Korean Journal of Materials Research (한국재료학회지)

Materials Research Society of Korea (한국재료학회)
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Identification of Gas Mixture with the MEMS Sensor Arrays by a Pattern Recognition

  • Bum-Joon Kim (Department of Materials Science and Engineering, University of Seoul) ;
  • Jung-Sik Kim (Department of Materials Science and Engineering, University of Seoul)
  • Received : 2024.03.26
  • Accepted : 2024.04.23
  • Published : 2024.05.27
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Abstract

Gas identification techniques using pattern recognition methods were developed from four micro-electronic gas sensors for noxious gas mixture analysis. The target gases for the air quality monitoring inside vehicles were two exhaust gases, carbon monoxide (CO) and nitrogen oxides (NOx), and two odor gases, ammonia (NH3) and formaldehyde (HCHO). Four MEMS gas sensors with sensing materials of Pd-SnO2 for CO, In2O3 for NOX, Ru-WO3 for NH3, and hybridized SnO2-ZnO material for HCHO were fabricated. In six binary mixed gas systems with oxidizing and reducing gases, the gas sensing behaviors and the sensor responses of these methods were examined for the discrimination of gas species. The gas sensitivity data was extracted and their patterns were determined using principal component analysis (PCA) techniques. The PCA plot results showed good separation among the mixed gas systems, suggesting that the gas mixture tests for noxious gases and their mixtures could be well classified and discriminated changes.

Keywords

Acknowledgement

This work was supported by the 2023 sabbatical year research grant of the University of Seoul.

References

  1. N. E. Barbri, J. Mirhisse, R. Ionescu, N. E. Bari, X. Correig, B. Bouchikhi and E. Llobet, Sens. Actuators, B, 141, 538 (2009).
  2. L. Xu, J. Zhao, Y. Wang, Y. Hu, L. Yao, C. Zheng, J. Yang and X. Gao, J. Electrochem. Soc., 170, 037522 (2023).
  3. J. Chu, W. Li, X. Yang, Y. Wu, D. Wang, A. Yang, H. Yuan, X. Wang, Y. Li and M. Rong, Sens. Actuators, B, 329, 129090 (2021).
  4. S. Singh, S. Sajana, P. Varma, G. Sreelekha, C. Adak, R. Shukla and V. Kamble, Microchim. Acta, 191, 196 (2024).
  5. M. Niculescu, C. Nistor, I. Frebort, P. Pec, B. Mattiasson and E. Csoregi, Anal. Chem., 72, 1591 (2000).
  6. G. Volpe and M. Mascin, Talanta, 43, 283 (1996).
  7. M. A. Carsol and M. Mascini, Talanta, 47, 335 (1998).
  8. G. Olafsdottir, E. Martinsdottir and E. H. Jonsson, J. Agric. Food Chem., 45, 2654 (1997).
  9. Z. P. Deng, D. C. Stone and M. Thompson, Analyst, 121, 671 (1996).
  10. C. Qu, C. Liu, Y. Gu, S. Chai, C. Feng and B. Chen, Sens. Actuators, B, 360, 131652 (2022).
  11. A. V. Shaposhnik, P. V. Moskalev, K. L. Chegereva, A. A. Zviagin and A. A. Vasiliev, Sens. Actuators, B, 334, 129376 (2021).
  12. Q. Zhang, S. Zhang, C. Xie, C. Fan and Z. Bai, Sens. Actuators, B, 128, 586 (2008).
  13. S. Tanga, W. Chena, L. Jina, H. Zhanga, Y. Lib, Q. Zhouc and W. Zen, Sens. Actuators, B, 312, 127998 (2020).
  14. G. Kamarchuk, A. Pospelov, L. Kamarchuk, V. Belan, A. Herus, A. Savytskyi, V. Vakula, D. Harbuz, V. Gudimenko and E. Faulques, Sci. Rep., 13, 21432 (2023).
  15. S. Braun, A. Kobald, A. Oprea, I. Boehme, P. Bonanati, U. Weimar and N. Barsan, Sens. Actuators, B, 352, 131027 (2022).
  16. S. Buratti, D. Ballabio and S. Benedetti, Food Chem., 100, 211 (2007).
  17. D. Zhao, Y. Zhang, D. Kong, Q. Chen and H. Lin, Procedia Eng., 29, 2252 (2012).
  18. H. Yu and J. Wang, Sens. Actuators, B, 122, 134 (2007).
  19. B. J. Kim and J.-S. Kim, Mater. Chem. Phys., 138, 366 (2013).
  20. B. J. Kim, H. J. Lee, J. H. Yoon and J.-S. Kim, Sens. Lett., 10, 1 (2012).
  21. J.-S. Kim, Korean J. Mater. Res., 33, 195 (2023).
  22. J.-H. Yoon and J.-S. Kim, Solid State Ionics, 192, 668 (2011).
  23. M. Breedon, P. Spizzirri, M. Taylor, J. du Plessis, D. McCulloch, J. Zhu, L. Yu, Z. Hu, C. Rix, W. Wlodarski and K. Kalantar-zadeh, Cryst. Growth Des., 10, 430 (2010).