• Proceedings of the Korean Society Of Semiconductor Equipment Technology
• /
• 2005.09a
• /
• pp.183-187
• /
• 2005

Thin films of diblock copolymers may be suitable for semiconductor device applications since they enable patterning of ordered domains with dimensions below photolithographic resolution over wafer-scale area. We obtained nanometer-scale cylindrical structure of dibock copolymer of polystyrene-block-poly(methylmethacrylate), PS-b-PMMA, also demonstrate pattern transfer of the nanoporous polymer using both reactive ion etching. The size of fabricated naonoholes were about 10 nm. Fabricated nanopattern surface was observed by field emission scanning electron microscope (FESEM).

• Journal of the Korean Magnetic Resonance Society
• /
• v.23 no.3
• /
• pp.73-80
• /
• 2019

Nitrogen-vacancy (NV) is one of the most popular solid-state spin systems for quantum sensing. NV has been used for vector magnetometry with nanometer spatial resolution and sensors for nuclear magnetic resonance (NMR) in samples with small volume, less than 10 pL. Various studies are in progress to make NV a complementary sensor for current NMR technique. Fabricating and improving diamond itself are one of the research topics. This mini-review contains recent develops in diamond fabrication and treatment for higher NV yield. Additionally, we briefly introduce the development status of NV in NMR.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
• /
• v.37 no.5
• /
• pp.476-485
• /
• 2024

Understanding the structure-property relationship in functional materials is crucial as microstructural features such as nano-precipitates, phase boundary, grain boundary segregation, and grain boundary phases play a key role in their functional properties. Atom probe tomography (APT) is an advanced analytical technique that allows for the three-dimensional (3D) mapping of atomic distributions and the precise determination of local chemical compositions in materials. Moreover, it offers sub-nanometer spatial resolution and chemical sensitivity at the tens of parts per million (ppm) level. Owing to its unique capabilities, this technique has been employed to uncover the 3D elemental distributions in a wide range of materials, including alloys, semiconductors, nanomaterials, and even biomaterials. In this paper, various kinds of examples are introduced for elucidating structure-property relationships on functional materials by utilizing the atom probe tomography.

• Applied Microscopy
• /
• v.50
• /
• pp.14.1-14.6
• /
• 2020

Scanning electron microscopy (SEM) plays a central role in analyzing structures by imaging a large area of brain tissue at nanometer scales. A vast amount of data in the large area are required to study structural changes of cellular organelles in a specific cell, such as neurons, astrocytes, oligodendrocytes, and microglia among brain tissue, at sufficient resolution. Array tomography is a useful method for large-area imaging, and the osmium-thiocarbohydrazide-osmium (OTO) and ferrocyanide-reduced osmium methods are commonly used to enhance membrane contrast. Because many samples prepared using the conventional technique without en bloc staining are considered inadequate for array tomography, we suggested an alternative technique using post-staining conventional samples and compared the advantages.

• International Journal of Concrete Structures and Materials
• /
• v.7 no.2
• /
• pp.95-110
• /
• 2013

We report various synchrotron radiation laboratory based techniques used to characterize cement based materials in nanometer scale. High resolution X-ray transmission imaging combined with a rotational axis allows for rendering of samples in three dimensions revealing volumetric details. Scanning transmission X-ray microscope combines high spatial resolution imaging with high spectral resolution of the incident beam to reveal X-ray absorption near edge structure variations in the material nanostructure. Microdiffraction scans the surface of a sample to map its high order reflection or crystallographic variations with a micron-sized incident beam. High pressure X-ray diffraction measures compressibility of pure phase materials. Unique results of studies using the above tools are discussed-a study of pores, connectivity, and morphology of a 2,000 year old concrete using nanotomography; detection of localized and varying silicate chain depolymerization in Al-substituted tobermorite, and quantification of monosulfate distribution in tricalcium aluminate hydration using scanning transmission X-ray microscopy; detection and mapping of hydration products in high volume fly ash paste using microdiffraction; and determination of mechanical properties of various AFm phases using high pressure X-ray diffraction.

• Journal of Sensor Science and Technology
• /
• v.21 no.6
• /
• pp.440-445
• /
• 2012

Contact-type Linear Encoder-like Capacitive Displacement Sensor (CLECDiS) is a novel displacement sensor which has wide measurable range with high resolution. The sensor, however, is very sensitive to relative rotational alignment between stator and mover of the sensor as well as its displacement. In addition to, there can be some disturbances in the relative rotational alignment, so some noises occur in the sensor's output signal by the disturbances. This negative effect of the high sensitivity may become larger as increasing sensitivity. Therefore, this negative effect of the high sensitivity has to be compensated and reduced to achieve nanometer resolution of the sensor. In this study, a new type capacitive linear encoder with a mechanical guide is presented to reduce the relative rotational alignment problem. The presented method is not only to reduce the alignment problem, but also to assemble the sensor to the stage conveniently. The method is based on a new type CLECDiS that has mechanical guide autonomously. In the presented sensor, when the device is fabricated by micro-machining, the guide-rail is also fabricated on the surface of the sensor. By the direct fabrication of the guide-rail with high precision micro-machining, errors of the guide-rail can be reduced significantly. In addition, a manual yaw alignment is not required to obtain large magnitude of the output signal after the assembly of the sensor and the stage. The sensor movement is going to follow the guide-rail automatically. The prototype sensor was fabricated using the presented method, and we verify the feasibility experimentally.

• Current Optics and Photonics
• /
• v.7 no.1
• /
• pp.38-46
• /
• 2023

Optical Fourier-domain reflectometry (OFDR) sensors have been widely used to measure distances with high resolution and speed in a noncontact state. In the electroplating process of a printed circuit board, it is critically important to monitor the copper-plating thickness, as small deviations can lead to defects, such as an open or short circuit. In this paper we employ a phase-based OFDR sensor for in situ relative distance sensing of a sample with nanometer-scale resolution, during electroplating. We also develop an optical-path difference (OPD)-regulated sensing probe that can maintain a preset distance from the sample. This function can markedly facilitate practical measurements in two aspects: Optimal distance setting for high signal-to-noise ratio OFDR sensing, and protection of a fragile probe tip via vertical evasion movement. In a sample with a centimeter-scale structure, a conventional OFDR sensor will probably either bump into the sample or practically out of the detection range of the sensing probe. To address this limitation, a novel OPD-regulated OFDR system is designed by combining the OFDR sensing probe and linear piezo motors with feedback-loop control. By using multiple OFDR sensors, it is possible to effectively monitor copper-plating thickness in situ and uniformize it at various positions.

• Proceedings of the Korean Society for Technology of Plasticity Conference
• /
• 2008.10a
• /
• pp.91-94
• /
• 2008

Newly developed Atom Probe Tomography (APT) technique can provide the highest available spatial resolution, 3D tomography imaging and quantitative chemical analysis in a sub-nm scale. As a complementary technique to APT, Nano-secondary ion Mass Spectroscopy (SIMS) also provides the boron distribution in micro-scale. Therefore, the exact behavior of boron at either grain boundary or grain interior in steels can be investigated by the combination of APT and SIMS techniques from the sub-nanometer scale to the micrometer scale. The results obtained by both APT and SIMS revealed that the boron atoms were mainly segregated to the grain boundaries rather than to the grain interior in the steels containing 50ppm and 100ppm boron. It also found that carbon atoms were segregated at the boron enriched regions, which were thought to be retained austenite phase due to the chemical composition of carbon atoms.

• Journal of KSNVE
• /
• v.6 no.3
• /
• pp.363-373
• /
• 1996

In the case of a precision equipment, it requires a vibration free environment to provide its proper function. Especially, lithography and inspection devices, which have sub-nanometer class high accuracy and resolution, have come to necessity for producing more improved giga class semiconductor wafers. This high technology equipments require very strict environmental vibration standard in promotion to the accuracy of the manufacturing, inspecting devices. The vibration criteria are usually obtained either by the real vibration exciting test on the equipment or by the analytical calculation. The former is accurate but requires a great deal of time and efforts while the latter lacks reliability. This paper proposes a new method to solve this problem at a time. The permissible vibration level to a precision equipment can be easily obtained by analyzing the process of Frequency Response Function(FRF). This paper also demonstrates its effectiveness by applying the proposed method to finding the permissible vibration criteria of a Computer Hard Disk Drive.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2005.06a
• /
• pp.1074-1078
• /
• 2005

In precision positioning applications, such as scanning tunneling microscopy and diamond turning machines [1], it is often required that actuators have nanometer resolution in displacement, high stiffness, and fast frequency response. These requirements are met by the use of piezoceramic actuators. A major limitation of piezoceramic actuators, however, is their lack of accuracy due to hysteresis nonlinearity and drift. The maximum error due to hysteresis can be as much as 10-15% of the path covered if the actuators are run in an open-loop fashion. Hence, the accurate control of piezoceramic actuators requires a control strategy that incorporates some form of compensation for the hysteresis. One approach is to develop an accurate model of the hysteresis and the use the inverse as a compensator. The Preisach model has frequently been employed as a nonlinear model for representing the hysteresis, because it encompasses the basic features of the hysteresis phenomena in a conceptually simple and mathematically elegant way. In this paper, a new numerical inversion scheme of the Preisach model is developed with an aim of compensating hysteresis in piezoceramic actuators. The inversion scheme is implemented using the first-order reversal functions and is presented in a recursive form. The inverted model is then incorporated in an open-loop control strategy that regulates the piezoceramic actuator and compensates for hysteretic effects. Experimental results demonstrate satisfactory regulation of the position of the piezoceramic actuator to the desired trajectories.