• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2005년도 추계학술대회 논문집 Vol.18
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• pp.3-4
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• 2005

Germanium nanocrystals(NCs) were formed in the silicon dioxide($SiO_2$) on Si layers by Ge implantation and rapid thermal annealing process. The density and mean size of Ge-NCs heated at $800^{\circ}C$ during 10 min were confirmed by High Resolution Transmission Electron Microscopy. Capacitance versus voltage(C-V) measurements of MOS capacitors with single $Al_2O_3$ capping layers were performed in order to study electrical properties. The C-V results exhibit large threshold voltage shift originated by charging effect in Ge-NCs, revealing the possibility that the structure is applicable to Nano Floating Gate Memory(NFGM) devices.

• Bulletin of the Korean Chemical Society
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• 제30권2호
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• pp.449-453
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• 2009

A mesoporous assembly of layered titanate with well-dispersed Pt cocatalysts has been synthesized via a restacking of exfoliated titanate nanosheets and a simultaneous adsorption of Pt nanoparticles. According to powder X-ray diffraction analysis, the obtained mesoporous assembly shows amorphous structure corresponding to the disordered stacking of layered titanate crystallites. Field emission-scanning electron microscopy and $N_2$ adsorption-desorption isotherm measurement clearly demonstrate the formation of mesoporous structure with expanded surface area due to the house-of-cards type stacking of the titanate crystallites. From high resolution-transmission electron microscopy and elemental mapping analyses, it is found that Pt nanoparticles with the size of ~2.5 nm are homogeneously dispersed in the mesoporous assembly of layered titanate. In comparison with the protonated titanate, the present mesoporous assembly of layered titanate exhibits better photocatalytic activity for the photodegradation of organic molecules. This finding underscores that the restacking of exfoliated nanosheets is quite useful not only in creating mesoporous structure but also in improving the photocatalytic activity of titanium oxide.

• 한국정밀공학회지
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• 제21권6호
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• pp.153-159
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• 2004

In this study, a new process to pattern directly on a thin metal layer using improved nano replication printing (nRP) process is suggested to evaluate the possibilities of fabricating a stamp for nano-imprinting. In the nRP process, any figure can be replicated from a bitmap figure file in the range of several micrometers with nano-scaled details. In the process, liquid-state resins are polymerized by two-photon absorption which is induced by femto-second laser. A thin gold layer was sputtered on a glass plate and then, designed patterns or figures were developed on the gold layer by newly developed top-down building approach. Generally, stamps fur nano-imprinting have been fabricated by using the costly electron-beam lithography process combined with a reactive ion-etching process. Through this study, the effectiveness of the improved nRP process is evaluated to make a stamp with the resolution of around 200nm with reduced cost.

• International Journal of Precision Engineering and Manufacturing
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• 제6권3호
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• pp.8-12
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• 2005

The positioning system for an ultra precision machine tool must be accurate to the order of a nanometer. Various feed drive devices have been proposed to achieve this resolution; currently, most attention is directed towards hydrostatic lead screws and friction drives. It has been reported that a positioning resolution accurate to an angstrom can be achieved using a twist-roller friction drive. Therefore, we manufactured an ultra precision positioning system driven by a twist-roller friction drive and assessed its performance when defining problems and finding solutions. Our study showed that the twist-roller friction drive is mechanically suitable for ultra precision positioning, but some considerations are required to obtain a higher resolution.

• Journal of Mechanical Science and Technology
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• 제19권2호
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• pp.716-727
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• 2005

Comprehensive measurements for velocity and temperature fields have been conducted. A Micro PIV 2-color LIF system have been setup to measure the buoyancy driven fields in a 1-mm heated channel with low Grashof-Prandtl numbers [$86]. Fluorescence microscopy is combined with an MPIV system to obtain enough intensity images and clear pictures from nano-scale fluorescence particles. The spatial resolution of the Micro PIV system is $75{\mu}m\;by\;67{\mu}m$ and error due to Brownian motion is estimated $1.05\%$. Temperature measurements have achieved the $4.7\;{\mu}m$ spatial resolution with relatively large data uncertainties the present experiment. The measurement uncertainties have been decreased down to less than ${\pm}1.0^{\circ}C$ when measurement resolution is equivalent to $76\;{\mu}m$. Measured velocity and temperature fields will be compared with numerical results to examine the feasibility of development as a diagnostic technique.

• 대한기계학회논문집B
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• 제30권1호
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• pp.41-47
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• 2006

High resolution dopant profiling in semiconductor devices has been an intense research topic because of its practical importance in semiconductor industry. Although several techniques have already been developed. it still requires very expensive tools to achieve nanometer scale resolution. In this study we demonstrated a novel dopant profiling technique with nanometer resolution using very simple setup. The newly developed technique measures the thermoelectric voltage generated in the contact point of the SPM probe tip and MOSFET surface instead of electrical signals widely adopted in previous techniques like Scanning Capacitance Microscopy. The spatial resolution of our measurement technique is limited by the size of contact size between SPM probe tip and MOSFET surface and is estimated to be about 10 nm in this experiment.

• 전력전자학회:학술대회논문집
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• 전력전자학회 2003년도 추계학술대회 논문집
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• pp.56-59
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• 2003

This paper presents new interpolation algorithm for measuring high resolution position information which is propered to nano servo control motor using analog quadrature encoder. In the past, there is a large memory and two high price A/D converter for high resolution analog quadrature encoder interpolation. but this paper show that it can make high resolution interpolate using small memory, one A/D converter and comparator. Experimental results show that the proposed algorithm for high resolution position is useful.

• Journal of Magnetics
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• 제17권4호
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• pp.308-315
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• 2012

Experimental investigations of the magnetization, magnetostriction and magnetoelectric (ME) effects were performed on sandwich - type Metglas/PZT/Metglas laminate composites. The results have been analyzed by taking into account the demagnetization contribution. The study has pointed out that the magnetic flux concentration is strongly improved in piezomagnetic laminates with a narrower width leading to a significant enhancement of the ME effects. The piezomagnetic laminates with the optimal area dimension were integrated to form a 2-D geomagnetic device, which simultaneously can precisely detect the strength as well as inclination of the earth's magnetic field. In this case, a magnetic field resolution of better than $10^{-4}$ Oe and an angle precision of ${\pm}0.1^{\circ}$ were determined. This simple and low-cost geomagnetic-field device is promising for various applications.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.264-267
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• 2003

Pitch measurements of 150 nm pitch one-dimensional grating standards were carried out using an contact mode atomic force microscopy(C-AFM) with a high resolution three-axis laser interferometer. It was called as 'Nano-metrological AFM' In Nano-metrological AFM, Three laser interferometers were aligned well to the end of AFM tip. Laser sources of the three-axis laser interferometer in the nano-metrological AFM were calibrated with an I$_2$-stablilzed He-Ne laser at a wavelength of 633 nm. So, the Abbe error was minimized and the result of the pitch measurement using the nano-metrological AFM has a traceability to the length standard directly. The uncertainty in the pitch measurement was estimated in accordance with the Guide to the Expression of Uncertainty in Measurement(GUM). The Primary source of uncertainty in the pitch-measurements was derived from repeatability of pitch-measurement, and its value was approx 0.186 nm. Expanded uncertainty(k=2) of less than 5.23 nm was obtained. It is suggested that the metrological AFM is a useful tool for the nano-metrological standard calibration.

• 한국정밀공학회지
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• 제28권4호
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• pp.513-520
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• 2011

The NIL processes have been studied to implement low cost, high throughput and high resolution application. A RNIL(roller NIL) is an alternative approach to flat nanoimprint lithography. RNIL process is necessary to transfer patterns on flexible substrates. Compared with flat NIL, RNIL has the advantages of better uniformity, less pressing force, and the ability to repeat the patterning process continuously on a large substrate. This paper studies the design, construction and verification of a thermal RNIL system. The proposed RNIL system can easily adopt the flat shaped hot plate which is one of the most important technologies for NIL. The NIL system can be used to transfer patterns from a flexible stamp to a flexible substrate, from a flexible stamp to a Si substrate, and from a roller stamp to a flexible substrate, etc. Patterning on flexible substrates is one of the key technologies to produce bendable displays, solar cells and other applications.