소성∙가공 (Transactions of Materials Processing)

  • 제15권1호
  • /
  • Pages.21-26
  • /
  • 2006
  • /
  • 1225-696X(pISSN)
  • /
  • 2287-6359(eISSN)
한국소성∙가공학회 (The Korean Society for Technology of Plasticity and materials processing)
권호 표지
DOI QR코드

DOI QR Code

나노 광 프로브 어레이 구현을 위한 광학 헤드 유닛 개발

Development of Optical Head Unit for Nano Optical Probe Array

  • 발행 : 2006.02.01
PDF 다운로드
⟨ 이전 논문 다음 논문 ⟩

초록

A optical head unit for nano optical probe array was developed. The optical probe array is generated by Talbot effect. The shape and thickness of microlens array(MLA) were designed to minimize the spot size at the foci of MLA. To increase the optical efficiency of the system and obtain the large tolerance for fabrication, aperture size was theoretically optimized. Then microlens illuminated aperture array(MLIAA) as an optical head unit was fabricated using a ultra violet(UV) molding process on aluminum aperture array. In this process, Al aperture array was fabricated separately using the photolithography and reactive ion etching(RIE) process. Optical properties of the generated optical probes were measured and compared at Talbot distance from the aperture array having a diameter of $1{\mu}m$ and MLIAA.

키워드

참고문헌

  1. D. H. Cho, S. K. Lee, B. Song, S. K. Kim, S. D. Jung, K. C. Kim, M. A. Chung, W. H. Cho, 2005, Twodimensional actuators for ultraslim mobile optical disk drive, IEEE Trans. Magn., Vol. 41, pp. 1053-1054 https://doi.org/10.1109/TMAG.2004.842026
  2. H. F. Shih, C. L. Chang, K. J. Lee, C. S. Chang, 2005, Design of optical head with holographic optical element for small form factor drive systems, IEEE Trans. Magn., Vol. 41, pp. 1058-1060 https://doi.org/10.1109/TMAG.2004.842021
  3. S. B. Luitjens, M. W. Blum, B. M. De Boer, W. F.ontigin, M. A. H. Vander Aa., 2003, Small form factor portable-blue drive: power consumption considerations, IEEE Trans. Cons. Electr., Vol. 49, pp.637-641 https://doi.org/10.1109/TCE.2003.1233789
  4. T. Hoog, A. Kastelijn, R. Hendriks, R. Verbeme, C. Busch, 2004, Optical ROM card system based on the Talbot effect, ISOM'04, Fr-L-02
  5. H. F. Talbot, 1836, Philos. Mag. J. Sci., Vol. 9, p. 401
  6. L. Rayleigh, 1881, Philos. Mag., Vol. 11, p. 196 https://doi.org/10.1080/14786448108626995
  7. M. Testof, .J. Jahns, N. A. Khilo, A. M. Goncharenko, 1996, Talbot effect for oblige angle of light propagation, Opt. Commun., Vol. 129, pp. 167-172 https://doi.org/10.1016/0030-4018(96)00131-9
  8. Nicolas GuCrineau, Bouchra Harchaoui, Jerome Primot, 2000, Talbot experiment re-examined:demonstration of an achromatic and continuous selfimaging regime, Opt. Commun., Vol. 180, pp. 199-203 https://doi.org/10.1016/S0030-4018(00)00717-3
  9. S. Kang, S. Kim, H. Kim, J. Lim, 2005, Fabrication Technology for Photonic Devices-Micromano-Molding, CPT 2005 (Japan), pp. 16-19
  10. S. Kim, S. Kang, 2003, Replication qualities and optical properties of UV-moulded microlens arrays, J. Phys. D: Appl. Phys., Vol.36, pp. 2451-2456 https://doi.org/10.1088/0022-3727/36/20/005
  11. 김석민, 임지석, 강신일, 전병희, 2004, UV 성형을 통한 마이크로 렌즈 어레이의 제작, 한국소성가공학회지, 제13권, pp. 236-241