• 제목/요약/키워드: Nanometrology

검색결과 24건 처리시간 0.027초

미터 소급성을 갖는 원자간력 현미경을 이용한 1차원 격자 피치 측정과 불확도 평가 (Pitch Measurement of One-dimensional Gratings Using a Metrological Atomic Force Microscope and Uncertainty Evaluation)

  • 김종안;김재완;박병천;엄태봉;강주식
    • 한국정밀공학회지
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    • 제22권4호
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    • pp.84-91
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    • 2005
  • We measured the pitch of one-dimensional (ID) grating specimens using a metrological atomic force microscope (M-AFM). The ID grating specimens a.e often used as a magnification standard in nano-metrology, such as scanning probe microscopy (SPM) and scanning electron microscopy (SEM). Thus, we need to certify the pitch of grating specimens fur the meter-traceability in nano-metrology. To this end, an M-AFM was setup at KRISS. The M-AFM consists of a commercial AFM head module, a two-axis flexure hinge type nanoscanner with built-in capacitive sensors, and a two-axis heterodyne interferometer to establish the meter-traceability directly. Two kinds of ID grating specimens, each with the nominal pitch of 288 nm and 700 nm, were measured. The uncertainty in pitch measurement was evaluated according to Guide to the Expression of Uncertainty in Measurement. The pitch was calculated from 9 line scan profiles obtained at different positions with 100 ㎛ scan range. The expanded uncertainties (k = 2) in pitch measurement were 0.10 nm and 0.30 nm for the specimens with the nominal pitch of 288 nm and 700 nm. The measured pitch values were compared with those obtained using an optical diffractometer, and agreed within the range of the expanded uncertainty of pitch measurement. We also discussed the effect of averaging in the measurement of mean pitch using M-AFM and main components of uncertainty.

Multimodal Nonlinear Optical Microscopy for Simultaneous 3-D Label-Free and Immunofluorescence Imaging of Biological Samples

  • Park, Joo Hyun;Lee, Eun-Soo;Lee, Jae Yong;Lee, Eun Seong;Lee, Tae Geol;Kim, Se-Hwa;Lee, Sang-Won
    • Journal of the Optical Society of Korea
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    • 제18권5호
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    • pp.551-557
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    • 2014
  • In this study, we demonstrated multimodal nonlinear optical (NLO) microscopy integrated simultaneously with two-photon excitation fluorescence (TPEF), second-harmonic generation (SHG), and coherent anti-Stokes Raman scattering (CARS) in order to obtain targeted cellular and label-free images in an immunofluorescence assay of the atherosclerotic aorta from apolipoprotein E-deficient mice. The multimodal NLO microscope used two laser systems: picosecond (ps) and femtosecond (fs) pulsed lasers. A pair of ps-pulsed lights served for CARS (817 nm and 1064 nm) and SHG (817 nm) images; light from the fs-pulsed laser with the center wavelength of 720 nm was incident into the sample to obtain autofluorescence and targeted molecular TPEF images for high efficiency of fluorescence intensity without cross-talk. For multicolor-targeted TPEF imaging, we stained smooth-muscle cells and macrophages with fluorescent dyes (Alexa Fluor 350 and Alexa Fluor 594) for an immunofluorescence assay. Each depth-sectioned image consisted of $512{\times}512$ pixels with a field of view of $250{\times}250{\mu}m^2$, a lateral resolution of $0.4{\mu}m$, and an axial resolution of $1.3{\mu}m$. We obtained composite multicolor images with conventional label-free NLO images and targeted TPEF images in atherosclerotic-plaque samples. Multicolor 3-D imaging of atherosclerotic-plaque structural and functional composition will be helpful for understanding the pathogenesis of cardiovascular disease.

나노미터 영역 길이 측정 위한 미터 소급성을 갖는 원자간력 현미경 개발 (Development of a Metrological Atomic Force Microscope for the Length Measurements of Nanometer Range)

  • 김종안;김재완;박병천;엄태봉;홍재완
    • 한국정밀공학회지
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    • 제21권11호
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    • pp.75-82
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    • 2004
  • A metrological atomic force microscope (M-AFM) was developed fur the length measurements of nanometer range, through the modification of a commercial AFM. To eliminate nonlinearity and crosstalk of the PZT tube scanner of the commercial AFM, a two-axis flexure hinge scanner employing built-in capacitive sensors is used for X-Y motion instead of PZT tube scanner. Then two-dimensional displacement of the scanner is measured using two-axis heterodyne laser interferometer to ensure the meter-traceability. Through the measurements of several specimens, we could verify the elimination of nonlinearity and crosstalk. The uncertainty of length measurements was estimated according to the Guide to the Expression of Uncertainty in Measurement. Among several sources of uncertainty, the primary one is the drift of laser interferometer output, which occurs mainly from the variation of refractive index of air and the thermal stability. The Abbe error, which is proportional to the measured length, is another primary uncertainty source coming from the parasitic motion of the scanner. The expanded uncertainty (k =2) of length measurements using the M-AFM is √(4.26)$^2$+(2.84${\times}$10$^{-4}$ ${\times}$L)$^2$(nm), where f is the measured length in nm. We also measured the pitch of one-dimensional grating and compared the results with those obtained by optical diffractometry. The relative difference between these results is less than 0.01 %.

실리콘 기판을 사용한 바이오센서와 회전 타원분광계를 이용한 펩타이드-항체 접합의 동특성 측정과 분석 (Measurement and Analysis of the Dynamics of Peptide-Antibody Interactions Using an Ellipsometric Biosensor Based on a Silicon Substrate)

  • 이근재;조현모;조재흥
    • 한국광학회지
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    • 제28권1호
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    • pp.9-15
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    • 2017
  • 실리콘 기판으로 만든 바이오센서에서 펩타이드-항체의 접합 동특성을 회전 타원분광계로 정밀하게 측정하고 분석하였다. 극도로 낮은 몰농도의 펩타이드를 측정할 때, 시료가 놓이는 바이오센서의 표면의 불완전한 편평도와 완충용액 굴절률 변화로 인한 측정오차를 줄이기 위하여 금속박막의 유리 프리즘 대신에 실리콘 기판 위에 덱스트란 SAM을 직접 적층하여 바이오센서를 만들었다. $100{\mu}l/min$의 완충용액 주입속도에서 바이오센서에 올려진 항체 및 펩타이드의 접합특성을 각각 측정하였다. 리터당 5 ng의 낮은 항체농도에서도 항체-덱스트란 SAM 사이의 동특성을 쉽게 측정할 수 있었다. 또한 100 nM까지의 펩타이드에 대한 미세한 흡착 및 해리 특성을 정밀하게 측정할 수 있었으며, 접합 동특성 식에 이 실험결과를 피팅하여 흡착계수와 해리계수를 구할 수 있었다. 이 결과로부터 펩타이드의 평형상태의 해리상수인 $K_D$는 97 nM이었고, 이 수치는 Class I에 속함을 알 수 있었다.