Proceedings of the Optical Society of Korea Conference (한국광학회:학술대회논문집)
- 2008.07a
- /
- Pages.185-186
- /
- 2008
The Measurement of Nano-grating by Scanning Probe Microscopy Using Digital PID Control
Digital PID Control을 적용한 Scanning Probe Microscopy의 Nano-grating 측정
- Park, Gyeong-Deok ;
- Ji, Won-Su ;
-
Kim, Dae-Chan
;
- Jang, Dong-Hun ;
-
O, Beom-Hwan
;
-
Park, Se-Geun
;
-
Lee, Il-Hang
;
-
Lee, Seung-Geol
- 박경덕 (삼성전기-인하대 초정밀검사계측연구센터(PIMC)) ;
- 지원수 (삼성전기 생산기술 연구소) ;
-
김대찬
(삼성전기-인하대 초정밀검사계측연구센터(PIMC))
;
- 장동훈 (삼성전기-인하대 초정밀검사계측연구센터(PIMC)) ;
-
오범환
(삼성전기-인하대 초정밀검사계측연구센터(PIMC))
;
-
박세근
(집적형 광자기술 연구센터(OPERA))
;
-
이일항
(집적형 광자기술 연구센터(OPERA))
;
-
이승걸
(삼성전기-인하대 초정밀검사계측연구센터(PIMC))
- Published : 2008.07.01
Abstract
In this paper, the nano-grating was measured by Scanning Probe Microscopy (SPM) system using digital Proportion, Integration and Derivative (PID) control. Through this measurement, we could confirm the improvement of the vertical resolution compared with analog Proportion and Integration (PI) control method.
Keywords