Browse > Article

Fabrication of 3D Metallic Molds for Multi-replication of Microstructures  

Bae, Kong-Myung (School of Mechanical Engineering, Pusan Nat'l Univ.)
Ko, Jong-Soo (School of Mechanical Engineering, Pusan Nat'l Univ.)
Park, Sang-Hu (School of Mechanical Engineering, Pusan Nat'l Univ.)
Lim, Tae-Woo (Department of Mechanical Engineering, KAIST)
Yang, Dong-Yol (Department of Mechanical Engineering, KAIST)
Publication Information
Journal of the Korean Society for Precision Engineering / v.26, no.8, 2009 , pp. 119-125 More about this Journal
Abstract
Fabrication of a three-dimensional (3D) metallic mold for multi-production of a microstructure was studied to settle the problem of long processing time in 3D microfabrication. To date, complicated 3D microstructures including 3D photonic crystals, 3D microlens array, 3D filter for microfludics, and something else were created successfully using the two-photon polymerization (TPP) which was considered as paving the way to fabricate a real 3D shape in nano/microscale. However, for those fabrications, much processing time and efforts were inevitably required. To solve this issue, a simple and effective way was proposed in this paper; 3D master patterns were prepared using TPP, and then counter-shaped Ni molds were fabricated by electroforming process. By using these molds, 3D microstructures can be reproduced with short-processing time and low-effort comparing to the conventional approach, TPP We report some parameters to fabricate a metallic mold precisely.
Keywords
Two-photon Polymerization; Three-dimensional Microstructures; Metallic Mold; Mass-production;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
연도 인용수 순위
1 Pham, A. T., Lim, T. W., Park, S. H., Yang, D. Y., Lee, K. S. and Kim, D. P., "Three-dimensional SiCN Ceramic Structures Via Nano-stereolithography of Inorganic Polymer Photoresist," Adv. Func. Mater., Vol. 16, No. 9, pp. 1235-1241, 2006   DOI   ScienceOn
2 Lee, K. S., Kim, R. H., Yang, D. Y. and Park, S. H., "Advances in 3D nano/microfabrication using twophoton initiated polymeriazation," Prog. Polym. Sci., Vol. 33, pp. 631-681, 2008   DOI   ScienceOn
3 Kawata, S., Sun, H. B., Tanaka, T. and Takada, K., "Finer features for functional microdevices," Nature, Vol. 412, No. 16, pp. 697-698, 2001   DOI   ScienceOn
4 Park, S. H., Lim, T. W., Yang, D. Y. and Kong, H. J., "Directly Nano-precision Feature Patterning on Thin metal Layer using Top-down Building Approach in nRP Process," J. of KSPE, Vol. 21, No. 6, pp. 153-159, 2004   과학기술학회마을
5 Park, S. H., Lee, S. H., Yang, D. Y., Kong, H. J. and Lee, K. S., "Subregional Slicing Method to Increase 3D Nanofabrication Efficiency in Two-photon Polymerization," Applied Physics Letters, Vol. 87, Paper No. 154108, 2005   DOI   ScienceOn
6 Lim, T. W., Park, S. H., Yang, D. Y., Kong, H. J. and Lee, K. S., "Direct Single-layered Fabrication of 3D Concavo-convex Patterns in Nano-stereolithography," Appl. Phys. A, Vol. 84, pp. 379-383, 2006   DOI   ScienceOn
7 Chou, S. Y., Keimel, C. and Gu, J., "Ultrafast and direct imprint of nanostructures in silicon," Nature, Vol. 417, No. 20, pp. 835-837, 2002   DOI   ScienceOn
8 Lee, K. S., Yang, D. Y., Park, S. H. and Kim, R. H., "Recent Developments in Two-photon Polymerization for 2D and 3D Microfabrications," Polym. Advan. Technol., Vol. 17, pp. 72-82, 2006   DOI   ScienceOn
9 Serbin, J., Egbert, A., Ostendorf, A. and Chichkov, B. N., "Femtosecond laser-induced two-photon polymerization of inorganic-organic hybrid materials for applications in photonics," Optics Letters, Vol. 28, No. 5, pp. 301-303, 2003   DOI   ScienceOn
10 Yang, D. Y., Park, S. H., Lim, T. W., Kong, H. J., Yi, S. W., Yang, H. K., Lee, K. S., "The smallest reproduction of three-dimensional artistic sculpture by multi-path scanning method with considering pattern collapse," Applied Physics Letters, Vol. 90, Paper No. 079903, 2007   DOI
11 Sun, H. B., Takada, T. and Kawata, S., "Elastic force analysis of functional polymer submicron oscillators," Applied Physics Letters, Vol. 79 No. 19, pp. 3173-3175, 2001   DOI   ScienceOn
12 Kim, J. H., Jeong, S. J., Lee, H. J., Han, S. W., Choi, B. I., Park, S. H. and Yang, D. Y., "A linear analysis of the viscoelastic response of polymer micro-pillars measured using the open-loop flat punch indentation test," Philoso. Magazine, Vol. 86, No. 33-35, pp. 5679-5690, 2006   DOI   ScienceOn
13 Park, S. H., Jeong, J. H., Lim, T. W., Yang, D. Y., Kim, K. D., Lee, K. S. and Kong, H. J., "Effective Fabrication of Three - dimensional Nano/microstructures in a Single Step," Applied Physics Letters, Vol. 88, Paper No. 203105, 2006   DOI   ScienceOn
14 Xia, Y. and Whitesides, G. M., "Soft lithography," Angew. Chem. Int. Ed., Vol. 37, pp. 550-575, 1998   DOI   ScienceOn