• 제목/요약/키워드: Ni oxidation

검색결과 535건 처리시간 0.024초

Nano-scale CMOS를 위한 Ni-germano Silicide의 열 안정성 연구 (Study of Ni-germano Silicide Thermal Stability for Nano-scale CMOS Technology)

  • 황빈봉;오순영;윤장근;김용진;지희환;김용구;왕진석;이희덕
    • 한국전기전자재료학회논문지
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    • 제17권11호
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    • pp.1149-1155
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    • 2004
  • In this paper, novel methods for improvement of thermal stability of Ni-germano Silicide were proposed for nano CMOS applications. It was shown that there happened agglomeration and abnormal oxidation in case of Ni-germano Silicide using Ni only structure. Therefore, 4 kinds of tri-layer structure, such as, Ti/Ni/TiN, Ni/Ti/TiN, Co/Ni/TiN and Ni/Co/TiN were proposed utilizing Co and Ti interlayer to improve thermal stability of Ni-germano Silicide. Ti/Ni/TiN structure showed the best improvement of thermal stability and suppression of abnormal oxidation although all kinds of structures showed improvement of sheet resistance. That is, Ti/Ni/TiN structure showed only 11 ohm/sq. in spite of 600 $^{\circ}C$, 30 min post silicidation annealing while Ni-only structure show 42 ohm/sq. Therefore, Ti/Ni/TiN structure is highly promising for nano-scale CMOS technology.

Ni 기지 초내열합금의 고온산화 저항성에 미치는 Ti의 영향 (Effects of Ti on High Temperature Oxidation of Ni-Based Superalloys)

  • 박시준;서성문;유영수;정희원;장희진
    • Corrosion Science and Technology
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    • 제15권3호
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    • pp.129-134
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    • 2016
  • The effects of Ti on the high temperature oxidation of Ni-based superalloys were investigated by cyclic oxidation at $850^{\circ}C$ and $1000^{\circ}C$. The oxide scale formed at $850^{\circ}C$ consists of $Cr_2O_3$, $Al_2O_3$, and $NiCr_2O_4$ layers, while a continuous $Al_2O_3$ layer was formed at $1000^{\circ}C$. The oxidation rate of the alloy with higher Ti content was higher than the alloy with less Ti content at $850^{\circ}C$, possibly due to the increase in the metal vacancy concentration in the $Cr_2O_3$ layer involved by incorporation of $Ti^{4+}$. However, Ti improved the oxidation resistance of the superalloy at $1000^{\circ}C$ by reducing oxygen vacancy concentration in $Al_2O_3$ layer.

에너제틱 응용을 위한 Ni코팅된 Al분말소재 제조 및 산화거동 (Fabrication and Oxidation Behaviors of Nickel-coated Aluminum Powders for Energetic Applications)

  • 김경태;우재열;유지훈;이혜문;임태수;최윤정;김창기
    • 한국입자에어로졸학회지
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    • 제10권4호
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    • pp.177-182
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    • 2014
  • In this study, nickel-coated aluminum (Ni/Al) powders were synthesized for the utilization of energetic applications. Oxide materials present at the surface of Al powders of $45{\mu}m$ in averaged size were removed by using sodium hydroxide(NaOH) solution which is used for controlling pH. Nickel material is coated into the surface of oxide-removed Al powders by electroless-plating process. The microstructure of fabricated Ni/Al powders shows that nickel layers with a few hundreds nm were very homogeneously formed onto the surface of Al powders. The oxidation behavior of Ni/Al exihibit somewhat faster oxidation rate than that of pure Al with surface oxidation. Also, the higher exothermic reaction was observed from the Ni/Al powders. From the result of this, nickel coating is very promising method to obtain highly reactive and safe Al powders for energetic applications.

Oxidation Study on the Fabrication of Fe-36Ni Oxide Powder from Its Scrap

  • Yun, Jung Yeul;Park, Man Ho;Yang, Sangsun;Lee, Dong-Won;Wang, Jei-Pil
    • 한국분말재료학회지
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    • 제20권1호
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    • pp.48-52
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    • 2013
  • A study of oxidation kinetic of Fe-36Ni alloy has been investigated using thermogravimetric apparatus (TGA) in an attempt to define the basic mechanism over a range of temperature of 400 to $1000^{\circ}C$ and finally to fabricate its powder. The oxidation rate was increased with increasing temperature and oxidation behavior of the alloy followed a parabolic rate law at elevated temperature. Temperature dependence of the reaction rate was determined with Arrhenius-type equation and activation energy was calculated to be 106.49 kJ/mol. Based on the kinetic data and micro-structure examination, oxidation mechanism was revealed that iron ions and electrons might migrate outward along grain boundaries and oxygen anion diffused inward through a spinel structure, $(Ni,Fe)_3O_4$.

니켈기 인코넬 713합금의 800-1100℃에서의 대기중 고온산화 (High-temperature Oxidation of Ni-based Inconel 713 Alloys at 800-1100℃ in Air)

  • 이동복
    • 한국표면공학회지
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    • 제44권5호
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    • pp.196-200
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    • 2011
  • The Ni-based superalloy, Inconel 713, was oxidized at $800{\sim}1100^{\circ}C$ for 50 and 100 hours in air. It displayed excellent oxidation resistance, forming a few micrometer-thick scales. The major scale was ${\alpha}-Al_2O_3$. Other scales formed were $TiO_2$, $NiAl_2O_4$ and $Cr_2O_3$. Generally, uniform oxidation occurred over the alloy surface, resulting in the formation of ${\alpha}-Al_2O_3$ with and without $Cr_2O_3$. Other oxides such as $TiO_2$ and $NiAl_2O_4$ sometimes also formed. Locally, nodular oxidation occurred at the nodules that consisted of diverse alloying elements. The scales were adherent at $800^{\circ}C$. However, they spalled a little at $900{\sim}1100^{\circ}C$.

Ni계 다공체 금속의 고온 산화 거동 (High Temperature Oxidation Behavior of Ni based Porous Metal)

  • 최성환;윤중열;이혜문;공영민;김병기;이기안
    • 한국분말재료학회지
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    • 제18권2호
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    • pp.122-128
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    • 2011
  • This study investigated the high temperature oxidation behavior of Ni-22.4%Fe-22%Cr-6%Al (wt.%) porous metal. Two types of open porous metals with different pore sizes of 30 PPI and 40 PPI (pore per inch) were used. A 24-hour TGA test was conducted at three different temperatures of $900^{\circ}C$, $1000^{\circ}C$ and $1100^{\circ}C$. The results of the BET analysis revealed that the specific surface area increased as the pore size decreased from 30 PPI to 40 PPI. The oxidation resistance of porous metal decreased with decreasing pore size. As the temperature increased, the oxidation weight gain of the porous metal also increased. Porous metals mainly created oxides such as $Al_2O_3$, $Cr_2O_3$, $NiAl_2O_4$, and $NiCr_2O_4$. In the 40 PPI porous metal with small pore size and larger specific surface area, the depletion of stabilizing elements such as Al and Cr occurred more quickly during oxidation compared to the 30 PPI porous metal. Ni-Fe-Cr-Al porous metal's high-temperature oxidation micro-mechanism was also discussed.

가습된 질소 분위기에서의 Kovar(Fe-29Ni-17Co)산화 (The Oxidation of Kovar(Fe-29Ni-17Co) in Humidified nitrogen)

  • 김병수;김민호;김상우;최덕균;손용배
    • 한국세라믹학회지
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    • 제36권11호
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    • pp.1228-1234
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    • 1999
  • In order to form a uniform oxidation layer and spinel crystalline phase that was supposed to help strong bonding in Kovar(Fe-29Ni-17Co)to-glass sealing the humidified nitrogen (2.3%H2O/N2) was used as an oxidation atmosphere. Kovar oxidation was diffusion-contolled and the activation energy was 2.51 kcal/mol at 600-900$^{\circ}C$ After oxidation at 600$^{\circ}C$ the oxidation layer was under 1$\mu\textrm{m}$ thickness and crystalline phase was spinel which was found to be suitable for the Kovar-to-glass sealing.

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Heterogeneous Catalysts Fabricated by Atomic Layer Deposition

  • Kim, Young Dok
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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    • pp.128-128
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    • 2013
  • Fabrication of heterogeneous catalysts using Atomic Layer Deposition (ALD) has recently been attracting attention of surface chemists and physicists. In this talk, I will present recent results about structures and chemical activities of various catalysts prepared by ALD, particularly focusing on Ni-based catalysts. Ni has been considered as potential catalysts for $CO_2$ reforming of methane (CRM); however, Ni often undergoes rapid decrease in catalytic activity with time, and therefore, application of Ni as catalysts for CRM has been regarded as difficult so far. Deactivation of Ni catalysts during CRM reaction is from either coke formation on Ni surface or sintering of Ni particles during reaction. Two different strategies have been used for enhancing stability of Ni-based catalysts; $TiO_2$ nanoparticles were deposited on micrometer-size Ni particles by ALD, which turned out to reduce coke formation on Ni surfaces. Ni nanoparticles deposited by ALD on mesoporous silica showed high activity and long-term stability from CRM without coke deposition and sintering during CRM reaction. Ni-based catalysts have been also used for oxidation of toluene, which is one of the most notorious gases responsible for sick-building syndrome. It was shown that onset-temperature of Ni catalysts for toluene oxidation is as low as $120^{\circ}C$. At $250\circ}C$, total oxidation of toluene to $CO_2$ with a 100% conversion was found.

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코팅에 의한 고온재료의 내산화성 향상을 위한 연구 (A strudyon the improvement of the oxidation resistance for high temperature materials by coating process)

  • 강석철;민경안;안연상;김길무
    • 한국표면공학회지
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    • 제30권2호
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    • pp.93-103
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    • 1997
  • High temperature materials used in the elevated temperature and corrosive atmosphere must have the good oxidation resistance and preserve their own mechanical properties simultaneously. For the oxidation resistance, it is very important to form a protective oxide scale such as $Al_2O_3$ or $Cr_2O_3$ on the substrate. However, the additions of protective oxide forming elements such as Cr and Al in the alloy to enhance its oxidation resistance are limited due to the deleterious effects on their mechanical properties. PECVD(P1asma Enhanced Chemical Vapor Deposition) coating processes were employed to improve the oxidation resistance at high temperature. Cr and/or A1 were coated on the substrates of Ni and Inconel 600 at various temperatures of 400, 500, $600^{\circ}C$ and at different conditions of specimen surfaces. Then, coated specimens were exposed to isothermal and cyclic oxidation conditions in air at 1000 and $1100^{\circ}C$. In order to enhance the adhesion between the substrate and coated layer, heat treatments of the coated specimens were conducted in a vacuum. At isothermal oxidation experiments, Al-coated Ni specimen showed better oxidation resistance than pure Ni. At cyclic oxidation experiments at $1000^{\circ}C$. Cr and Al-coated specimen showed better oxidation resistance. Cr-coated Inconel 600 had also showed better oxidation resistance due to Cr in the substrate. By PECVD coating process, oxidation resistance could be improved, but it was not improved as expected due to the weakness of the adhesion between the substrate and the coated layer.

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High Temperature Oxidation and Sulfidation of Ni-15at.%W Coatings

  • Kim Chanwou;You Teayoul;Shapovalov Yuriy;Ko Jaehwang;Lee Dongbok;Lee Kyuhwan;Chang Doyon;Kim Dongsoo;Kwon Sikchol
    • 한국표면공학회지
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    • 제38권1호
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    • pp.1-6
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    • 2005
  • Ni-15at.% W coatings with film thicknesses of 20-40 ㎛ were electroplated on a steel substrate, and their oxidation behavior was investigated at 700 and 800℃ in air. For comparison, a pure Ni coating and a bulk Ni were also oxidized. The Ni-15at.%W coating displayed the worst oxidation resistance, due to the formation of less-protective NiO, Fe₂O₃, NiFe₂O₄ and NiWO₄. The corrosion behavior Ni-15at.%W coatings electroplated on a steel substrate was similarly investigated at 700 and 800℃ in the Ar-l%SO₂ atmosphere. For comparison, the uncoated steel substrate was also corrosion-tested in the Ar-l %SO₂ atmosphere. Severe scale spallation and the internal corrosion of the steel that occurred in the uncoated substrate were not observed in the coated specimen. However, it seemed that the Ni-15at.%W coating cannot be a potential candidate as a sulfidation-resistant coating, due to the formation of less-protective NiO, NiS, WO₃ and NiWO₄.