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Dual-frequency $CH_2F_2/H_2/Ar$ capacitively coupled plasma를 이용한 실리콘질화물과 ArF PR의 무한 선택비 식각 공정 (Infinite Selectivity Etching Process of Silicon Nitride to ArF PR Using Dual-frequency $CH_2F_2/H_2/Ar$ Capacitively Coupled Plasmas)

  • 박창기;이춘희;김희대;이내응
    • 한국표면공학회지
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    • 제39권3호
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    • pp.137-141
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    • 2006
  • Process window for infinite etch selectivity of silicon nitride $(Si_3N_4)$ layers to ArF photoresist (PR) was investigated in dual frequency superimposed capacitive coupled plasma (DFS-CCP) by varying the process parameters such as low frequency power $(P_{LF})$, $CH_2F_2$ and $H_2$ flow rate in $CH_2F_2/H_2/Ar$ plasma. It was found that infinite etch selectivities of $Si_3N_4$ layers to the ArF PR on both blanket and patterned wafers can be obtained for certain gas flow conditions. The etch selectivity was increased to the infinite values as the $CH_2F_2$ flow rate increases, while it was decreased from the infinite etch selectivity as the $H_2$ flow rate increased. The preferential chemical reaction of the hydrogen with the carbon in the polymer film and the nitrogen on the $Si_3N_4$ surface leading to the formation of HCN etch by-products results in a thinner steady-state polymer and, in turn, to continuous $Si_3N_4$ etching, due to enhanced $SiF_4$ formation, while the polymer was deposited on the ArF photoresist surface.

CHARACTERIZATIONS OF THE EXPONENTIAL DISTRIBUTION BY ORDER STATISTICS AND CONDITIONAL

  • Lee, Min-Young;Chang, Se-Kyung;Jung, Kap-Hun
    • 대한수학회논문집
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    • 제17권3호
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    • pp.535-540
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    • 2002
  • Let X$_1$, X$_2$‥‥,X$\_$n/ be n independent and identically distributed random variables with continuous cumulative distribution function F(x). Let us rearrange the X's in the increasing order X$\_$1:n/ $\leq$ X$\_$2:n/ $\leq$ ‥‥ $\leq$ X$\_$n:n/. We call X$\_$k:n/ the k-th order statistic. Then X$\_$n:n/ - X$\_$n-1:n/ and X$\_$n-1:n/ are independent if and only if f(x) = 1-e(equation omitted) with some c > 0. And X$\_$j/ is an upper record value of this sequence lf X$\_$j/ > max(X$_1$, X$_2$,¨¨ ,X$\_$j-1/). We define u(n) = min(j|j > u(n-1),X$\_$j/ > X$\_$u(n-1)/, n $\geq$ 2) with u(1) = 1. Then F(x) = 1 - e(equation omitted), x > 0 if and only if E[X$\_$u(n+3)/ - X$\_$u(n)/ | X$\_$u(m)/ = y] = 3c, or E[X$\_$u(n+4)/ - X$\_$u(n)/|X$\_$u(m)/ = y] = 4c, n m+1.

AlGaN/InGaN HEMTs의 고성능 초고주파 전류 특성 (DC and RF Characteristics of AlGaN/InGaN HEMTs Grown by Plasma-Assisted MBE)

  • 이종욱
    • 한국전자파학회논문지
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    • 제15권8호
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    • pp.752-758
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    • 2004
  • 본 논문에서는 MBE로 성장한 AlGaN/InGaN/GaN 에피층으로 제작된 GaN HEMTs의 특성을 분석하였다. 게이트 전극 길이가 0.5 $\mu$m로 제작된 소자는 비교적 평탄한 전류 전달 특성을 나타내었으며 최대 전류 880 mA/mm, 최대 전달정수 156 mS/mm, 그리고 $f_{r}$$f_{MAX}$는 각각 17.3 GHz와 28.7 GHz가 측정되었다. 또한 표면 처리되지 않은 AlGaN/InGaN/HEMT의 경우 기존의 AlGaN/GaN HEMT와는 달리 펄스 전류 동작 상태에서 전류 와해 현상(current collapse)이 발생하지 않음이 확인되었다. 이 연구 결과는 InGaN를 채널층으로 사용할 경우 표면에 존재하는 트랩에 의한 전류 와해 현상이 발생하지 않는 고성능, 고출력의 GaN HEMT를 제작할 수 있음을 보여준다....

Growth and Tissue Nutrient Responses of Fraxinus rhynchophylla, Fraxinus mandshurica, Pinus koraiensis, and Abies holophylla Seedlings Fertilized with Nitrogen, Phosphorus, and Potassium

  • Park, Byung-Bae;Byun, Jae-Kyong;Park, Pil-Sun;Lee, Soo-Won;Kim, Woo-Sung
    • 한국산림과학회지
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    • 제99권2호
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    • pp.186-196
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    • 2010
  • Fertilization increases the crop productivity and produces high quality seedlings for plantation. We quantitatively measured both physical performances and nutrient responses of Fraxinus rhynchophylla, Fraxinus mandshurica, Pinus koraiensis, and Abies holophylla seedlings, which are commercially planted species in Korea, to nitrogen, phosphorus, and potassium fertilization. We analyzed the growth performances by using Dickson's quality index (QI) and the nutrient status by using vector diagnosis. Nitrogen or phosphorus treatment increased height and root collar diameter growth of F. rhynchophylla and F. mandshurica, however, did not increase those of P. koraiensis and A. holophylla. The order of QI was N > P > K > control for F. rhynchophylla, P ${\geq}$ N > Control ${\geq}$ P for F. mandshurica, P > Control ${\geq}$ K > N for P. koraiensis and A. holophylla. In F. rhynchophylla, fertilization diluted N concentration in tissues by 5-25% because growth responses were higher than fertilization uptake. P. koraiensis and A. holophylla showed N excess showing "toxic accumulation". F. rhynchophylla and F. mandshurica showed P deficiency with P fertilization, however, P. koraiensis and A. holophylla showed "luxury accumulation". Vector diagnosis indicated that more fertilization was applicable for F. rhynchophylla and F. mandshurica, and high fertilization rates were inefficient for P. koraiensis and A. holophylla. Both QI and vector diagnosis can be applied to verify seedling quality in the light of growth responses and nutrient status in fertilization trials.

Long-term evaluations of teeth and dental implants during dental maintenance period

  • Yoon, Da-Le;Kim, Yong-Gun;Cho, Jin-Hyun;Lee, Jae-Mok;Lee, Sang-Kyu
    • The Journal of Advanced Prosthodontics
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    • 제9권3호
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    • pp.224-231
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    • 2017
  • PURPOSE. This study was designed to evaluate the teeth and dental implants during dental maintenance therapy over 3 years in different conditions after periodontal and dental prosthetic treatment. MATERIALS AND METHODS. 166 patients received maintenance therapy. 59 patients were treated with 2% minocycline-HCl ointment as local drug delivery (LDD) (L group) and 107 patients were treated without LDD (NL group). Clinical data was collected in maintenance period for evaluation. Patients were classified into groups depending on the application of LDD with maintenance therapy, the type of dental treatment before maintenance period (Pre-Tx), the frequency (F-MT), and regularity (R-MT) of maintenance therapy. RESULTS. The numbers of lost teeth (N-teeth, P=.003) and newly placed dental implants (N-implants, P=.022) are significantly different according to Pre-Tx. F-MT among patients who received surgical dental treatment before maintenance period showed statistical differences in N-teeth (P=.041), but not in N-implants (P=.564). All of the patients in L group showed high F-MT (F-MT1). In NL group, there were no statistical differences in N-teeth or N-implants according to F-MT or R-MT. In F-MT1 group, application of LDD made N-teeth significantly different from both Pre-Tx groups while no significant difference could be found in N-implant. Independent t-test and one-way ANOVA were selected for statistical analysis. CONCLUSION. The regular maintenance therapy and LDD can be effective for teeth during maintenance period. It is not only pharmacological efficacy in decreasing bacterial species that makes LDD a useful adjunct. Application of LDD also motivates patients to take adequate check-ups in the aspects of both frequency and regularity.

비정질 $Fe_{81}B_{13.5}_Si{3.5}C_2$ 리본의 중성자 조사에 따른 자기적 특성변화 (Effect of Neutron irradiation in $Fe_{81}B_{13.5}_Si{3.5}C_2$Amorphous Ribbon)

  • 김효철;홍권표;김철기;유성초
    • 한국자기학회지
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    • 제10권2호
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    • pp.49-52
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    • 2000
  • 비정질 F $e_{81}$ $B_{13.5}$S $i_{3.5}$ $C_2$리본에서 중성자 조사 후 X-선 회절, 상온에서의 자기이력곡선, 자화의 온도의존성 그리고 복소 투자율 측정하고, 결함에 의한 자기 특성과 관련하여 분석하였다. 중성자 조사량은 열 중성자( $n_{th}$)와 고속 중성자( $n_{f}$)가 각각 6.95$\times$$10^{18}$ $n_{th}$$cm^{-2}$ 과 4.56$\times$$10^{16}$ $n_{f}$$cm^{-2}$ 이었다. 중성자 조사된 시료의 X-선 회절상의 변화는 보이지 않았다. 중성자 조사 후, 복소 투자율의 자기이완특성에서 자벽운동에 의한 부분은 감소하였고, 자화회전에 의한 자기이완 주파수는 좀더 높은 주파수 영역으로 이동하였는데 , 이는 pinning력이 증가된 것을 반영한다. 자기이력곡선에서는 중성자 조사 후의 시료의 softness는 좋아지는 한편 포화자화값은 감소되는 것을 볼 수 있었으며, Curie 온도가 감소하는 결과가 나왔다. 자기 softness 향상은 자화회전에 의한 것이라 여겨진다.다.다.다.

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Identification of Tetrachloroethylene Sorption Behaviors in Natural Sorbents Via Sorption Models

  • Al Masud, Md Abdullah;Choi, Jiyeon;Shin, Won Sik
    • 한국지하수토양환경학회지:지하수토양환경
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    • 제27권6호
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    • pp.47-57
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    • 2022
  • A number of different methods have been used for modeling the sorption of volatile organic chlorinated compounds such as tetrachloroethylene/perchloroethylene (PCE). In this study, PCE was adsorbed in several natural sorbents, i.e., Pahokee peat, vermicompost, BionSoil®, and natural soil, in the batch experiments. Several sorption models such as linear, Freundlich, solubility-normalized Freundlich model, and Polanyi-Manes model (PMM) were used to analyze sorption isotherms. The relationship between sorption model parameters, organic carbon content (foc), and elemental C/N ratio was studied. The organic carbon normalized partition coefficient values (log Koc = 1.50-3.13) in four different sorbents were less than the logarithm of the octanol-water partition coefficient (log Kow = 3.40) of PCE due to high organic carbon contents. The log Koc decreased linearly with log foc and log C/N ratio, but increased linearly with log O/C, log H/C, and log (N+O)/C ratio. Both log KF,oc or log KF,oc decreased linearly with log foc (R2 = 0.88-0.92) and log C/N ratio (R2 = 0.57-0.76), but increased linearly with log (N+O)/C (R2 = 0.93-0.95). The log qmax,oc decreased linearly as log foc and log C/N increased, whereas it increased with log O/C, log H/C and log (N+O)/C ratios. The log qmax,oc increased linearly with (N+O)/C indicating a strong dependence of qmax,oc on the polarity index. The results showed that PCE sorption behaviors were strongly correlated with the physicochemical properties of soil organic matter (SOM).

PFOS salts 및 PFOS 대체물질에 대한 미생물분해시험 (Biodegradation test of the alternatives of perfluorooctanesulfonate (PFOS) and PFOS salts)

  • 최봉인;나숙현;손준효;신동수;유병택;정선용
    • 한국환경보건학회지
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    • 제42권2호
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    • pp.112-117
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    • 2016
  • Objectives: In this study, we investigated the biodegradation rates of 8 perfluorooctanesulfonate (PFOS) alternatives synthesized at the at Changwon National University in comparison to those of PFOS potassium salt and PFOS sodium salt. Methods: A biodegradability test was performed for 28 days with microorganisms cultured in the good laboratory practice laboratory at the Korea Environment Corporation following the OECD Guidelines for the testing of chemicals, Test No. 301 C Results: While $C_5H_8F_3SO_3K$, $C_8F_{17}SO_3K$ and $C_8F_{17}SO_3Na$ were not degraded after 28 days, the 3 alternatives were biodegraded at the rates of 31.4% for $C_8H_8F_9SO_3K$, 25.6% for $C_{10}H_8F_{13}SO_3K$, 23.6% for $C_{25}F_{17}H_{32}S_3O_{13}Na_3$, 20.9% for $C_{15}F_9H_{21}S_2O_8Na_2$, 15.5% for $C_{23}F_{18}H_{28}S_2O_8Na_2$, 8.5% for $C_{17}F_9H_{25}S_2O_8Na_2$ and 4.8% for $C_6H_8F_5SO_3K$. When the concentration was the same(500 mg/L), $C_{23}F_{18}H_{28}S_2O_8Na_2$ had the lowest tension with 20.94 mN/m, which was followed by $C_{15}F_9H_{21}S_2O_8Na_2$ (23.36 mN/m), $C_{17}F_9H_{25}S_2O_8Na_2$ (27.31 mN/m), $C_{25}F_{17}H_{32}S_3O_{13}Na_3$ (28.17 mN/m), $C_{10}H_8F_{13}SO_3K$ (29.77 mN/m) and $C_8H_8F_9SO_3K$ (33.89 mN/m). Having higher surface tension of 57.64 mN/m and 67.57 mN/m, respectively, than those of the two types of PFOS salts, $C_6H_8F_5SO_3K$ and $C_5H_8F_3SO_3K$ were found valueless as substitute for PFOS. Conclusion: The biodegradation test suggest that 6 compounds could be used as substitutes for PFOS. $C_{23}F_{18}H_{28}S_2O_8Na_2$ and $C_{15}F_9H_{21}S_2O_8Na_2$ were found to be the best substitutes based on biodegradation rate and surface tension, followed by $C_{25}F_{17}H_{32}S_3O_{13}Na_3$, $C_8H_8F_9SO_3K$ and $C_{10}H_8F_{13}SO_3K$. $C_{17}F_9H_{25}S_2O_8Na_2$ was found to have relatively low value as an alternative but it still had a potential to substitute the conventional PFOS.

MODIFIED KRASNOSELSKI-MANN ITERATIONS FOR NONEXPANSIVE MAPPINGS IN HILBERT SPACES

  • Naidu, S.V.R.;Sangago, Mengistu-Goa
    • Journal of applied mathematics & informatics
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    • 제28권3_4호
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    • pp.753-762
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    • 2010
  • Let K be a nonempty closed convex subset of a real Hilbert space H. Let T : K $\rightarrow$ K be a nonexpansive mapping with a nonempty fixed point set Fix(T). Let f : K $\rightarrow$ K be a contraction mapping. Let {$\alpha_n$} and {$\beta_n$} be sequences in (0, 1) such that $\lim_{x{\rightarrow}0}{\alpha}_n=0$, (0.1) $\sum_{n=0}^{\infty}\;{\alpha}_n=+{\infty}$, (0.2) 0 < a ${\leq}\;{\beta}_n\;{\leq}$ b < 1 for all $n\;{\geq}\;0$. (0.3) Then it is proved that the modified Krasnoselski-Mann iterative sequence {$x_n$} given by {$x_0\;{\in}\;K$, $y_n\;=\;{\alpha}_{n}f(x_n)+(1-\alpha_n)x_n$, $n\;{\geq}\;0$, $x_{n+1}=(1-{\beta}_n)y_n+{\beta}_nTy_n$, $n\;{\geq}\;0$, (0.4) converges strongly to a point p $\in$ Fix(T} which satisfies the variational inequality

    $\leq$ 0, z $\in$ Fix(T). (0.5) This result improves and extends the corresponding results of Yao et al[Y.Yao, H. Zhou, Y. C. Liou, Strong convergence of a modified Krasnoselski-Mann iterative algorithm for non-expansive mappings, J Appl Math Com-put (2009)29:383-389.

THE UNIQUENESS OF MEROMORPHIC FUNCTIONS WHOSE DIFFERENTIAL POLYNOMIALS SHARE SOME VALUES

  • MENG, CHAO;LI, XU
    • Journal of applied mathematics & informatics
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    • 제33권5_6호
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    • pp.475-484
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    • 2015
  • In this article, we deal with the uniqueness problems of meromorphic functions concerning differential polynomials and prove the following theorem. Let f and g be two nonconstant meromorphic functions, n ≥ 12 a positive integer. If fn(f3 - 1)f′ and gn(g3 - 1)g′ share (1, 2), f and g share ∞ IM, then f ≡ g. The results in this paper improve and generalize the results given by Meng (C. Meng, Uniqueness theorems for differential polynomials concerning fixed-point, Kyungpook Math. J. 48(2008), 25-35), I. Lahiri and R. Pal (I. Lahiri and R. Pal, Nonlinear differential polynomials sharing 1-points, Bull. Korean Math. Soc. 43(2006), 161-168), Meng (C. Meng, On unicity of meromorphic functions when two differential polynomials share one value, Hiroshima Math.J. 39(2009), 163-179).