Abstract
In the case of a precision equipment, it requires a vibration free environment to provide its proper function. Especially, lithography and inspection devices, which have sub-nanometer class high accuracy and resolution, have come to necessity for producing more improved giga class semiconductor wafers. This high technology equipments require very strict environmental vibration standard in promotion to the accuracy of the manufacturing, inspecting devices. The vibration criteria are usually obtained either by the real vibration exciting test on the equipment or by the analytical calculation. The former is accurate but requires a great deal of time and efforts while the latter lacks reliability. This paper proposes a new method to solve this problem at a time. The permissible vibration level to a precision equipment can be easily obtained by analyzing the process of Frequency Response Function(FRF). This paper also demonstrates its effectiveness by applying the proposed method to finding the permissible vibration criteria of a Computer Hard Disk Drive.
