• 한국재료학회지
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• 제34권5호
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• pp.235-241
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• 2024

Gas identification techniques using pattern recognition methods were developed from four micro-electronic gas sensors for noxious gas mixture analysis. The target gases for the air quality monitoring inside vehicles were two exhaust gases, carbon monoxide (CO) and nitrogen oxides (NO_x), and two odor gases, ammonia (NH₃) and formaldehyde (HCHO). Four MEMS gas sensors with sensing materials of Pd-SnO₂ for CO, In₂O₃ for NO_X, Ru-WO₃ for NH₃, and hybridized SnO₂-ZnO material for HCHO were fabricated. In six binary mixed gas systems with oxidizing and reducing gases, the gas sensing behaviors and the sensor responses of these methods were examined for the discrimination of gas species. The gas sensitivity data was extracted and their patterns were determined using principal component analysis (PCA) techniques. The PCA plot results showed good separation among the mixed gas systems, suggesting that the gas mixture tests for noxious gases and their mixtures could be well classified and discriminated changes.

• 센서학회지
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• 제29권6호
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• pp.388-393
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• 2020

In this study, a PbS quantum dots (QDs)-based H₂ gas sensor with a Pd electrode was proposed. QDs have a size of several nanometers, and they can exhibit a high surface area when forming a thin film. In particular, the NH₂ present in the ligand of PbS QDs and H₂ gas are combined to form NH₃⁺, subsequently the electrical characteristics of the QDs change. In addition to the resistance change owing to the reaction between Pd and H₂ gas, the resistance change owing to the reaction between the NH₂ of PbS QDs and H₂ gas increases the current signal at the sensor output, which can produce a high output signal for the same concentration of H₂ gas. Using the XRD and absorbance properties, the synthesis and particle size of the synthesized PbS QDs were analyzed. Using PbS QDs, the sensitivity was significantly improved by 44%. In addition, the proposed H₂ gas sensor has high selectivity because it has low reactivity with heterogeneous gases such as C₂H₂, CO₂, and CH₄.

• International Journal of Automotive Technology
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• 제4권1호
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• pp.9-19
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• 2003

Exhaust emissions were characterized for a fleet of 10 alternative-fuel vehicles (AFVx) including 5 compressed natural gas (CNG) vehicles. 3 liquefied petroleum gas (LPG) vehicles and 2 85% methanol/15% California Phase 2 gasoline (M85) vehicles. In addition to the standard regulated emissions and detailed speciation of organic gas compounds, Fourier Transform Infrared Spectroscopy (FTIR) was used to measure ammonia (NH$_3$) and nitrous oxide ($N_2$O) emissions. NH$_3$, emissions averaged 0.124 g/mi for the vehicle fleet with a range from <0.004 to 0.540 g/mi. $N_2$O emissions averaged 0.022 g/mi over the vehicle fleet with range from <0.002 to 0.077 g/mi. Modal emissions showed that both NH$_3$, and $N_2$O emissions began during catalyst light-off and continued as the catalyst reached its operating temperature. $N_2$O emissions primarily were formed during the initial stages of catalyst light-off. Detailed speciation measurements showed that the principal component of the fuel was also the primary organic gas species found in the exhaust. In particular, methane, propane and methanol composed on average 93%, 79%, and 75% of the organic gas emissions, respectively, for the CNG, LPG. and M85 vehicles.

• 한국표면공학회지
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• 제38권5호
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• pp.202-206
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• 2005

Nitriding treatments were conducted on tool steel (SKD 61) at a temperature of $500^{\circ}C$ for 5 hr using high vacuum direct current (DC) plasma, with ammonia and argon as source gases. The structural and compositional changes produced in the nitrided layers by applying different ratios of Ar to $NH_{3}\;(n_{Ar}/n_{NH3}) were investigated using glancing x-ray diffraction (GXRD), optical microscopy, atomic force microscopy (AFM), micro-Vickers hardness testing, and pin-on-disc type tribometer. Nitriding case depths of around of $50{\mu}m$ were produced, varying slightly with different ratios of $n_{Ar}/n_{NH3}. It was found that the specimen surface hardness was 1150 Hv with $n_{Ar}/n_{NH3}=1, increasing to a maximum value of 1500 Hv with $n_{Ar}/n_{NH3}=5. With a further increase in ratio to $n_{Ar}/n_{NH3}=10, the surface hardness of the specimen reduced slightly to a value of 1370 Hv. These phenomena were caused by changes of the crystallographic structure of the nitride layers, i.e the $\gamma'-Fe_{4}N$ phase only was observed in the sample treated with $n_{Ar}/n_{NH3}$=1, and the intensity of the $\gamma'-Fe_{4}N$ phase were reduced but new phase of $\varepsilon'-Fe_{3}N$, which was known as a high hardness, with increasing $n_{Ar}/n_{NH3}. Also, the relative weight loss of counterface of the pin-on-disc with unnitrided steel was 0.2. And that of nitrided steel at a gas mixture ($n_{Ar}/n_{NH3}) of 1, 5, 7, and 10 was 0.4, 0.7, 0.6, and 0.5 mg, respectively. This means that the wear resistance of the nitrided samples could be increased by a factor of 2 at least than that of unnitrided steel.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2007년도 추계학술대회 논문집
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• pp.116-116
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• 2007

We investigated the characteristics of the Hafnium silicate (Hf-silicate) film which is grown by ALD (atomic layer deposition). The Hf-silicate films that were annealed by the RTP. The physical and electrical properties of nitrided Hf-silicate films, incorporated by NO gas and $NH_3$ gas annealing, were investigated by XPS, TEM and I-V measurement. We confirmed the nitrogen incorporation during NO gas annealing treatment effectively enhances the thermal stability of Hf-silicate. The tendency of nitnitridation in NO gas and $NH_3$ is different. Leakage current is improved in post NO gas annealing.

• 한국대기환경학회지
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• 제23권6호
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• pp.744-751
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• 2007

Wet scrubber is widely used to remove toxic gaseous contaminants in various industries such as semi-conductor industry, display manufacturing industry and so on. In this study, to optimize a packed bed scrubber as one of typical wet scrubber size while keeping its performance, four different packing materials were investigated at different air flow rates, liquid-gas ratios and pH values. Ammonia, hydrochloric acid and hydrofluoric acid were used as test gases to characterize the scrubber performance. Gas removal efficiency increased as the packing size decreased, which resulted in the increase of specific surface area. The increase of air flow rate led to the decrease of gas removal efficiency, while the increase of liquid-gas ratio led to the increase of gas removal efficiency. For the case of $NH_3$ gas, lower pH, and for the cases of HCl and HF, higher pH contributed to higher gas removal efficiency. Gas removal efficiency of a wet scrubber increased in the order of HCl < $NH_3$ < HF according to its water solubility.

• 대한환경공학회지
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• 제33권5호
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• pp.368-377
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• 2011

소규모의 대기오염 배출원으로부터 질소산화물을 저감하는 방법으로 제안된 패키지형 SCR (selective catalytic reduction) 시스템 내에서 암모니아 농도제어에 관한 연구가 시행되었다. SCR 시스템의 효율은 촉매층의 효율적인 활용에 좌우되며 촉매층의 효율적인 사용은 시스템에 유입되는 배기가스의 유동균일도와 암모니아 농도의 균일도에 의해 좌우된다. 본 연구에서는 주어진 최적의 유동조건에서 SCR 시스템 내에 배치된 AIG 형상과 분사 유량 조정에 따른 암모니아 농도분포를 평가하였다. 기본 유동조건에서 분사구의 각도에 따른 전산해석 결과, 배가스 유동에 대해 동류방향($0^{\circ}$)으로 암모니아를 분사한 경우의 농도분포의 RMS(%) 수치는 약 95.3%, 대향방향인 $120^{\circ}$의 각도를 가지는 경우 90.1%로 파악되어 대향방향으로의 분사가 더 효율적인 것으로 파악되었다. 유동박리영역에서 벗어나도록 분사구의 위치를 변경하고 기초계산에서의 속도분포와 농도분포를 기준으로 환원제 유량을 조정한 결과 RMS(%) 수치를 최대 62.8%까지 하강시키는 효과를 가져왔다. AIG 형상 및 배치구조에 혼합증진의 효과를 정리하였다.

• Korean Chemical Engineering Research
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• 제45권3호
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• pp.258-263
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• 2007

배가스 이산화탄소 처리를 위한 화학적 흡수공정의 새로운 흡수제로서 암모니아수의 적용 가능성을 고찰하였다. 이산화탄소 흡수용량과 침전 발생의 관점에서 적합한 암모니아수 흡수제 농도와 $CO_2$ 부하(loading, $molCO_2/molNH_3$)를 결정하였다. 이를 위하여 전해액에 대한 Pitzer 모델을 이용하여 암모니아 흡수제 농도에 따른 흡수용량과 침전 발생여부를 계산하였다. $5\;molNH_3/kgH_2O$ 이상의 암모니아수 흡수제를 사용하여 기존 아민류 흡수제 이상의 흡수용량은 얻을 수 있었다. 각 암모니아 흡수제 농도에서 $NH_4HCO_3$ 침전의 발생으로 인하여 조업이 제약되는 $CO_2$ 부하를 구하였다. $5{\sim}14\;molNH_3/kgH_2O$의 암모니아 흡수제는 293, 313 K에서 $CO_2$ 부하 0.5 이상에서 침전이 발행하였다. 침전 생성 $CO_2$ 부하값 이하로 흡수탑을 조업함으로써 고농도 암모니아 흡수제가 배가스 $CO_2$ 처리 공정에 사용될 수 있음을 알 수 있었다. 흡수용량과 침전발생을 고려하여 배가스 이산화탄소 처리를 위한 흡수제 최적온도는 암모니아수 농도에 따라 297~312 K이었다.

• 한국태양에너지학회:학술대회논문집
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• 한국태양에너지학회 2011년도 추계학술발표대회 논문집
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• pp.154-157
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• 2011

Hydrogenated silicon nitride deposited by LF-PECVD is commonly used for anti-reflection coating and passivation in silicon solar cell fabrication. The deposition of the optimized silicon nitride on the surface is elemental in crystalline silicon solar cell. In this work, the carrier lifetimes were measured while the thicknesses of $SiN_x$ were changed from 700 ${\AA}$ to 1150 ${\AA}$ with the gas flow of $SiH_4$ as 40 sccm and $NH_3$ as 120 sccm,. The carrier lifetime enhanced as the thickness of $SiN_x$ increased due to improved passivation effect. To study the characteristics of $SiN_x$ with various gas ratios, the gas flow of $NH_3$ was changed from 40 sccm to 200 sccm with intervals of 40 sccm. The thickness of $SiN_x$ was fixed as 1000 ${\AA}$ and the gas flow of $SiH_4$ as 40 sccm. The refractive index of SiNx and the carrier lifetime were measured before and after heat treating at $650^{\circ}C$ to investigate their change by the firing process in solar cell fabrication. The index of refraction of SiNx decreased as the gas ratios increased and the longest carrier lifetime was measured with the gas ratio $NH_3/SiH_4$ of 3.

• 산업기술연구
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• 제18권
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• pp.249-258
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• 1998

In this paper, we investigated the post-combustion removal of nitrogen oxide($NO_x$) and sulfur oxide($SO_x$) which is based on the gas to particle conversion process by the pulsed corona discharge. Under normal pressure, the pulsed corona discharge produces the energetic free electrons which dissociate gas molecules to form the active radicals. These radicals cause the chemical reactions that convert $SO_x$ and $NO_x$ into acid mists and these mists react with $NH_3$ to form solid particles. Those particles can be removed from the gas stream by conventional devices such as electrostatic precipitator or bag filter. The reactor geometry was coaxial with an inner wire discharge electrode and an outer ground electrode wrapped on a glass tube. The simulated flue gas with $SO_x$ and $NO_x$ was used in the experiment. The corona discharge reactor was more efficient in removing $SO_x$ and $NO_x$ by adding $NH_3$ and $H_2O$ in the gas stream. We also measured the removal efficiency of $SO_x$ and $NO_x$ in a cylinder type corona discharge reactor and obtained more than 90 % of removal efficiency in these experimental conditions. The effects of process variables such as the inlet concentrations of $SO_x$, $NH_3$ and $H_2O$, residence time, pulse frequencies and applied voltages were investigated.