• 소성∙가공
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• 제15권1호
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• pp.21-26
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• 2006

A optical head unit for nano optical probe array was developed. The optical probe array is generated by Talbot effect. The shape and thickness of microlens array(MLA) were designed to minimize the spot size at the foci of MLA. To increase the optical efficiency of the system and obtain the large tolerance for fabrication, aperture size was theoretically optimized. Then microlens illuminated aperture array(MLIAA) as an optical head unit was fabricated using a ultra violet(UV) molding process on aluminum aperture array. In this process, Al aperture array was fabricated separately using the photolithography and reactive ion etching(RIE) process. Optical properties of the generated optical probes were measured and compared at Talbot distance from the aperture array having a diameter of $1{\mu}m$ and MLIAA.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2005년도 금형가공,미세가공,플라스틱가공 공동 심포지엄
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• pp.29-34
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• 2005

A optical head unit for nano optical probe away was developed. The optical probe array is generated by Talbot effect. The shape and thickness of microlens array(MLA) were designed to minimize the spot size at the foci of MLA. To increase the optical efficiency of the system and obtain the large tolerance for fabrication, aperture size was theoretically optimized. Then microlens illuminated aperture array(MLIAA) as an optical head unit was fabricated using a ultra violet(UV) molding process on aluminum aperture array. In this process, Al aperture array was fabricated separately using the photolithography and reactive ion etching(RIE) process. Optical properties of the generated optical probes were measured and compared at Talbot distance from the aperture array having a diameter of $1{\mu}m$ and MLIAA.

• 한국광학회:학술대회논문집
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• 한국광학회 2008년도 하계학술발표회 논문집
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• pp.185-186
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• 2008

In this paper, the nano-grating was measured by Scanning Probe Microscopy (SPM) system using digital Proportion, Integration and Derivative (PID) control. Through this measurement, we could confirm the improvement of the vertical resolution compared with analog Proportion and Integration (PI) control method.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2003년도 추계학술대회
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• pp.1888-1891
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• 2003

In this paper, we proposed a new method to control the length of carbon nano tube in the single CNT probe. A single CNT probe was composed of a tungsten tip made by the electrochemical etching and carbon nano tube which was grown by CVD and prepared through the sonication. The two components were attached with the carbon tape. Since the length of CNT can not be controlled during the manufacturing, the post process is needed to shorten the CNT. In this paper, we proposed the method of electrochemical process. The process was done under the optical microscope and the results were checked by SEM. The diameter of the carbon nano tube used in this paper was about 130nm because the above process had to be done with the optical microscope. Using the method proposed in this paper, we can control the length of the nano tube tip.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.2
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• pp.1058-1061
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• 2004

미세 소자를 관측, 가공 및 분석하기 위해 사용되는 기존 광학현미경은 빛으로 물체를 관측하므로 대물렌즈 (Object lens)에서의 회절한계 때문에 분해능의 있으므로 매우 뽀족한 탐침(Probe)을 시료의 표면에 근접시킨 후 표면을 주사하여 이미지를 얻는 방법이 개발되어 최근에는 Optical Fiber를 이용하여 fiber 끝단을 nano-scale 정도로 첨예화시키는 기술이 개발되었다. 이러한 광섬유 탐침은 구경의 직경이 작을수록 높은 분해능을 얻을 수 있으므로 광섬유 탐침의 제작 공정 확립은 매우 중요하다. 그 중에서 대표적인 방법이 $CO_2$ 레이저를 이용하여 가열한 후 인장 하는 방법 (Heating and Pulling)이 있다. 그래서 본 연구에서는 $CO_2$ 레이저를 이용하여 100nm 정도의 팁 반경을 갖는 뽀족한 탐침을 제작하고자 한다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2009년도 추계학술대회 논문집
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• pp.71-72
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• 2009

• 반도체디스플레이기술학회지
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• 제7권1호
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• pp.11-16
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• 2008

Confocal scanning microscopy is a widely used technique for three dimensional measurements because it is characterized by high resolution, high SNR and depth discrimination. Generally an image is generated by moving one optical probe that satisfies the confocal condition on the specimen. Measurement speed is limited by movement speed of the optical probe; scanning speed. To improve measurement speed we increase the number of optical probes. Specimen region to scan is divided by optical probes. Multi-point information each optical probe points to can be obtained simultaneously. Therefore image acquisition speed is increased in proportion to the number of optical probes. And multiple optical probes from red, green and blue laser sources can be used for color imaging and image quality, i.e., contrast, is improved by adding color information by this way. To conclude, this technique contributes to the improvement of measurement speed and image quality.

• Journal of the Optical Society of Korea
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• 제15권3호
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• pp.300-304
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• 2011

Optical microscopes are widely used for medical imaging these days, but biopsy is a lengthy process that causes many problems during the ex-vivo imaging procedure. The endo-microscope has been studied to increase accessibility to the human body and to get in-vivo images to use for medical diagnosis. This research proposes a multi-modal confocal endo-microscope for bio-medical imaging. We introduce the design process for a small endoscopic probe and a coupling mechanism for the probe to make the multi-modal confocal endo-microscope. The endoscopic probe was designed to decrease chromatic and spherical aberrations, which deteriorate the images obtained with the conventional GRIN lens. Fluorescence and reflectance images of various samples were obtained with the proposed endo-microscope. We evaluated the performance of the proposed endo-microscope by analyzing the acquired images, and demonstrate the possibilities of in-vivo medical imaging for early diagnosis.

• 한국정밀공학회지
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• 제21권6호
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• pp.167-171
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• 2004

In this paper, we proposed a new method to control the length of carbon nanotube using electrochemical etching. We made a nano probe that was composed of the tungsten tip and multi-wall carbon nanotube. The nano probe was placed on the nano stage and the carbon nanotube on the nano probe was etched in the electrolyte solution with the applied voltage. The overall procedures were done under optical microscope and can be monitored. We can obtain a nano probe with proper length through this procedure.

• 한국광학회:학술대회논문집
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• 한국광학회 2004년도 제15회 정기총회 및 동계학술발표회
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• pp.224-225
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• 2004