• Proceedings of the Korean Vacuum Society Conference
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• 2007.02a
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• pp.131-131
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• 2007

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2010.05a
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• pp.19-20
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• 2010

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2015.05a
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• pp.48-49
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• 2015

• Korean Journal of Materials Research
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• v.13 no.4
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• pp.266-270
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• 2003

We studied BCl$_3$ dry etching of GaAs in a planar inductively coupled plasma system. The investigated process parameters were planar ICP source power, chamber pressure, RIE chuck power and gas flow rate. The ICP source power was varied from 0 to 500 W. Chamber pressure, RIE chuck power and gas flow rate were controlled from 5 to 15 mTorr, 0 to 150 W and 10 to 40 sccm, respectively. We found that a process condition at 20 sccm $BCl_3$ 300 W ICP, 100 W RIE and 7.5 mTorr chamber pressure gave an excellent etch result. The etched GaAs feature depicted extremely smooth surface (RMS roughness < 1 nm), vertical sidewall, relatively fast etch rate (> $3000\AA$/min) and good selectivity to a photoresist (> 3 : 1). XPS study indicated a very clean surface of the material after dry etching of GaAs. We also noticed that our planar ICP source was successfully ignited both with and without RIE chuck power, which was generally not the case with a typical cylindrical ICP source, where assistance of RIE chuck power was required for turning on a plasma and maintaining it. It demonstrated that the planar ICP source could be a very versatile tool for advanced dry etching of damage-sensitive compound semiconductors.

• The Journal of Advanced Prosthodontics
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• v.10 no.1
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• pp.43-49
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• 2018

PURPOSE. The purpose of this in vitro study is to examine the effects of a nano-structured alumina coating on the adhesion between resin cements and zirconia ceramics using a four-point bending test. MATERIALS AND METHODS. 100 pairs of zirconium bar specimens were prepared with dimensions of $25mm{\times}2mm{\times}5mm$ and cementation surfaces of $5mm{\times}2mm$. The samples were divided into 5 groups of 20 pairs each. The groups are as follows: Group I (C) - Control with no surface modification, Group II (APA) - airborne-particle-abrasion with $110{\mu}m$ high-purity aluminum oxide ($Al_2O_3$) particles, Group III (ROC) - airborne-particle-abrasion with $110{\mu}m$ silica modified aluminum oxide ($Al_2O_3+SiO_2$) particles, Group IV (TCS) - tribochemical silica coated with $Al_2O_3$ particles, and Group V (AlC) - nano alumina coating. The surface modifications were assessed on two samples selected from each group by atomic force microscopy and scanning electron microscopy. The samples were cemented with two different self-adhesive resin cements. The bending bond strength was evaluated by mechanical testing. RESULTS. According to the ANOVA results, surface treatments, different cement types, and their interactions were statistically significant (P<.05). The highest flexural bond strengths were obtained in nano-structured alumina coated zirconia surfaces (50.4 MPa) and the lowest values were obtained in the control group (12.00 MPa), both of which were cemented using a self-adhesive resin cement. CONCLUSION. The surface modifications tested in the current study affected the surface roughness and flexural bond strength of zirconia. The nano alumina coating method significantly increased the flexural bond strength of zirconia ceramics.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.05a
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• pp.86-89
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• 2004

Organic thin film transistors (OTFTs) are fabricated on the plastic substrate through 4-level mask process without photolithographic patterning to yield the simple fabrication process. And we herewith report for the effect of dielectric surface modification on the electrical characteristics of OTFTs. The KIST-JM-1 as an organic molecule for the surface modification is deposited onto the surface of zirconium oxide $(ZrO_2)$ gate dielectric layer. In this work, we have examined the dependence of electrical performance on the interface surface state of gate dielectric/pentacene, which may be modified by chemical properties in the gate dielectric surface.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2008.11a
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• pp.11-12
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• 2008

Micron-sized Co-alloy T800 powder was coated on Inconel718 (IN718) using high velocity oxygen fuel (HVOF) thermal spraying by the optimal coating process (OCP) determined from the best surface hardness of 16 coatings prepared by Taguchi program. The surface hardness improved 140-160 % from 399 Hv of IN718 to 560-630 Hv by the coating. Porosity of the coating was 1.0-2.7 %, strongly depending on spray parameters. Both friction coefficients (FC) and wear traces (WT) of the coating were smaller than those of IN718 substrate at both $25^{\circ}C$ and $538^{\circ}C$. FC and WT of IN718 and coating decreased with increasing the surface temperature. Tensile bond strength (TBS) and fracture location (FL) of Ti64/T800 were 8,770 psi and near middle of T800 coating respectively. TBS and FL of Ti64/NiCr/T800 were 8,740 psi and near middle of T800 coating respectively. This showed that cohesion of T800 coating was 8,740-8,770 psi, and adhesion of T800 on Ti64 and NiCr was stronger than the cohesion of T800.

• Journal of the Korean Applied Science and Technology
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• v.31 no.4
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• pp.679-687
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• 2014

In this study, a new paint which is able to resist the cavitation erosion is tried to be developed by using urethane added with nano particles such as multi-wall and single-wall carbon nano tube and spherical and fiber type graphite. The new paint synthesized was characterized with physical properties and resistivity to cavitation erosion($t_{50}$). Among nano particles, fiber type graphite($t_{50}$ 292min) showed high hardness and wear resistance compared with spherical type($t_{50}$ 182min). For carbon nano tube, single-wall type($t_{50}$ 286min) was higher than multi-wall type in wear resistance. Fiber-type graphite was the best nano-particle for paint with resistivity to cavitation erosion. In the application test of paint, the manually painted sample showed surface with smooth but the surface of sample prepared with spray was not smooth. During spray, dust was fixed on the surface.

• Journal of Sensor Science and Technology
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• v.22 no.2
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• pp.144-149
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• 2013

In this research, we developed a biosensor to detect lung cancer-specific biomarker using Anodic Aluminum Oxide (AAO) chip based on interference and nano surface plasmon resonance (nanoSPR). The nano-porous AAO chip was fabricated $2{\mu}m$ of pore-depth by two-step anodizing method for surface uniformity. NanoSPR has sensitivity to the refractive index (RI) of the surrounding medium and also provides simple and label-free detection when specific antibodies are immobilized to the Au-deposited surface of nano-porous AAO chip. To detect the lung cancer-specific biomarker, antibodies were immobilized on the surface of the chip by Self Assembled Monolayer (SAM) method. Since then lung cancer-specific biomarker was applied atop the antibodies immobilized layer. The specific reaction of the antigen-antibody contributed to the change in the refractive index that cause shift of resonance spectrum in the interference pattern. The Limit of Detection (LOD) was 1 fg/ml by using our nano-porous AAO biosensor chip.

• Clean Technology
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• v.11 no.3
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• pp.153-164
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• 2005

This study found a reliable evaluation for four kinds of pb-Free plating solutions and it's layers, through pure Sn, SnAg, SnBi and SnCu. These four kind of solutions are widely used to pb-Free plating. Hull-cell, Harring-blum, coverage, throwing power, current efficiency, stability, life-time, composition, hardness, roughness, abrasion, scratch, solderability, corrosion, contact angle, morphology, SIR(Surface insulation resistance) and Whisker test were experimented. Also, Using ICP, XRF, FE-SEM, EDS, temperature/humidity chamber, solderability tester, hardness tester, roughness tester, abrasion tester, salt spray tester, contact angle tester, SIR tester, and microscope. In this paper could be shown the systematic and various analysis for reliability about four kinds of pb-Free plating solutions, processes and it's deposit surface.