• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.143-144
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• 2006

In this paper, we proposed XP KMPR-1050 negative tone resist to replace SU-8 resist for multi-layer micro-structures and thick plating mold fabrication using UV-LIGA process. XP KMPR resist proposed in this paper can be easily striped using a common stripping solution such as NMP without damage of micro-structure. The conditions for the fabrication of XP KMPR micro-structure were optimized by adjustment of exposure and post-exposure bake(PEB). The $140{\mu}m$ -thick and an aspect ratio at least 10 micro-structure and multi-layer structures were successfully fabricated through the process conditions. Through-mold electroplating and PR striping of XP KMPR has been successfully demonstrated.

• Korean Journal of Optics and Photonics
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• v.13 no.3
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• pp.223-227
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• 2002

Polymeric multi-mode optical waveguides were fabricated for parallel optical interconnection. Waveguide structures were molded by a Ni mold master using a hot embossing technique. The Ni mold master was manufactured by LIGA process. Multimode optical waveguides with a 48$\times$47 ${\mu}{\textrm}{m}$$^2$cross-section were produced by a simple two-step process. The propagation losses of the multimode waveguide measured at 0.85 ${\mu}{\textrm}{m}$ and 1.3 ${\mu}{\textrm}{m}$ wavelengths were 0.38 dB/cm and 0.66 dB/cm, respectively.

• Korean Journal of Materials Research
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• v.31 no.11
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• pp.601-607
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• 2021

Laser cladding a surface treatment process that grants superior characteristics such as toughness, hardness, and corrosion resistance to the surface, and rebuilds cracked molds; as such, it can be a strong tool to prolong service life of mold steel. Furthermore, compared with the other similar coating processes - thermal spray, etc., laser cladding provides superior bonding strength and precision coating on a local area. In this study, surface characteristics are studied after laser cladding of low carbon steel using 18%Cr-2.5%Ni-Fe powder (Rockit404), known for its high hardness and excellent corrosion resistance. A diode laser with wavelength of 900-1070 nm is adopted as laser source under argon atmosphere; electrical power for the laser cladding process is 5, 6, and 10 kW. Fundamental surface characteristics such as crossectional microstructure and hardness profile are observed and measured, and special evaluation, such as a soldering test with molten ALDC12 alloy, is conducted to investigate the corrosion resistance characteristics. As a result of the die-soldering test by immersion of low carbon alloy steel in ALDC12 molten metal, the clad layer's soldering thickness decreases.

• Progress in Superconductivity and Cryogenics
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• v.4 no.2
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• pp.16-20
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• 2002

Bi-axially textured Ni tapes for YBCO coated conductors were Prepared by cold rolling and heat treatment of Ni Powder compacts. The Ni powder used in this study was 5 urn in particle size and 99.99 % in purity. The process of this study consists of filling of hi powder into a rubber mold, cold-isostatically Pressing and sintering of the powder compacts at 110$0^{\circ}C$ for 6h in 96 % Ar - 4 % H$_2$ atmosphere. The sintered compacts were cold rolled with a 5 % step reduction ratio into a 100 micron-thick tapes and then heat-treated at 100$0^{\circ}C$ for various time periods. The (200) texture of Ni tape was successfully developed through the recrystallization heat treatment of the cold rolled Ni tapes. At 100$0^{\circ}C$, the degree of texture of the heat-treated Ni tapes seems not to be significantly affected by the heat-treatment time. The short heat treatment of S min was sufficient to develop the complete (200) cube texture. The degree of in-Plane and out-of-plane texture of the prepared Ni tapes was 8-10$^{\circ}$. The heat treated Ni tapes consisted of equiaxed grains with a size 50-70 microns. and the AFM sol-face roughness was as smooth as 3 nm.

• Journal of Powder Materials
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• v.15 no.3
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• pp.239-243
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• 2008

Ni-W(1-5 at.%) alloy rods were made by powder metallurgy process including powder mixing, compacting and subsequent sintering. Ni and W powder of appropriate compositions were mixed by a ball milling and isostatically pressed in a rubber mold into a rod. The compacted rods were sintered at $1000^{\circ}C-1150^{\circ}C$ at a reduced atmosphere for densification. The lattice parameters of Ni-W alloys were estimated by a high resolution neutron powder diffractometer. All sintered rods were found to have a face centered cubic structure without any impurity phase, but the diffraction peak locations were linearly shifted with increasing W content. The lattice parameter of a pure Ni rod was $3.5238{\AA}$ which is consistent with the value reported in JCPDS data. The lattice parameter of N-W alloy rods increased by $0.004{\AA}$ for 1 atomic % of W, which indicates the formation of a Ni-W solid solution due to the substitution of nickel atoms by tungsten atoms of larger size.

• Journal of the Korean Society for Heat Treatment
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• v.16 no.2
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• pp.90-96
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• 2003

The effect of betatizing temperature on microstructure and transformation characteristics in a Cu-AI-Ni based pseudoelastic alloy fabricated by heated mold continuous casting by using metallography, XRD and calorimetry. The microstructure of cast rod betatized at $600^{\circ}C$ revealed a ${\beta}_1$ parent phase and a ${\gamma}_2$ phase precipitated along the casting direction. When the cast rod was betatized at the elevated temperature above $600^{\circ}C$, the ${\gamma}_2$ phase is completely dissolved into the matrix so that the volume fraction of the ${\gamma}_2$ phase was decreased. The parent phase was stabilized by betatizing at $600^{\circ}C$. However, the ${\beta}_1$ parent phase was transformed to both ${{\beta}_1}^{\prime}$ and ${{\gamma}_1}^{\prime}$ martensites with increasing betatizing temperatures above $600^{\circ}C$, while $M_s$ and $A_s$ temperatures were decreased. The stress-strain curves for compression test were not same with betatizing temperature; the stress-strain curves of the specimen betatized at $600^{\circ}C$ and $700^{\circ}C$ were linear but those of the specimen betatized at $800^{\circ}C$ and $900^{\circ}C$ were not linear.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.10 no.1
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• pp.186-193
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• 2009

In this paper, we adopted E-MOLD patent technology in order to fabricate Prismless LGP(Light Guide Panel) fur cellular phone and estimate the transcription of injection-molded parts. Then, we manufactured the Ni stamper fur Prismless LGP using MEMS process. And the stamper was installed in the movable heated core which is the key part of a patented mold. Using this mold, we manufactured injection-molded plastic LGP parts with different mold temperatures so that we investigate effect of the temperature on the transcription of the parts. The CAE analysis was also conducted in order to compare with the experimental results. The transcription of LGP parts with various mold temperature displayed $100^{\circ}C$(25.0nm), $140^{\circ}C$(48.4nm), $180^{\circ}C$(52.1nm) and when compared with stamper(521Inm), transcription was superior at $180^{\circ}C$. According to the CAE results, moldability was improved as mold temperature ($50^{\circ}C{\sim}180^{\circ}C$) increased, but when filling time($1{\sim}2sec$) increases, it decreased at $160^{\circ}C$. And transcription and moldability were improved markedly at glass transition temperature($140^{\circ}C$).

• Journal of the Korean Ceramic Society
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• v.41 no.3
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• pp.229-234
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• 2004

In this study, we proposed new forming process for a porous ceramic body with unique pore structure. h tubular-type porous NiO-YSZ body with radially aligned pore channels was prepared by freeze-drying of aqueous slurry. A NiO-YSZ slurry was poured into the mold, which was designed to control the crystallization direction of the ice, followed by freezing. Thereafter the ice was sublimated at a reduced pressure. SEM observations revealed that the NiO-YSZ porous body showed aligned large pore channels parallel to the ice growth direction, and fine pores are formed around the outer surface of the tube. It was considered that the difference in the ice growth rate during the freezing process resulted in such a characteristic microstructure. Bilayer consisting of dense thin electrolyte film of YSZ onto the tubular type porous body has been successfully fabricated using a slurry-coating process followed by co-firing. It was regarded that the obtained bilayer structure is suitable for constructing electrode-support type electrochemical devices such as solid oxide fuel cells.

• Journal of the Korean Society for Precision Engineering
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• v.26 no.8
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• pp.119-125
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• 2009

Fabrication of a three-dimensional (3D) metallic mold for multi-production of a microstructure was studied to settle the problem of long processing time in 3D microfabrication. To date, complicated 3D microstructures including 3D photonic crystals, 3D microlens array, 3D filter for microfludics, and something else were created successfully using the two-photon polymerization (TPP) which was considered as paving the way to fabricate a real 3D shape in nano/microscale. However, for those fabrications, much processing time and efforts were inevitably required. To solve this issue, a simple and effective way was proposed in this paper; 3D master patterns were prepared using TPP, and then counter-shaped Ni molds were fabricated by electroforming process. By using these molds, 3D microstructures can be reproduced with short-processing time and low-effort comparing to the conventional approach, TPP We report some parameters to fabricate a metallic mold precisely.

• Proceedings of the KIEE Conference
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• 2011.07a
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• pp.1704-1705
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• 2011

MEMS(Micro Electro Mechanical Systems) 기술과 니켈 전기도금공정을 이용하여 수십 내지 수백개의 탐침을 갖는 일체형 탐침 패드(Probe Pad)를 제작하였다. PI(Polyimide) Film은 일본 UBE사의 $50{\mu}m$ 두께를 갖는 유피렉스를 사용하였다. 일체형 탐침 패드는 Polyimide Film에 Cu를 증착 후 사진식각공정을 통하여 PR Mold 형성한 후 전류가 흐르는 Cu 라인(line) 배선을 형성하기 위해 Cu를 식각하였으며 형성된 Cu Line 위에 니켈 전해도금공정을 실시하여 니켈 배선을 형성하였다. Ni 배선 위에 니켈 범프를 형성하기 위하여 PR Strip을 실시한 후 다시 PR Mold를 형성하였다. PR Mold 형성 후 다시 니켈 전해도 금을 실시하여 니켈 범프(bump)를 형성하였다. 제작된 탐침패드의 니켈배선의 폭은 $18.0{\mu}m$이고 피치(Pitch)는 $35{\mu}m$이며, 니켈 범프의 두께(Thickness)는 $10.0{\mu}m$로 제작되었다. 본 연구에서 제작된 탐침패드를 더욱 더 고집적화(Fine Pitch)하여 일체형 탐침 패드를 제작하게 되면 이를 사용하는 프로브유니트의 제작에 있어서 비용 절감 및 생산성(Throughput)을 크게 향상 시킬 수 있을 것이다.