. The sputtered WO₃ film consists of a dense part and a porous part. As reported in previous work, the area of the porous part of the film increases as the thickness of the film increases. This increased porous part promotes the reaction of the sensing layer with the NO₂ gas. Consequently, the response of the gas sensor increases as the thickness of the sputtered WO₃ film increases.

• Journal of the Korean Society of Marine Environment & Safety
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• v.19 no.5
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• pp.518-524
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• 2013

In this study, we conducted a study on characteristics of exhaust gas emissions from boiler when water-bunker oil mixed by homogenizer was burned in boiler. The results showed that NOx concentration and CO concentration of the homogenized bunker oil was decreased by 19% and 54% compared to pure bunker oil pretreatment was not being performed. And, in the case of water-bunker A oil, the NOx concentration was decreased with increasing water mixing ratio in bunker A oil. In particular, the NOx concentration in exhaust gas of 20 %water-80 %bunker A oil decrease by 45 % compared with pure bunker-A. However, the CO concentration in exhaust gas of 20 %water-80 %bunker A oil shows irregular changes. This means that the mixing of water more than a certain amount can cause a decrease in combustion performance. From this result, it can be found that critical mixing ratio of water in bunker A oil for normal combustion is 15% in this study. Deposition amount of soot that is collected in the vicinity of the chimney was decreased with increasing water mixing ratio.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.11a
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• pp.429-429
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• 2007

For various applications of liquid crystal displays (LCDs), the uniform alignment of liquid crystal (LC) molecules on treated surfaces is significantly important. Generally, a rubbing method has been widely used to align the LC molecules on polyimide (PI) surfaces. Rubbed PI surfaces have suitable characteristics, such as uniform alignment. However, the rubbing method has some drawbacks, such as the generation of electrostatic charges and the creation of contaminating particles. Thus, we strongly recommend a non contact alignment technique for future generations of large high-resolution LCDs. Most recently, the LC aligning capabilities achieved by ultraviolet and ion-beam exposures which are non contact methods, on diamond-like carbon (DLC) inorganic thin film layers have been successfully studied because DLC thin films have a high mechanical hardness, a high electrical resistivity, optical transparency, and chemical inertness. In addition, nitrogen-doped DLC (NDLC) thin films exhibit properties similar to those of the DLC thin films and a higher thermal stability than the DLC thin films because C:N bonding in the NDLC thin filmsis stronger against thermal stress than C:H bonding in the DLC thin films. Our research group has already studied the NDLC thin films by an ion-beam alignment method. The $SiN_x$ thin films deposited by plasma-enhanced chemical vapor deposition are widely used as an insulation layer for a thin film transistor, which has characteristics similar to those of DLC inorganic thin films. Therefore, in this paper, we report on LC alignment effects and pretilt angle generation on a $SiN_x$, thin film treated by ion-beam irradiation for various N ratios

• Korean Journal of Environmental Agriculture
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• v.14 no.1
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• pp.15-22
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• 1995

This study was carried out to investigate the deposition aspect of acid precipitation in rural area of Chonbuk province by analysis of the chemical components in the precipitation at National Honam Agricultural Experiment Station, RDA in the suburbs of Iri from Jan. to Dec. in 1992. The results are summarized as follows: 1. The frequency of acid precipitation was 82.5% in 1992 and the month of the lowest frequency of 17% was June. 2. The pH range of the most precipitation amount was pH $4.5{\sim}5.0$ of 54.0% and the amount and ratio of the precipitation below pH 4.0 were 9.6 mm and 1.1%, respectively. 3. The seasonal acidity of precipitation was Summer(4.78)>Fall(4.59)>Spring(4.52)>Winter(4.16). 4. The components showed significant correlation with pH value were $SO_4^{2-}$ and $NO_3$ and the equivalence ratio between two components was 2.85 : 1. 5. The order of the major ion concentration in the precipitation was $SO_4^{2-}$>$NH_4^+$>$Cl^-$>$Ca^{2+}$>$NO_3^-$>$Na^+$>$H^+$>$K^+$>$Mg^{2+}$ and the equivalence ratio of total anion to cation was 1.20. 6. Deposition amount of nitrogen ($NO_3-N$ + $NH_4-N$) and potassium ($K_2O$) were 1.19 and 0.53 kg/l0a/year, respectively.

• Clean Technology
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• v.30 no.2
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• pp.123-133
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• 2024

Zeolite template carbon (ZTC) was synthesized as an adsorbent to remove low-concentration CH₄ from the atmosphere. The synthesis of ZTC was performed using CH₄ and C₂H₂ as carbon precursors and their impact on adsorption was investigated. ZTC was also synthesized using Y zeolite ion-exchanged with CaCl₂ and LiCl as templates to investigate the effect of using metals in ion exchange. The comparison of the carbon precursors revealed that C₂H₂ had a higher carbon yield than CH₄. The synthesized ZTC exhibited developed micropores due to carbon deposition deep inside the micropores of the zeolite template. The kinetic diameter of C₂H₂ (0.33 nm) is smaller than that of CH₄ (0.38 nm), which allowed for its deposition. The study compared metal precursors used for ion exchange and confirmed that the CaCl₂-based ZTC developed more micropores compared to the LiCl-based ZTC. The ion-exchanged Ca inhibited pore blocking by the carbon precursor, allowing it to enter the pores. The ability of synthesized ZTC to adsorb N₂ and CH₄ at 298 K was investigated. The results showed that CH₄ had a higher overall adsorption amount than N₂. The sample synthesized using C₂H₂ and CaY exhibited the highest N₂ and CH₄ adsorption capacity. However, the sample synthesized with CH₄ had the highest CH₄/N₂ gas uptake ratio, which is a crucial factor in designing an adsorption process. The observed difference was likely caused by the underdevelopment of ultrafine pores that are associated with N₂ adsorption. This resulted in a reduction of N₂ adsorption, leading to an increase in CH₄/N₂ separation.

• Journal of Korean Society of Forest Science
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• v.109 no.2
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• pp.157-168
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• 2020

The sensitivity of forest soil to acidification in the Republic of Korea (ROK) was evaluated based on pH_H2O, cation exchange capacity (CEC), and base saturation (BS). Sensitivity to acidification was categorized into three grades: adequate level (AL, pH ≧ 4.2, CEC ≧ 15cmol/kg, BS ≧ 15%), caution level (CL, at least one indicator is below AL), and severe Level (SL, all three indicators are below AL). Soil samples were collected from the 65 stationary monitoring plots (40 × 40 ㎢), distributed throughout ROK. Only 19% of soil samples were classified as AL, while 66% and 15% were CL and SL, respectively. The median of pH_H2O, CEC, BS, and Ca/Al indicator in AL soils was pH 4.64, 20.7cmol/kg, 29%, and 6.3, respectively. Moreover, BC_ex (K⁺, Mg²⁺, Ca²⁺) and available phosphorus (AP) concentration compared with a threshold value and molar ratio of BC_ex and AP to total nitrogen (TN) was high. This indicates that AL soils have a good nutrient condition. The molar Ca/Al ratio, an indicator for toxicity of exchangeable aluminum (Al_ex), was more than 1, indicating no negative impact of Al_ex on plant growth. On the contrary, the median of pH_H2O, CEC, and BS in SL soils was pH 4.02, 13.2cmol/kg, and 10%, respectively. The Ca/Al index was less than 0.6, which indicates that negative impacts of Al_ex on plants were high. Furthermore, both the concentration of BC_ex in SL soils and the BC_ex/TN ratio were the lowest among the three acidity degrees. This shows that SLsoils can be degraded by soil acidification compared with less acidic soils.