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Design and Implementation of Nanoimprint Lithography System for Flexible Substrates  

Lim, Hyung-Jun (Nano Convergence and Manufacturing Systems Research Division, Korea Institute of Machinery and Materials)
Lee, Jae-Jong (Nano Convergence and Manufacturing Systems Research Division, Korea Institute of Machinery and Materials)
Choi, Kee-Bong (Nano Convergence and Manufacturing Systems Research Division, Korea Institute of Machinery and Materials)
Kim, Gee-Hong (Nano Convergence and Manufacturing Systems Research Division, Korea Institute of Machinery and Materials)
Ryu, Ji-Hyeong (Department of Nano Mechatronics, University of Science and Technology)
Publication Information
Journal of the Korean Society for Precision Engineering / v.28, no.4, 2011 , pp. 513-520 More about this Journal
Abstract
The NIL processes have been studied to implement low cost, high throughput and high resolution application. A RNIL(roller NIL) is an alternative approach to flat nanoimprint lithography. RNIL process is necessary to transfer patterns on flexible substrates. Compared with flat NIL, RNIL has the advantages of better uniformity, less pressing force, and the ability to repeat the patterning process continuously on a large substrate. This paper studies the design, construction and verification of a thermal RNIL system. The proposed RNIL system can easily adopt the flat shaped hot plate which is one of the most important technologies for NIL. The NIL system can be used to transfer patterns from a flexible stamp to a flexible substrate, from a flexible stamp to a Si substrate, and from a roller stamp to a flexible substrate, etc. Patterning on flexible substrates is one of the key technologies to produce bendable displays, solar cells and other applications.
Keywords
Nanoimprint Lithography; Roller; Flexible Substrate; Flexible Electronic Device;
Citations & Related Records
Times Cited By KSCI : 2  (Citation Analysis)
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