NO2 Sensing Characteristics of Si MOSFET Gas Sensor Based on Thickness of WO3 Sensing Layer |
Jeong, Yujeong
(Department of Electrical Engineering, and Inter-University Semiconductor Research Center, Seoul National University)
Hong, Seongbin (Department of Electrical Engineering, and Inter-University Semiconductor Research Center, Seoul National University) Jung, Gyuweon (Department of Electrical Engineering, and Inter-University Semiconductor Research Center, Seoul National University) Jang, Dongkyu (Department of Electrical Engineering, and Inter-University Semiconductor Research Center, Seoul National University) Shin, Wonjun (Department of Electrical Engineering, and Inter-University Semiconductor Research Center, Seoul National University) Park, Jinwoo (Department of Electrical Engineering, and Inter-University Semiconductor Research Center, Seoul National University) Han, Seung-Ik (Department of Energy Systems Research, Ajou University) Seo, Hyungtak (Department of Energy Systems Research, Ajou University) Lee, Jong-Ho (Department of Electrical Engineering, and Inter-University Semiconductor Research Center, Seoul National University) |
1 | O. S. Wolfbeis, "Fiber-optic chemical sensors and biosensors", Anal. Chem., Vol. 76, No. 12, pp. 3269-3284, 2004. DOI |
2 | J. Hodgkinson, and R. P. Tatam, "Optical gas sensing: a review", Meas. Sci. Technol., Vol. 24, No. 1, pp. 012004(1)-012004(59), 2012. DOI |
3 | Z. Yunusa, M. N. Hamidon, A. Kaiser, and Z. Awang, "Gas sensors: A review", Sens. Transducers, Vol. 168, No.4, pp. 61-75, 2014. |
4 | A. W. Hodgson, P. Jacquinot, L. R. Jordan, and P. C. Hauser, "Amperometric gas sensors of high sensitivity", Electroanalysis, Vol. 11, No.10-11, pp. 782-787, 1999. DOI |
5 | A. M. Azad, S. A. Akbar, S. G. Mhaisalkar, L. D. Birkefeld, and K. S. Goto, "Solid.state gas sensors: A review", J. Electrochem. Soc., Vol. 139, No. 12, pp. 3690-3704, 1992. DOI |
6 | S. R. Morrison, "Semiconductor gas sensors", Sens. Actuators, Vol. 2, pp. 329-341, 1981. DOI |
7 | S. S. Shendage, V. L. Patil, S. A. Vanalakar, S. P. Patil, N. S. Harale, J. L. Bhosale, J. H. Kim, and P. S. Patil, "Sensitive and selective gas sensor based on nanoplates", Sens. Actuators, B, Vol. 240, pp. 426-433, 2017. DOI |
8 | H. M. Fahad, H. Shiraki, M. Amani, C. Zhang, V. S. Hebbar, W. Gao, H. Ota, M. Hettick, D. Kiriya, Y. Z. Chen, Y. L. Chueh, and A. Javey, "Room temperature multiplexed gas sensing using chemical-sensitive 3.5-nm-thin silicon transistors", Sci. Adv., Vol. 3, No. 3, pp. e1602557, 2017. DOI |
9 | C. H. Kim, I. T. Cho, J. M. Shin, K. B. Choi, J. K. Lee, and J. H. Lee, "A new gas sensor based on MOSFET having a horizontal floating-gate", IEEE Electron Device Lett., Vol. 35, No. 2, pp. 265-267, 2013. DOI |
10 | Y. Hong, C. H. Kim, J. M. Shin, K. Y. Kim, J. S. Kim, C. S. Hwang, and J. H. Lee, "Highly selective ZnO gas sensor based on MOSFET having a horizontal floating-gate", Sens. Actuators, B, Vol. 232, pp. 653-659, 2016. DOI |
11 | Y. Zhao, Z. C. Feng, and Y. Liang, "Pulsed laser deposition of -base film for gas sensor application", Sens. Actuators, B, Vol. 66, No.1-3, pp. 171-173, 2000. DOI |
12 | C. J. Jin, T. Yamazaki, Y. Shirai, T. Yoshizawa, T. Kikuta, N. Nakatani, and H. Takeda, "Dependence of gas sensitivity of sputtered films on film density", Thin Solid Films, Vol. 474, No. 1-2, pp. 255-260, 2005. DOI |
13 | Y. Hong, S. Hong, D. Jang, Y. Jeong, M. Wu, G. Jung, J. H. Bae, J. S. Kim, K. S. Chang, C. B. Jeong, C. S. Hwang, B. G. Park, and J. H. Lee, "A Si FET-type Gas Sensor with Pulse-driven Localized Micro-heater for Low Power Consumption", Proc. of IEEE Int. Electron Devices Meet., pp. 12.6.1-4, San Francisco, US, 2018. |
14 | H. Xia, Y. Wang, F. Kong, S. Wang, B. Zhu, X. Guo, J. Zhang, Y. Wang, and S. Wu, "Au-doped -based sensor for detection at low operating temperature", Sens. Actuators, B, Vol. 134, No. 1, pp. 133-139, 2008. DOI |
15 | S. Hong, Y. Hong, Y. Jeong, G. Jung, W. Shin, J. Park, J. K. Lee, D. Jang, J. H. Bae, and J. H. Lee, "Improved CO gas detection of Si MOSFET gas sensor with catalytic Pt decoration and pre-bias effect", Sens. Actuators, B, Vol. 300, pp. 127040, 2019. DOI |
16 | P. C. Jong, G. C. M. Meijer, and A. H. M. Roermund, "A Dynamic-Feedback Instrumentation Amplifier", IEEE J. Solid State Circuits, Vol. 33, pp. 1999-2009, 1998. DOI |
17 | L. G. Teoh, Y. M. Hon, J. Shieh, W. H. Lai, and M. H. Hon, "Sensitivity properties of a novel gas sensor based on mesoporous thin film", Sens. Actuators, B, Vol. 96, No.1-2, pp. 219-225, 2003. DOI |
18 | M. A. Chougule, S. Sen, and V. B. Patil, "Fabrication of nanostructured ZnO thin film sensor for monitoring", Ceram. Int., Vol. 38, No. 4, pp. 2685-2692, 2012. DOI |
19 | C. Wang, L. Yin, L. Zhang, D. Xiang, and R. Gao, "Metal oxide gas sensors: sensitivity and influencing factors", Sensors, Vol. 10, No. 3, pp. 2088-2106, 2010. DOI |
20 | Y. A. Lee, S. S. Kalanur, G. Shim, J. Park, and H. Seo, "Highly sensitive gasochromic sensing by nano-columnar -Pd films with surface moisture", Sens. Actuators, B, Vol. 238, pp. 111-119, 2017. DOI |
21 | M. Hu, J. Zeng, W. Wang, H. Chen, and Y. Qin, "Porous from anodized sputtered tungsten thin films for detection", Appl. Surf. Sci., Vol. 258, No. 3, pp. 1062-1068, 2011 DOI |
22 | J. Zeng, M. Hu, W. Wang, H. Chen, and Y. Qin, "-sensing properties of porous gas sensor based on anodized sputtered tungsten thin film", Sens. Actuators, B, Vol. 161, No. 1, pp. 447-452, 2012. DOI |