JSTS:Journal of Semiconductor Technology and Science

The Institute of Electronics and Information Engineers (대한전자공학회)
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Pull-In Voltage Modeling of Graphene Formed Nickel Nano Electro Mechanical Systems (NEMS)

  • Lim, Songnam (Department of Electronic Engineering, Myongji University) ;
  • Lee, Jong-Ho (School of Electrical Engineering and Computer Science, Seoul National University) ;
  • Choi, Woo Young (Department of Electronic Engineering, Sogang University) ;
  • Cho, Il Hwan (Department of Electronic Engineering, Myongji University)
  • Received : 2015.05.22
  • Accepted : 2015.08.12
  • Published : 2015.12.30
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Abstract

Pull-in voltage model of nano-electro-mechanical system with graphene is investigated for the device optimization. In the pull in voltage model, thickness of graphene layer is assumed to be uniform in vertical and lateral direction. Finite element analysis simulation has verified the feasibility of the suggested model. From the suggested model, pull-in voltage change with graphene thickness and cantilever length can be estimated. Maximum induced stress and graphene thickness have a reciprocal relationship.

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References

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