• Journal of the Korean Vacuum Society
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• v.17 no.1
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• pp.51-57
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• 2008

we have demonstrated structural evolution and optical properties of Si-nanowires (NWs) synthesized on Si (111) substrates with nanoscale Au-Si islands by rapid thermal chemical vapor deposition (RTCVD). The Au-Si nano-islands (10-50nm in diameter) were employed as a liquid-droplet catalysis to grow Si-NWs via vapor-liquid-solid mechanism. The Si-NWs were grown by a mixture gas of SiH4 and H2 at a pressure of 1.0 Torr and temperatures of $500{\sim}600^{\circ}C$. Scanning electron microscopy measurements showed that the Si-NWs are uniformly sized and vertically well-aligned along <111> direction on Si (111) surfaces. The resulting NWs are ${\sim}60nm$ in average diameter and ${\sim}5um$ in average length. High resolution transmission microscopy measurements indicated that the NWs are single crystals covered with amorphous SiOx layers of ${\sim}3nm$ thickness. In addition, the optical properties of the NWs were investigated by micro-Raman spectroscopy. The downshift and asymmetric broadening of the Si main optical phonon peak were observed in Raman spectra of Si-NWs, which indicates a minute stress effects on Raman spectra due to a slight lattice distortion led by lattice expansion of Si-NW structures.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.288-289
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• 2011

Indium Tin Oxide (ITO) is a typical highly Transparent Conductive Oxide (TCO) currently used as a transparent electrode material. Most widely used deposition method is the sputtering process for ITO film deposition because it has a high deposition rate, allows accurate control of the film thickness and easy deposition process and high electrical/optical properties. However, to apply high quality ITO thin film in a flexible microelectronic device using a plastic substrate, conventional DC magnetron sputtering (DMS) processed ITO thin film is not suitable because it needs a high temperature thermal annealing process to obtain high optical transmittance and low resistivity, while the generally plastic substrates has low glass transition temperatures. In the room temperature sputtering process, the electrical property degradation of ITO thin film is caused by negative oxygen ions effect. This high energy negative oxygen ions(about over 100eV) can be critical physical bombardment damages against the formation of the ITO thin film, and this damage does not recover in the room temperature process that does not offer thermal annealing. Hence new ITO deposition process that can provide the high electrical/optical properties of the ITO film at room temperature is needed. To solve these limitations we develop the Magnetic Field Shielded Sputtering (MFSS) system. The MFSS is based on DMS and it has the plasma limiter, which compose the permanent magnet array (Fig.1). During the ITO thin film deposition in the MFSS process, the electrons in the plasma are trapped by the magnetic field at the plasma limiters. The plasma limiter, which has a negative potential in the MFSS process, prevents to the damage by negative oxygen ions bombardment, and increases the heat(-) up effect by the Ar ions in the bulk plasma. Fig. 2. shows the electrical properties of the MFSS ITO thin film and DMS ITO thin film at room temperature. With the increase of the sputtering pressure, the resistivity of DMS ITO increases. On the other hand, the resistivity of the MFSS ITO slightly increases and becomes lower than that of the DMS ITO at all sputtering pressures. The lowest resistivity of the DMS ITO is $1.0{\times}10-3{\Omega}{\cdot}cm$ and that of the MFSS ITO is $4.5{\times}10-4{\Omega}{\cdot}cm$. This resistivity difference is caused by the carrier mobility. The carrier mobility of the MFSS ITO is 40 $cm^2/V{\cdot}s$, which is significantly higher than that of the DMS ITO (10 $cm^2/V{\cdot}s$). The low resistivity and high carrier mobility of the MFSS ITO are due to the magnetic field shielded effect. In addition, although not shown in this paper, the roughness of the MFSS ITO thin film is lower than that of the DMS ITO thin film, and TEM, XRD and XPS analysis of the MFSS ITO show the nano-crystalline structure. As a result, the MFSS process can effectively prevent to the high energy negative oxygen ions bombardment and supply activation energies by accelerating Ar ions in the plasma; therefore, high quality ITO can be deposited at room temperature.

• Journal of the Microelectronics and Packaging Society
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• v.13 no.4
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• pp.27-36
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• 2006

We fabricated thermally evaporated 10 nm-Ni/(poly)Si, 10 nm-Ni/l nm-Ir/(poly)Si and 10 nm-Ni/l nm-Pt/(poly)Si films to investigate the thermal stability of nickel monosilicides at the elevated temperatures by rapid annealing them at the temperatures of $300{\sim}1200^{\circ}C$ for 40 seconds. Silicides of 50 nm-thick were formed on top of both the single crystal silicon actives and the polycrystalline silicon gates. A four-point tester was used to examine sheet resistance. A scanning electron microscope and field ion beam were employed for thickness and microstructure evolution characterization. An X-ray diffractometer and an Auger depth profiler were used for phase and composition analysis, respectively. Nickel silicides with platinum have no effect on widening the NiSi stabilization temperature region. Nickel silicides with iridium farmed on single crystal silicon showed a low resistance up to $1200^{\circ}C$ while the ones formed on polycrystalline silicon substrate showed low resistance up to $850^{\circ}C$. The grain boundary diffusion and agglomeration of silicides lowered the NiSi stable temperature with polycrystalline silicon substrates. Our result implies that our newly proposed Ir added NiSi process may widen the thermal process window for nano CMOS process.

• Journal of the Korean Magnetics Society
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• v.18 no.1
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• pp.1-8
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• 2008

We have manufactured and evaluated reference samples for the use of low magnetic moment measurements. Before the measurements, SQUID magnetometers were magnetically shielded from external magnetic noise. We considered the purity including magnetic impurities, the optimum thickness, the modification method, and the shape in the preparation of the samples. Three paramagnetic polycrystaline metal plates of Ti, W, and Al with the area of $4mm{\times}6mm$ were prepared finally. The magnetic moments of these three samples are measured very linear up to the field of 5 T without magnetic hysteresis. The temperature deviated ratios of the magnetic moments for Ti, Al, and W from 290 K to 310 K are 0.7, 1.5, and 0.1 %, respectively. The measured magnetic moments for Ti and W samples by our research team are very well agreeable with those by two SQUID magnetometers and a VSM at Quantum Design via international round robin test. The results suggest that the prepared reference samples are well suited for the use in the low magnetic moment measurement with SQUID based magnetometers.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.20 no.5
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• pp.227-231
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• 2010

Super hydrophilic $TiO_2$ thin films with photocatalytic property were successfully fabricated on a glass substrate by liquid phase deposition (LPD). The $TiO_2$ thin film formed nano particles on a surface at $70^{\circ}C$. As an immersion time in $TiF_4$ solution increased, the thickness of thin films gradually increased. $TiO_2$ thin film showed a water contact angel of below ca. $5^{\circ}$ and the transmittance of ca. 75~90 % in visible range. In addition, $TiO_2$ thin film showed the photocatalytic property to decompose methyl orange solution by the illumination of UV light. The surface morphologies, optical properties and contact angel of prepared thin films with a different immersion time were measured by field emission scanning electron microscope (FE-SEM), atomic force microscope (AFM), UV-Vis spectrophotometer and contact angle meter.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.7 no.2
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• pp.120-125
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• 2006

By employing a rapid solidification method and atmospheric annealing at $450^{\circ}C-1hr$, we were able to manufacture inexpensively granular CuCo alloy ribbons with thickness of $20{\mu}m$ showing giant magnetoresistance (GMR) ratio of more than 5% at a high magnetic field of 0.5T. To verify maximum MR effect, the MR ratio, saturation magnetization, and microstructure change were investigated with Co contents between 5 and 30 at%. It was possible to obtain GMR ratios of 5.2% at 1.2T, and 3% at 0.5T, which implies an appropriate MR for industrial purpose at a Co content of $8{\sim}l4%$. MR ratio was reduced rapidly at a Co content below 5% due to superparamagnetic effect and at a Co content above 20% due to agglomeration of Co clusters. Surface oxidation during rapid solidification and atmospheric annealing did not have much affect on MR ratio. Our result implies that our economic CuCo granular alloy ribbons may be appropriate for high magnetic field sensor applications with wide content range of $8{\sim}14$ at%Co.

• Proceedings of the Korean Vacuum Society Conference
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• 2000.02a
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• pp.156-156
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• 2000

Recently, the surface electronic states have attracted much attention since their standing wave patterns created around steps, defects, and adsorbates on noble metal surfaces such as Au(111), Ag(110), and Cu(111) were observed by scanning tunneling microscopy (STM). As a typical example, a striking circular pattern of "Quantum corral" observed by Crommie, Lutz, and Eigler, covers a number of text books of quantum mechanics, demonstrating a wavy nature of electrons. After the discoveries, similar standing waves patterns have been observed on other metal and demiconductor surfaces and even on a side polane of nano-tubes. With an expectation that the surface states could be utilized as one of ideal cases for studying two dimensionakl (sD) electronic system, various properties, such as mean free path / life time of the electronic states, have been characterized based on an analysis of standing wave patterns, . for the 2D electron system, electron density is one of the most importnat parameters which determines the properties on it. One advantage of conventional 2D electron system, such as the ones realized at AlGaAs/GaAs and SiO2/Si interfaces, is their controllability of the electrondensity. It can be changed and controlled by a factor of orders through an application of voltage on the gate electrode. On the other hand, changing the leectron density of the surface-state 2D electron system is not simple. On ewqy to change the electron density of the surface-state 2D electron system is not simple. One way to change the electron density is to deposit other elements on the system. it has been known that Pd(111) surface has unoccupied surface states whose energy level is just above Fermi level. Recently, we found that by depositing Pd on Cu(111) surface, occupied surface states of Cu(111) is lifted up, crossing at Fermi level around 2ML, and approaches to the intrinsic Pd surface states with a increase in thickness. Electron density occupied in the states is thus gradually reduced by Pd deposition. Park et al. also observed a change in Fermi wave number of the surface states of Cu(111) by deposition of Xe layer on it, which suggests another possible way of changing electron density. In this talk, after a brief review of recent progress in a study of standing weaves by STM, I will discuss about how the electron density can be changed and controlled and feasibility of using the surface states for a study of 2D electron system. One of the most important advantage of the surface-state 2D electron system is that one can directly and easily access to the system with a high spatial resolution by STM/AFM.y STM/AFM.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.19 no.12
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• pp.938-943
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• 2018

Thin nano-sized fibres were prepared by an electrospinning method. The spinning appratus consisted of pump for polymer injection, nozzle and nozzle rotus, and an aluminum plate collected the polymer fibers. Its surface was chemically modified for selective improved adsorption of carbon monoxide at indoor level. The chemical activation enabled to form the fibres 250-350 nm in thickness with pore sizes distributed between 0.6 and 0.7 nm and an average specific surface area of $569m^2/g$. The adsorption capacities of pure (100%) and indoor (0.3%) $CO_2$, of which level frequently appears, at the ambient condition were improved from 1.08 and 0.013 to 2.2 and 0.144 mmol/g, respectively. It was found that the adsorption amount of $CO_2$ adsorbed by the chemically activated carbon nanofiber prepared through chemical activation would vary depending on the ratio of specific surface area and micropores. In particular, chemical interaction between adsorbent surface and gas molecules could enhance the selective capture of weak acidic $CO_2$.

• Advances in nano research
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• v.12 no.6
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• pp.605-616
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• 2022

We prepared two samples of ultrafine ferrihydrite (FH) nanoparticle ensembles of quite a different origin. First is the biosynthesized sample (as a product of the vital activity of bacteria Klebsiella oxytoca (hereinafter marked as FH-bact) with a natural organic coating and negligible magnetic interparticle interactions. And the second one is the chemically synthesized ferrihydrite (hereinafter FH-chem) without any coating and high level of the interparticle interactions. The interparticle magnetic interactions have been tuned by modifying the nanoparticle surface in both samples. The coating of the FH-bact sample has been partially removed by annealing at 150℃ for 24 h (hereinafter FH-annealed). The FH-chem sample, vice versa, has been coated (1.0 g) with biocompatible polysaccharide (arabinogalactan) in an ultrasonic bath for 10 min (hereinafter FH-coated). The changes in the surface properties of nanoparticles have been controlled by XPS. According to the electron microscopy data, the modification of the nanoparticle surface does not drastically change the particle shape and size. A change in the average nanoparticle size in sample FH-annealed to 3.3 nm relative to the value in the other samples (2.6 nm) has only been observed. The estimated particle coating thickness is about 0.2-0.3 nm for samples FH-bact and FH-coated and 0.1 nm for sample FH-annealed. Mössbauer and magnetization measurements are definitely shown that the drastic change in the blocking temperature is caused by the interparticle interactions. The experimental temperature dependences of the hyperfine field hf>(T) for samples FH-bact and FH-coated have not revealed the effect of interparticle interactions. Otherwise, the interparticle interaction energy E_int estimated from the hf>(T) for samples FH-chem and FH-annealed has been found to be 121k_B and 259k_B, respectively.

• Advances in nano research
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• v.16 no.2
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• pp.127-140
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• 2024

Upon direct/indirect exposure to flame or heat, composite structures may burn or thermally buckle. This issue becomes more important in the natural fiber-based composite structures with higher flammability and lower mechanical properties. The main goal of the present study was to obtain an optimal eco-friendly composite system with low flammability and high thermal buckling resistance. The studied composite consisted of polypropylene (PP) and short abaca fiber (AF) with eggshell powder (ESP) and halloysite clay nanotubes (HNTs) additives. An optimal base composite, consisting of 30 wt.% AF and 70 wt.% PP, abbreviated as OAP, was initially introduced based on burning rate (BR) and the Young's modulus determined by horizontal burning test (HBT) and tensile test, respectively. The effects of adding ESP to the base composite were then investigated with the same experimental tests. The results indicated that though the BR significantly decreased with the increase of ESP content up to 6 wt.%, it had a very destructive influence on the stiffness of the composite. To compensate for the damaging effect of ESP, small amount of HNT was used. The performance of OAP composite with 6 wt.% ESP and 3 wt.% HNT (OAPEH) was explored by conducting HBT, cone calorimeter test (CCT) and tensile test. The experimental results indicated a 9~23 % reduction in almost all flammability parameters such as heat release rate (HRR), total heat released (THR), maximum average rate of heat emission (MARHE), total smoke released (TSR), total smoke production (TSP), and mass loss (ML) during combustion. Furthermore, the combination of 6 wt.% ESP and 3 wt.% HNT reduced the stiffness of OAP to an insignificant amount by maximum 3%. Moreover, the char residue analysis revealed the distinct differences in the formation of char between AF/PP and AF/PP/ESP/HNT composites. Afterward, dilatometry test was carried out to examine the coefficient of thermal expansion (CTE) of OAP and OAPEH samples. The obtained results showed that the CTE of OAPEH composite was about 18% less than that of OAP. Finally, a theoretical model was used based on first-order shear deformation theory (FSDT) to predict the critical bucking temperatures of the OAP and OAPEH composite plates. It was shown that in the absence of mechanical load, the critical buckling temperatures of OAPEH composite plates were higher than those of OAP composites, such that the difference between the buckling temperatures increased with the increase of thickness. On the contrary, the positive effect of CTE reduction on the buckling temperature decreased by raising the axial compressive mechanical load on the composite plates which can be assigned to the reduction of stiffness after the incorporation of ESP. The results of present study generally stated that a suitable combination of AF, PP, ESP, and HNT can result in a relatively optimal and environmentally friendly composite with proper flame and thermal buckling resistance with no significant decline in the stiffness.