• 제목/요약/키워드: Nano Stage

검색결과 280건 처리시간 0.021초

무전해도금법으로 형성한 Ni-P-SiC 복합도금막의 특성 (Properties of Ni-P-SiC Composite Coating Layers Prepared by Electroless Plating Method)

  • 이홍기;이호영;전준미
    • 한국표면공학회지
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    • 제40권2호
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    • pp.70-76
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    • 2007
  • Ni-P-SiC composite coating layers were prepared by electroless plating method and their deposition rate, codeposition of SiC, morphology, surface roughness, hardness, wear and friction properties were investigated. The deposition rate was kept almost constant independent of the concentration of SiC in the plating solution and the codeposition of SiC in the composite coating layer increased with increased concentration of SiC in the plating solution except the early stage. Vickers microhardness increased with respect to the increased codeposition of SiC and the heat treatment at $300^{\circ}C$ in air for 1 hour. It was found that the wear volume decreased with increased up to 50 wt.% of SiC codeposition, and that friction coefficient increased gradually with increased codeposition of SiC. Considering the wear and the friction behaviors, the composite coating layer obtained by using 50 wt.% of SiC codeposition is desirable for the practical application for anti-wear and anti-friction coatings.

스마트 사물인터넷 기기용 저리플 방식의 스텝다운 컨버터 분석 (Analysis of Step-Down Converter with Low Ripple for Smart IoT Devices)

  • 김다솔;알라딘;구진선;쿠마르;송한정
    • 한국산업융합학회 논문집
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    • 제24권5호
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    • pp.641-644
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    • 2021
  • Wearable devices and IoT are being utilized in various fields, where all systems are developing in the direction of multi-functionality, low power consumption, and high speed. In this paper, we propose a DC -DC Step-down C onverter for IoT smart devices. The proposed DC -DC Step-down converter is composed of a control block of the power supply stage. It also consists of an overheat protection circuit, under-voltage protection circuit, an overvoltage protection circuit, a soft start circuit, a reference voltage circuit, a lamp generator, an error amplifier, and a hysteresis comparator. The proposed DC-DC converter was designed and fabricated using a Magnachip / Hynix 180nm CMOS process, 1-poly 6-metal, the measured results showed a good match with the simulation results.

An Intelligent Nano-positioning Control System Driven by an Ultrasonic Motor

  • Fan, Kuang-Chao;Lai, Zi-Fa
    • International Journal of Precision Engineering and Manufacturing
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    • 제9권3호
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    • pp.40-45
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    • 2008
  • This paper presents a linear positioning system and its control algorithm design with nano accuracy/resolution. The basic linear stage structure is driven by an ultrasonic motor and its displacement feedback is detected by a LDGI (Laser Diffraction Grating Interferometer), which can achieve nanometer resolution. Due to the friction driving property of the ultrasonic motor, the driving situation differs in various ranges along the travel. Experiments have been carried out in order to observe and realize the phenomena of the three main driving modes: AC mode (for mm motion), Gate mode (for ${\mu}m$ motion), and DC mode (for nm motion). A proposed FCMAC (Fuzzy Cerebella Model Articulation Controller) control algorithm is implemented for manipulating and predicting the velocity variation during the motion of each mode respectively. The PCbased integral positioning system is built up with a NI DAQ Device by a BCB (Borland $C^{++}$ Builder) program to accomplish the purpose of an intelligent nanopositioning control.

나노부품 초정밀가공기용 마이크로스테이지의 절삭력 예측모델 시뮬레이션 (The Simulation of Cutting force Estimate Model at Micro-Stage for Ultra Precision Cutting Machine of Nano Part)

  • 김재열;심재기;곽이구;안재신;한재호;노기웅
    • 한국공작기계학회:학술대회논문집
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    • 한국공작기계학회 2003년도 춘계학술대회 논문집
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    • pp.173-178
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    • 2003
  • Recently, according to the development of mechatronics industry that was composed of NT, ST, IT, RT and etc, the 1 necessity of nano-parts was increased. Because of the necessity, this research was started for improving work precision of the parts as fixing UPCU( Ultra Precision Cutting Unit)on lathe. So, in this research we executed the modeling of UPCU (Ultra Precision Cutting Unit) by the application of PZT, the relationship between the displacement of tool in UPCU and the cutting force of it has been in take a triangular position in the case of plane cutting. The modeling of system that is containing the fine displacement was performed. Also, we found like to find the optimal cutting condition through the simulation of relationship between the displacement and the cutting force.

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FE-tip을 이용한 Nano-Lithography 기술에 관한 연구 (A Study on the Nano-Lithography using FE-tip)

  • 최재혁;박선우;김철주
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1999년도 추계학술대회 논문집 학회본부 C
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    • pp.1160-1163
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    • 1999
  • In this study, we developed FE-tip lithography system that could apply to multi-tip system and did lithography using FE-tip. The software that control FE-tip lithography system, was proposed for acquiring more adaptive data to compensate the effect of fluctuation. We found that the fluctuation effect was reduced. The minimum line width was related to applied voltage and we observed a movement of Z-axis piezo stage to correct the error of this system. When FE current was 5nA, scanning speed was $3{\mu}m/sec$ and applied voltage was 200V, we made a line pattern which had minimum line width of 614 nm. If we reduce applied voltage to several decades and increase scanning speed to $20{\mu}m/sec$, it is possible to set the minimum line width of 100 nm. The proposed system can be easily applied to multi FE-tip lithography system.

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AFM에서의 정량적 힘 측정을 위한 마이크로 캔틸레버의 강성 교정 (Accurate Determination of Spring Constants of Micro Cantilevers for Quantified Force Metrology in AFM)

  • 김민석;최재혁;김종호;박연규
    • 한국정밀공학회지
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    • 제24권6호
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    • pp.96-104
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    • 2007
  • Calibration of the spring constants of atomic force microscopy (AFM) cantilevers is one of the issues in biomechanics and nanomechanies for quantified force metrology at pieo- or nano Newton level. In this paper, we present an AFM cantilever calibration system: the Nano Force Calibrator (NFC), which consists of a precision balance and a one-dimensional stage. Three types of AFM cantilevers (contact and tapping mode) with different shapes (beam and V) and spring constants (42, 1, 0.06 N $m^{-1}$) are investigated using the NFC. The calibration results show that the NFC can calibrate the micro cantilevers ranging from 0.01 ${\sim}$ 100 N $m^{-1}$ with relative uncertainties of less than 2%.

반복변형된 Cu 및 Cu-Al 단결정 표면형상의 나노-스케일 관찰 (Nano-Scale Surface Observation of Cyclically Deformed Copper and Cu-Al Single Crystals)

  • 최성종;이권용
    • Tribology and Lubricants
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    • 제16권5호
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    • pp.389-394
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    • 2000
  • Scanning Probe Microscope (SPM) such as Scanning Tunneling Microscope (STM) and Atomic Force Microscope (AEM) was shown to be the powerful tool for nano-scale characterization of material surfaces. Using this technique, surface morphology of the cyclically deformed Cu or Cu-Al single crystal was observed. The surface became proportionately rough as the number of cycles increased, but after some number of cycles no further change was observed. Slip steps with the heights of 100 to 200 nm and the widths of 1000 to 2000 nm were prevailing at the stage. The slipped distance of one slip system at the surface was not uniform, and formation of the extrusions or intrusions was assumed to occur such place. By comparing the morphological change caused by crystallographic orientation, strain amplitude, number of cycles or stacking fault energy, some interesting results which help to clarify the basic mechanism of fatigue damage were obtained. Furthermore, applicability of the scanning tunneling microscopy to fatigue damage is discussed.

자기 흡인식 부상 원리에 기초한 비접촉식 서피스 액추에이터의 초정밀 범용 스테이지에의 적용 가능성 (Feasibility Study of General-purpose Precision Stage Using A Novel Contact-Free Surface Actuator Based on Magnetic Suspension Technology)

  • 정광식;이상헌;백윤수
    • 대한기계학회논문집A
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    • 제26권3호
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    • pp.452-460
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    • 2002
  • The precision stage using a novel contact-free planar actuator based on magnetic farces, magnetized force and Lorentz farce, is suggested. In the promising magnetic structure, the mover is driven directly without any transmission mechanism, and doesn't need any auxiliary driver for its posture calibration. Then it is estimated that the proposed operating principle is very suitable for work requiring high accuracy and cleanness, or general-purpose nano-stage. In this paper, we discuss a driving principle of the planar system including the magnetic force generation mechanism, a framework for the force model, governing characteristics of the levitated plate, and a planar motion control of the constructed prototype. And experimental results are given to verify the derived theoretical model and a feasibility of the system.

Effects of EGF and PAF on the Hatching and Implantation of Peri-implantation Stage Embryos

  • Cheon, Yong-Pil
    • 한국발생생물학회지:발생과생식
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    • 제14권1호
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    • pp.27-34
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    • 2010
  • A fertilized oocyte can get the competence for implantation through cleavage and stage-specific gene expression. These are under the control of autonomous and exogenous regulators including physiological culture condition. Endogenous and exogenous growth factors are considered as critical regulators of cleaving embryos during travel the oviduct and uterus. In this study, an effort was made to evaluate comprehensively the quality of embryos for implantation, grown in media enriched with EGF and PAF. The study evaluated developmental rates on given time, blastulation and hatching rates, and adhesion rates. Developmental rates of blastocyst to the hatching stage were significantly high in PAF treated group compared to the control in a dose-dependent manner but not in EGF group. Implantation rates were significantly high both PAF and EGF in a dose-dependent manner. H7, a PKC inhibitor, blocked the process of hatching of the blastocysts but combined treatment of EGF and PAF enhanced the hatching and implantation of blastocsyts. Based on these results it is suggested that EGF and PAF support acquirement of implantation competence at blastocyst stage through a PKC pathway.

VCM을 이용한 나노 정밀도 스캐닝 용 초정밀 이중 스테이지 (Ultra high precision Dual stage system Using Air bearing and VCM for Nano level Scanning)

  • 김기현;권대갑;최영만;김동민;남병욱;이석원;이문구
    • 한국정밀공학회지
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    • 제22권5호
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    • pp.103-112
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    • 2005
  • This paper presents one-axis high precision scanning system and illustrates the design of modified $X-Y-{\theta}$ stage as a tracker using VCM and commercialized air bearings for it. The scanning system for 100nm resolution is composed of the 3-axis stage and one axis long stroke linear motor stage as a follower. In this study a previous proposed and presented structure of VCM for the fine stage is modified. The tracker has 3 DOF($X-Y-{\theta}$ motions by four VCM actuators which are located on the same plane. So 4 actuating forces are suggested and designed to create least pitch and roll motions. This article will show about the design especially about optimal design. The design focus of this fine stage is to have high acceleration to accomplish high throughput. The optimal design of maximizing acceleration is performed in restrained size. The most sensitive constraint of this optimal design is heat dissipation of coil. There are 5 design variables. Because the relationship between design variables and system parameters are quite complicated, it is very difficult to set design variables manually. Due to it, computer based optimal design procedure using MATLAB is used. Then, this paper also describes the procedures of selecting design variables for the optimal design and a mathematical formulation of the optimization problem. Based on the solution of the optimization problem, the final design of the stage is also presented. The results can be verified by MAXWELL. The designed stage has the acceleration of about 5 $m/s^{2}$ with 40kg total mass including wafer chuck and interferometer mirror. And the temperature of coil is increased $50^{\circ}C$. In addition, the tracker is controlled by high precision controller system with HP interferometer for it and linear scaler for the follower. At that time, the scanning system has high precision resolution about 5nm and scanning resolution about 40nm in 25mm/s constant speed