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http://dx.doi.org/10.5369/JSST.2008.17.2.147

The highly sensitive NO2 gas sensor using ZnO nanorods grown by the sol-gel method  

Park, S.J. (IT Convergence Component Lab., ETRI)
Kwak, J.H. (IT Convergence Component Lab., ETRI)
Park, J. (IT Convergence Component Lab., ETRI)
Lee, H.Y. (IT Convergence Component Lab., ETRI)
Moon, S.E. (IT Convergence Component Lab., ETRI)
Park, K.H. (IT Convergence Component Lab., ETRI)
Kim, J. (IT Convergence Component Lab., ETRI)
Kim, G.T. (Korea University)
Publication Information
Journal of Sensor Science and Technology / v.17, no.2, 2008 , pp. 147-150 More about this Journal
Abstract
Multiple ZnO nanorod device detecting $NO_2$ gas was fabricated by sol-gel growth method and gas response characteristics were measured as a chemical gas sensor. The device is mainly composed of sensing electrode and sensing nano material. To acquire high sensitivity of the device for $NO_2$ gas it was heated by a heat chuck up to $400^{\circ}C$ The sensing part was easily made using the CMOS compatible process, for example, the large area and low temperature nano material growth process, etc. The sensors were successfully demonstrated and showed high sensitive response for $NO_2$ gas sensing.
Keywords
ZnO nanorod; the sol-gel method$NO_2$ gas sensing;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
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