• Advances in nano research
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• v.5 no.4
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• pp.337-357
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• 2017

Knowledge of thin films mechanical properties is strongly associated to the reliability and the performances of Nano Electro Mechanical Systems (NEMS). In the literature, there are several methods for micro materials characterization. Bulge test is an established nondestructive technique for studying the mechanical properties of thin films. This study improve the performances of NEMS by investigating the mechanical behavior of Nano rectangular thin film (NRTF) made of new material embedded in Nano Electro Mechanical Systems (NEMS) by developing the bulge test technique. The NRTF built from adhesively-bonded layers of basalt fiber reinforced polymer (BFRP) laminate composite materials in Nano size at room temperature and were used for plane-strain bulging. The NRTF is first pre-stressed to ensure that is no initial deflection before applied the loads on NRTF and then clamped between two plates. A differential pressure is applying to a deformation of the laminated composite NRTF. This makes the plane-strain bulge test idea for studying the mechanical behavior of laminated composite NRTF in both the elastic and plastic regimes. An exact solution of governing equations for symmetric cross-ply BFRP laminated composite NRTF was established with taking in-to account the effect of the residual strength from pre-stressed loading. The stress-strain relationship of the BFRP laminated composite NRTF was determined by hydraulic bulging test. The NRTF thickness gradation in different points of hemisphere formed in bulge test was analysed.

• JSTS:Journal of Semiconductor Technology and Science
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• v.15 no.6
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• pp.647-652
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• 2015

Pull-in voltage model of nano-electro-mechanical system with graphene is investigated for the device optimization. In the pull in voltage model, thickness of graphene layer is assumed to be uniform in vertical and lateral direction. Finite element analysis simulation has verified the feasibility of the suggested model. From the suggested model, pull-in voltage change with graphene thickness and cantilever length can be estimated. Maximum induced stress and graphene thickness have a reciprocal relationship.

• Journal of Mechanical Science and Technology
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• v.19 no.9
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• pp.1711-1719
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• 2005

In an electro statically actuated nanoelectromechanical system (NEMS) resonator, it is shown that both the resonance frequency and the resonance quality (Q) factor can be manipulated. How much the frequency and quality factor can be tuned by excitation voltage and resistance on a doubly-clamped beam resonator is addressed. A mathematical model for investigating the tuning effects is presented. All results are shown based on the feasible dimension of the nanoresonator and appropriate external driving voltage, yielding up to 20 MHz resonance frequency. Such parameter tuning could prove to be a very convenient scheme to actively control the response of NEMS for a variety of applications.

• Smart Structures and Systems
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• v.17 no.5
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• pp.837-857
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• 2016

In the present study, for first time the size dependent vibration behavior of a rotating functionally graded (FG) Timoshenko nanobeam based on Eringen's nonlocal theory is investigated. It is assumed that the physical and mechanical properties of the FG nanobeam are varying along the thickness based on a power law equation. The governing equations are determined using Hamilton's principle and the generalized differential quadrature method (GDQM) is used to obtain the results for cantilever boundary conditions. The accuracy and validity of the results are shown through several numerical examples. In order to display the influence of size effect on first three natural frequencies due to change of some important nanobeam parameters such as material length scale, angular velocity and gradient index of FG material, several diagrams and tables are presented. The results of this article can be used in designing and optimizing elastic and rotary type nano-electro-mechanical systems (NEMS) like nano-motors and nano-robots including rotating parts.

• Coupled systems mechanics
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• v.10 no.1
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• pp.39-60
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• 2021

The present paper is concerned with the study of nonlinear ultrasonic waves in a magneto thermo (MT) elastic armchair single-walled carbon nanotube (ASWCNT) resting on polymer matrix. The analytical formulation is developed based on Eringen's nonlocal elasticity theory to account small scale effect. After developing the formal solution of the mathematical model consisting of partial differential equations, the frequency equations have been analyzed numerically by using the nonlinear foundations supported by Winkler-Pasternak model. The solution is obtained by ultrasonic wave dispersion relations. Parametric work is carried out to scrutinize the influence of the non local scaling, magneto-mechanical loadings, foundation parameters, various boundary condition and length on the dimensionless frequency of nanotube. It is noticed that the boundary conditions, nonlocal parameter, and tube geometrical parameters have significant effects on dimensionless frequency of nano tubes. The results presented in this study can provide mechanism for the study and design of the nano devices like component of nano oscillators, micro wave absorbing, nano-electron technology and nano-electro- magneto-mechanical systems (NEMMS) that make use of the wave propagation properties of armchair single-walled carbon nanotubes embedded on polymer matrix.

• Structural Engineering and Mechanics
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• v.82 no.5
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• pp.629-641
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• 2022

This study deals with the spinning impact on flap-wise vibration characteristics of nonlocal functionally graded (FG) cylindrical beam based on the Hyperbolic shear deformation beam theory. The nonlocal strain gradient theory is used to investigate the small-scale impact on the nonlocal motion equation as well as corresponding nonlocal boundary conditions. Based on the mathematical simulation and according to the Hamilton principle, the computerized modeling of a rotating functionally graded nanotube is generated, and then, via a numerical approach, the obtained mathematical equations are solved. The calculated outcomes are helpful to the production of Nano-electro-mechanical-systems (NEMS) by investigating some designed parameters such as rotating speed, hub radius, length-scale parameters, volume fraction parameters, etc.

• KSTLE International Journal
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• v.9 no.1_2
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• pp.10-12
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• 2008

Silicon micro-patterns were fabricated on Si (100) wafers using photolithography and DRIE (Deep Reactive Ion Etching) fabrication techniques. The patterned shapes included micro-pillars and micro-channels. After the fabrication of the patterns, the patterned surfaces were chemically modified by coating Z-DOL (perfluoropolyether, PFPE) thin films. The surfaces were then evaluated for their micro-friction behavior in comparison with those of bare Si (100) flat, Z-DOL coated Si (100) flat and uncoated Si patterns. Experimental results showed that the chemically treated (Z-DOL coated) patterned surfaces exhibited the lowest values of coefficient of friction when compared to the rest of the test materials. The results indicate that a combination of both the topographical and chemical modification is very effective in reducing the friction property. Combined surface treatments such as these could be useful for tribological applications in miniaturized devices such as Micro/Nano-Electro-Mechanical-Systems (MEMS/NEMS).

• Steel and Composite Structures
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• v.32 no.6
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• pp.753-767
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• 2019

Vibration control in mechanical equipments is an important problem where unwanted vibrations are vanish or at least diminished. In this paper, free vibration active control of the porous sandwich piezoelectric polymeric nanocomposite microbeam with microsensor and microactuater layers are investigated. The aim of this research is to reduce amplitude of vibration in micro beam based on linear quadratic regulator (LQR). Modified couple stress theory (MCST) according to sinusoidal shear deformation theory is presented. The porous sandwich microbeam is rested on elastic foundation. The core and face sheet are made of porous and three-phase carbon nanotubes/resin/fiber nanocomposite materials. The equations of motion are extracted by Hamilton's principle and then Navier's type solution are employed for solving them. The governing equations of motion are written in space state form and linear quadratic regulator (LQR) is used for active control approach. The various parameters are conducted to investigate on the frequency response function (FRF) of the sandwich microbeam for vibration active control. The results indicate that the higher length scale to the thickness, the face sheet thickness to total thickness and the considering microsensor and microactutor significantly affect LQR and uncontrolled FRF. Also, the porosity coefficient increasing, Skempton coefficient and Winkler spring constant shift the frequency response to higher frequencies. The obtained results can be useful for micro-electro-mechanical (MEMS) and nano-electro-mechanical (NEMS) systems.

• Steel and Composite Structures
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• v.41 no.6
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• pp.805-820
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• 2021

In this research, the buckling and free vibration of three-phase carbon nanotubes/ fiber/ polymer piezoelectric nanocomposite face sheet sandwich microbeam with microsensor and micro-actuator surrounded in elastic foundation based on modified couple stress theory (MCST) is investigated. Three types of porous materials are considered for sandwich core. Higher order (Reddy) and sinusoidal shear deformation beam theories are employed for the displacement fields. Sinusoidal surface stress effects are extracted for sinusoidal shear deformation beam theory. The equations of motion are derived by Hamilton's principle and then the natural frequency and critical buckling load are obtained by Navier's type solution. The determined results are in good agreement with other literatures. The detailed numerical investigation for various parameters is performed for this microsensor-microactuator. The results reveal that the microsensor-microactuator enhanced by increasing of Skempton coefficient, carbon nanotubes diameter length to thickness ratio, small scale factor, elastic foundation, surface stress constants and reduction in porous coefficient, micro-actuator voltage and CNT weight fraction. The valuable results can be expedient for micro-electro-mechanical (MEMS) and nano-electro-mechanical (NEMS) systems.

• Smart Structures and Systems
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• v.18 no.4
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• pp.787-800
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• 2016

The aim of the paper is to analyze nonlinear transverse vibration of an embedded piezoelectric plate reinforced with single walled carbon nanotubes (SWCNTs). The system in rested in a Pasternak foundation. The micro-electro-mechanical model is employed to calculate mechanical and electrical properties of nanocomposite. Using nonlinear strain-displacement relations and considering charge equation for coupling between electrical and mechanical fields, the motion equations are derived based on energy method and Hamilton's principle. These equations can't be solved analytically due to their nonlinear terms. Hence, differential quadrature method (DQM) is employed to solve the governing differential equations for the case when all four ends are clamped supported and free electrical boundary condition. The influences of the elastic medium, volume fraction and orientation angle of the SWCNTs reinforcement and aspect ratio are shown on frequency of structure. The results indicate that with increasing volume fraction of SWCNTs, the frequency increases. This study might be useful for the design and smart control of nano/micro devices such as MEMS and NEMS.