• ETRI Journal
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• 제30권4호
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• pp.516-525
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• 2008

This paper proposes a compact, energy-efficient, and smart gas sensor platform technology for ubiquitous sensor network (USN) applications. The compact design of the platform is realized by employing silicon-on-insulator (SOI) technology. The sensing element is fully integrated with SOI CMOS circuits for signal processing and communication. Also, the micro-hotplate operates at high temperatures with extremely low power consumption, which is important for USN applications. ZnO nanowires are synthesized onto the micro-hotplate by a simple hydrothermal process and are patterned by a lift-off to form the gas sensor. The sensor was operated at $200^{\circ}C$ and showed a good response to 100 ppb $NO_2$ gas.

• 한국재료학회지
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• 제34권5호
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• pp.235-241
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• 2024

Gas identification techniques using pattern recognition methods were developed from four micro-electronic gas sensors for noxious gas mixture analysis. The target gases for the air quality monitoring inside vehicles were two exhaust gases, carbon monoxide (CO) and nitrogen oxides (NO_x), and two odor gases, ammonia (NH₃) and formaldehyde (HCHO). Four MEMS gas sensors with sensing materials of Pd-SnO₂ for CO, In₂O₃ for NO_X, Ru-WO₃ for NH₃, and hybridized SnO₂-ZnO material for HCHO were fabricated. In six binary mixed gas systems with oxidizing and reducing gases, the gas sensing behaviors and the sensor responses of these methods were examined for the discrimination of gas species. The gas sensitivity data was extracted and their patterns were determined using principal component analysis (PCA) techniques. The PCA plot results showed good separation among the mixed gas systems, suggesting that the gas mixture tests for noxious gases and their mixtures could be well classified and discriminated changes.

• 센서학회지
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• 제17권2호
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• pp.147-150
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• 2008

Multiple ZnO nanorod device detecting $NO_2$ gas was fabricated by sol-gel growth method and gas response characteristics were measured as a chemical gas sensor. The device is mainly composed of sensing electrode and sensing nano material. To acquire high sensitivity of the device for $NO_2$ gas it was heated by a heat chuck up to $400^{\circ}C$ The sensing part was easily made using the CMOS compatible process, for example, the large area and low temperature nano material growth process, etc. The sensors were successfully demonstrated and showed high sensitive response for $NO_2$ gas sensing.

• 센서학회지
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• 제24권1호
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• pp.29-34
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• 2015

This study aimed to evaluate the characterization of a metal oxide semiconductor and electrochemical gas sensor array for measuring wastewater odor. The sensitivity of all gas sensors observed in sampling method by stripping was 6.7 to 20.6 times higher than that by no stripping, except sensor D (electrochemical gas sensor). The average reduction ratio of sensor signal as a function of initial dilution rate of wastewater was in the order of food plant > food waste reutilization facility > plating plant. The sensitivity of gas sensors was dependent on both the type of wastewater and the dilution rate. The sensor signals observed by the gas sensor array were correlated with the dilution factor (OU) calculated by the air dilution sensory test with several wastewater ($r^2=0.920{\sim}0.997$), except the sensor signals of sensor D measured in the plating plant wastewater. It seems likely that the gas sensor array plays a role in the evaluation of odor in wastewater and is useful tool for on-site odor monitoring in the wastewater facilities.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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• pp.273.1-273.1
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• 2016

Graphene exhibits a number of unique properties that make it an intriguing candidate for use in sensor. Here, we report graphene-based gas sensor. Graphene was grown using CVD. Then, the sensor was made using standard lithography techniques. The sensor conductance increased upon exposure to NH3, whereas it decreased upon NO2, suggesting that NH3 and NO2 might be discriminated using the graphene-based sensor. To improve the sensitivity, graphene was treated with hydrogen plasma. After hydrogen treatment, the electrical properties of graphene changed from ambipolar to p-type semiconductors. In addition, the sensor performance was improved probably due to an opening of bandgap.

• 센서학회지
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• 제32권3호
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• pp.147-153
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• 2023

Metal-organic frameworks (MOFs) of cobalt gallate were synthesized and deposited on gold electrodes using self-assembly monolayers (SAMs) and hydrothermal processing. These MOF films exhibit strong adsorption capabilities for gaseous particulates, and the use of SAMs allows the synthesis and deposition processes to be completed in a single step. When cobalt gallate is mixed with SAMs, a coordination bond is formed between the cobalt ion and the carboxylate or hydroxyl groups of the SAMs, particularly under hydrothermal conditions. Additionally, the quartz crystal microbalance (QCM) gas sensor accurately measures the number of particulates adsorbed on the MOF films in real-time. Thus, the QCM gas sensor is a valuable tool for quantitatively measuring gases, such as SO₂, NO₂, and CO₂. Furthermore, the QCM MOF film gas sensor was more effective for gas adsorption than the MOF particles alone and allowed the accurate modeling of gas adsorption. Moreover, the QCM MOF films accurately detect the adsorption-desorption mechanisms of SO₂ and NO₂, which exist as gaseous particulate matter, at specific gas concentrations.

• 센서학회지
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• 제17권1호
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• pp.35-40
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• 2008

Low power bridge type micro gas sensors were fabricated by micro machining technology with TMAH (Tetra Methyl Ammonium Hydroxide) solution. The sensing devices with different heater materials such as metal and poly-silicon were obtained using CMOS (Complementary Metal Oxide Semiconductor) compatible process. The tellurium films as a sensing layer were deposited on the micro machined substrate using shadow silicon mask. The low power micro gas sensors showed high sensitivity to NO with high speed. The pure tellurium film used micro gas sensor showed good sensitivity than transition metal (Pt, Ti) used tellurium film.

• 한국가스학회지
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• 제14권4호
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• pp.56-62
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• 2010

본 논문은 LPG 엔진의 전자제어센서에 대한 고장사례를 분석하고 고찰한 연구이다. LP가스의 연료 분사량을 컨트롤하는 크랭크 각도센서의 기능이상은 불규칙하고 불균일한 파형형태로 나타나고 있다. 크랭크 각도센서의 노이즈에 관련된 파형은 톱니형의 불규칙한 피크형상으로 나타났고, 2.46V 정도의 노이즈 레벨이 간헐적으로 발생하고 있다. 1번 TDC센서의 내부불량으로 인해 발생한 고장사례는 엔진의 출력을 떨어뜨리고 시동을 간헐적으로 꺼지게 하는 문제점을 초래한다. 산소센서의 성능이상은 센서의 배선에서 연결이 단절되었기 때문에 발생한 것으로 차량의 울컥거리는 현상과 엔진의 부조화 현상이 나타나고 있다. 에어 크리너를 이종품으로 사용한 경우는 신기가 정상적으로 공급되지 못했기 때문에 차량의 가속불량과 엔진의 부조화 현상이 발생하는 원인으로 작용하고 있었다.

• Carbon letters
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• 제20권
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• pp.19-25
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• 2016

Activated carbon fiber (ACF) surfaces are modified using an electron beam under different aqueous solutions to improve the NO gas sensitivity of a gas sensor based on ACFs. The oxygen functional group on the ACF surface is changed, resulting in an increase of the number of non-carbonyl (-C-O-C-) groups from 32.5% for pristine ACFs to 39.53% and 41.75% for ACFs treated with hydrogen peroxide and potassium hydroxide solutions, respectively. We discover that the NO gas sensitivity of the gas sensor fabricated using the modified ACFs as an electrode material is increased, although the specific surface area of the ACFs is decreased because of the recovery of their crystal structure. This is attributed to the static electric interaction between NO gas and the non-carbonyl groups introduced onto the ACF surfaces.

• 한국표면공학회지
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• 제47권6호
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• pp.297-302
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• 2014

ZnS nanowires were synthesized in order to investigate $NO_2$ gas sensing properties. They were grown on the sapphire substrate using ZnS powders. SEM (scanning electron microscopy) showed the diameter and length of the ZnS nanowires were approximately in the range of 50 - 100 nm and a few $10s\;{\mu}m$, respectively. They were also found to be composed of Wurtzite- structured single crystals from TEM (transmission electron microscopy) analysis. $NO_2$ gas sensing performance of the ZnS nanowire was measured with electrical resistance changes caused by $NO_2$ gas with a concentration of 1-5ppm. The sensor was UV treated with an intensity of $1.2mW/cm^2$ to facilitate charge carrier transfer. The responses of the ZnS nanowires to the $NO_2$ gas at room temperature, treated with UV of two different wavelengths of 365 nm and 254 nm, are measured to be 124.53 - 206.87 % and 233.97 - 554.83%, respectively. In the current work, the effect of UV treatment on the gas sensing performance of the ZnS nanowires was studied. And the underlying mechanism for the electrical resistance changes of the ZnS nanowires by $NO_2$ gas was also discussed.