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Infinite Selectivity Etching Process of Silicon Nitride to ArF PR Using Dual-frequency $CH_2F_2/H_2/Ar$ Capacitively Coupled Plasmas (Dual-frequency $CH_2F_2/H_2/Ar$ capacitively coupled plasma를 이용한 실리콘질화물과 ArF PR의 무한 선택비 식각 공정)

  • Park, Chang-Ki;Lee, Chun-Hee;Kim, Hui-Tae;Lee, Nae-Eung
    • Journal of the Korean institute of surface engineering
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    • v.39 no.3
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    • pp.137-141
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    • 2006
  • Process window for infinite etch selectivity of silicon nitride $(Si_3N_4)$ layers to ArF photoresist (PR) was investigated in dual frequency superimposed capacitive coupled plasma (DFS-CCP) by varying the process parameters such as low frequency power $(P_{LF})$, $CH_2F_2$ and $H_2$ flow rate in $CH_2F_2/H_2/Ar$ plasma. It was found that infinite etch selectivities of $Si_3N_4$ layers to the ArF PR on both blanket and patterned wafers can be obtained for certain gas flow conditions. The etch selectivity was increased to the infinite values as the $CH_2F_2$ flow rate increases, while it was decreased from the infinite etch selectivity as the $H_2$ flow rate increased. The preferential chemical reaction of the hydrogen with the carbon in the polymer film and the nitrogen on the $Si_3N_4$ surface leading to the formation of HCN etch by-products results in a thinner steady-state polymer and, in turn, to continuous $Si_3N_4$ etching, due to enhanced $SiF_4$ formation, while the polymer was deposited on the ArF photoresist surface.

CHARACTERIZATIONS OF THE EXPONENTIAL DISTRIBUTION BY ORDER STATISTICS AND CONDITIONAL

  • Lee, Min-Young;Chang, Se-Kyung;Jung, Kap-Hun
    • Communications of the Korean Mathematical Society
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    • v.17 no.3
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    • pp.535-540
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    • 2002
  • Let X$_1$, X$_2$‥‥,X$\_$n/ be n independent and identically distributed random variables with continuous cumulative distribution function F(x). Let us rearrange the X's in the increasing order X$\_$1:n/ $\leq$ X$\_$2:n/ $\leq$ ‥‥ $\leq$ X$\_$n:n/. We call X$\_$k:n/ the k-th order statistic. Then X$\_$n:n/ - X$\_$n-1:n/ and X$\_$n-1:n/ are independent if and only if f(x) = 1-e(equation omitted) with some c > 0. And X$\_$j/ is an upper record value of this sequence lf X$\_$j/ > max(X$_1$, X$_2$,¨¨ ,X$\_$j-1/). We define u(n) = min(j|j > u(n-1),X$\_$j/ > X$\_$u(n-1)/, n $\geq$ 2) with u(1) = 1. Then F(x) = 1 - e(equation omitted), x > 0 if and only if E[X$\_$u(n+3)/ - X$\_$u(n)/ | X$\_$u(m)/ = y] = 3c, or E[X$\_$u(n+4)/ - X$\_$u(n)/|X$\_$u(m)/ = y] = 4c, n m+1.

DC and RF Characteristics of AlGaN/InGaN HEMTs Grown by Plasma-Assisted MBE (AlGaN/InGaN HEMTs의 고성능 초고주파 전류 특성)

  • 이종욱
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • v.15 no.8
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    • pp.752-758
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    • 2004
  • This paper reports on the DC and RF characteristics of AlGaN/InGaN/GaN high electron-mobility transistors (HEMTs) grown by molecular beau epitaxy(MBE) on sapphire substrates. The devices with a 0.5 ${\mu}$m gate-length exhibited relatively flat transconductance(g$\_$m/), which results from the enhanced carrier confinement of the InGaN channel. The maximum drain current was 880 mA/mm with a peak g$\_$m/ of 156 mS/mm, an f$\_$T/ of 17.3 GHz, and an f$\_$MAX/ or 28.7 GHz. In addition to promising DC and RF results, pulsed I-V and current-switching measurements showed little dispersion in the unpassivated AlGaN/InGaN HEMTs. These results suggest that the addition of In to the GaN channel improves the electron transport characteristics as well as suppressing current collapse that is related to the surface trap states.

Growth and Tissue Nutrient Responses of Fraxinus rhynchophylla, Fraxinus mandshurica, Pinus koraiensis, and Abies holophylla Seedlings Fertilized with Nitrogen, Phosphorus, and Potassium

  • Park, Byung-Bae;Byun, Jae-Kyong;Park, Pil-Sun;Lee, Soo-Won;Kim, Woo-Sung
    • Journal of Korean Society of Forest Science
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    • v.99 no.2
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    • pp.186-196
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    • 2010
  • Fertilization increases the crop productivity and produces high quality seedlings for plantation. We quantitatively measured both physical performances and nutrient responses of Fraxinus rhynchophylla, Fraxinus mandshurica, Pinus koraiensis, and Abies holophylla seedlings, which are commercially planted species in Korea, to nitrogen, phosphorus, and potassium fertilization. We analyzed the growth performances by using Dickson's quality index (QI) and the nutrient status by using vector diagnosis. Nitrogen or phosphorus treatment increased height and root collar diameter growth of F. rhynchophylla and F. mandshurica, however, did not increase those of P. koraiensis and A. holophylla. The order of QI was N > P > K > control for F. rhynchophylla, P ${\geq}$ N > Control ${\geq}$ P for F. mandshurica, P > Control ${\geq}$ K > N for P. koraiensis and A. holophylla. In F. rhynchophylla, fertilization diluted N concentration in tissues by 5-25% because growth responses were higher than fertilization uptake. P. koraiensis and A. holophylla showed N excess showing "toxic accumulation". F. rhynchophylla and F. mandshurica showed P deficiency with P fertilization, however, P. koraiensis and A. holophylla showed "luxury accumulation". Vector diagnosis indicated that more fertilization was applicable for F. rhynchophylla and F. mandshurica, and high fertilization rates were inefficient for P. koraiensis and A. holophylla. Both QI and vector diagnosis can be applied to verify seedling quality in the light of growth responses and nutrient status in fertilization trials.

Long-term evaluations of teeth and dental implants during dental maintenance period

  • Yoon, Da-Le;Kim, Yong-Gun;Cho, Jin-Hyun;Lee, Jae-Mok;Lee, Sang-Kyu
    • The Journal of Advanced Prosthodontics
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    • v.9 no.3
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    • pp.224-231
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    • 2017
  • PURPOSE. This study was designed to evaluate the teeth and dental implants during dental maintenance therapy over 3 years in different conditions after periodontal and dental prosthetic treatment. MATERIALS AND METHODS. 166 patients received maintenance therapy. 59 patients were treated with 2% minocycline-HCl ointment as local drug delivery (LDD) (L group) and 107 patients were treated without LDD (NL group). Clinical data was collected in maintenance period for evaluation. Patients were classified into groups depending on the application of LDD with maintenance therapy, the type of dental treatment before maintenance period (Pre-Tx), the frequency (F-MT), and regularity (R-MT) of maintenance therapy. RESULTS. The numbers of lost teeth (N-teeth, P=.003) and newly placed dental implants (N-implants, P=.022) are significantly different according to Pre-Tx. F-MT among patients who received surgical dental treatment before maintenance period showed statistical differences in N-teeth (P=.041), but not in N-implants (P=.564). All of the patients in L group showed high F-MT (F-MT1). In NL group, there were no statistical differences in N-teeth or N-implants according to F-MT or R-MT. In F-MT1 group, application of LDD made N-teeth significantly different from both Pre-Tx groups while no significant difference could be found in N-implant. Independent t-test and one-way ANOVA were selected for statistical analysis. CONCLUSION. The regular maintenance therapy and LDD can be effective for teeth during maintenance period. It is not only pharmacological efficacy in decreasing bacterial species that makes LDD a useful adjunct. Application of LDD also motivates patients to take adequate check-ups in the aspects of both frequency and regularity.

Effect of Neutron irradiation in $Fe_{81}B_{13.5}_Si{3.5}C_2$Amorphous Ribbon (비정질 $Fe_{81}B_{13.5}_Si{3.5}C_2$ 리본의 중성자 조사에 따른 자기적 특성변화)

  • 김효철;홍권표;김철기;유성초
    • Journal of the Korean Magnetics Society
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    • v.10 no.2
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    • pp.49-52
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    • 2000
  • The changes of magnetic properties in neutron irradiated F $e_{81}$ $B_{13.5}$S $i_{3.5}$ $C_2$ amorphous ribbon were studied by X-ray diffraction, hysteresis loop, temperature dependence of magnetization and complex permeability. The fluences of thermal ( $n_{th}$) and fast ( $n_{f}$) neutron were 6.95$\times$10$^{18}$ $n_{th}$ c $m^{-2}$ and 4.56$\times$10$^{16}$ $n_{f}$c $m^{-2}$ , respectively. The changes of XRD Profiles were not observable at the neutron irradiated sample. The complex permeability spectra showed that the permeability from domain wall motion decreased due to the increase of pinning force against domain motion by the neutron irradiation, and the relaxation frequency of rotational magnetization moved to higher frequency region. The measurement of hysteresis loop showed the increase of magnetic softness, related to rotational magnetization, but saturation magnetization was decreased in neutron irradiation sample. The Curie temperature was decreased in the neutron irradiated sample.e.e.e.

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Identification of Tetrachloroethylene Sorption Behaviors in Natural Sorbents Via Sorption Models

  • Al Masud, Md Abdullah;Choi, Jiyeon;Shin, Won Sik
    • Journal of Soil and Groundwater Environment
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    • v.27 no.6
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    • pp.47-57
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    • 2022
  • A number of different methods have been used for modeling the sorption of volatile organic chlorinated compounds such as tetrachloroethylene/perchloroethylene (PCE). In this study, PCE was adsorbed in several natural sorbents, i.e., Pahokee peat, vermicompost, BionSoil®, and natural soil, in the batch experiments. Several sorption models such as linear, Freundlich, solubility-normalized Freundlich model, and Polanyi-Manes model (PMM) were used to analyze sorption isotherms. The relationship between sorption model parameters, organic carbon content (foc), and elemental C/N ratio was studied. The organic carbon normalized partition coefficient values (log Koc = 1.50-3.13) in four different sorbents were less than the logarithm of the octanol-water partition coefficient (log Kow = 3.40) of PCE due to high organic carbon contents. The log Koc decreased linearly with log foc and log C/N ratio, but increased linearly with log O/C, log H/C, and log (N+O)/C ratio. Both log KF,oc or log KF,oc decreased linearly with log foc (R2 = 0.88-0.92) and log C/N ratio (R2 = 0.57-0.76), but increased linearly with log (N+O)/C (R2 = 0.93-0.95). The log qmax,oc decreased linearly as log foc and log C/N increased, whereas it increased with log O/C, log H/C and log (N+O)/C ratios. The log qmax,oc increased linearly with (N+O)/C indicating a strong dependence of qmax,oc on the polarity index. The results showed that PCE sorption behaviors were strongly correlated with the physicochemical properties of soil organic matter (SOM).

Biodegradation test of the alternatives of perfluorooctanesulfonate (PFOS) and PFOS salts (PFOS salts 및 PFOS 대체물질에 대한 미생물분해시험)

  • Choi, Bong-In;Na, Suk-Hyun;Son, Jun-hyo;Shin, Dong-Soo;Ryu, Byung-taek;Chung, Seon-yong
    • Journal of Environmental Health Sciences
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    • v.42 no.2
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    • pp.112-117
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    • 2016
  • Objectives: In this study, we investigated the biodegradation rates of 8 perfluorooctanesulfonate (PFOS) alternatives synthesized at the at Changwon National University in comparison to those of PFOS potassium salt and PFOS sodium salt. Methods: A biodegradability test was performed for 28 days with microorganisms cultured in the good laboratory practice laboratory at the Korea Environment Corporation following the OECD Guidelines for the testing of chemicals, Test No. 301 C Results: While $C_5H_8F_3SO_3K$, $C_8F_{17}SO_3K$ and $C_8F_{17}SO_3Na$ were not degraded after 28 days, the 3 alternatives were biodegraded at the rates of 31.4% for $C_8H_8F_9SO_3K$, 25.6% for $C_{10}H_8F_{13}SO_3K$, 23.6% for $C_{25}F_{17}H_{32}S_3O_{13}Na_3$, 20.9% for $C_{15}F_9H_{21}S_2O_8Na_2$, 15.5% for $C_{23}F_{18}H_{28}S_2O_8Na_2$, 8.5% for $C_{17}F_9H_{25}S_2O_8Na_2$ and 4.8% for $C_6H_8F_5SO_3K$. When the concentration was the same(500 mg/L), $C_{23}F_{18}H_{28}S_2O_8Na_2$ had the lowest tension with 20.94 mN/m, which was followed by $C_{15}F_9H_{21}S_2O_8Na_2$ (23.36 mN/m), $C_{17}F_9H_{25}S_2O_8Na_2$ (27.31 mN/m), $C_{25}F_{17}H_{32}S_3O_{13}Na_3$ (28.17 mN/m), $C_{10}H_8F_{13}SO_3K$ (29.77 mN/m) and $C_8H_8F_9SO_3K$ (33.89 mN/m). Having higher surface tension of 57.64 mN/m and 67.57 mN/m, respectively, than those of the two types of PFOS salts, $C_6H_8F_5SO_3K$ and $C_5H_8F_3SO_3K$ were found valueless as substitute for PFOS. Conclusion: The biodegradation test suggest that 6 compounds could be used as substitutes for PFOS. $C_{23}F_{18}H_{28}S_2O_8Na_2$ and $C_{15}F_9H_{21}S_2O_8Na_2$ were found to be the best substitutes based on biodegradation rate and surface tension, followed by $C_{25}F_{17}H_{32}S_3O_{13}Na_3$, $C_8H_8F_9SO_3K$ and $C_{10}H_8F_{13}SO_3K$. $C_{17}F_9H_{25}S_2O_8Na_2$ was found to have relatively low value as an alternative but it still had a potential to substitute the conventional PFOS.

MODIFIED KRASNOSELSKI-MANN ITERATIONS FOR NONEXPANSIVE MAPPINGS IN HILBERT SPACES

  • Naidu, S.V.R.;Sangago, Mengistu-Goa
    • Journal of applied mathematics & informatics
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    • v.28 no.3_4
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    • pp.753-762
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    • 2010
  • Let K be a nonempty closed convex subset of a real Hilbert space H. Let T : K $\rightarrow$ K be a nonexpansive mapping with a nonempty fixed point set Fix(T). Let f : K $\rightarrow$ K be a contraction mapping. Let {$\alpha_n$} and {$\beta_n$} be sequences in (0, 1) such that $\lim_{x{\rightarrow}0}{\alpha}_n=0$, (0.1) $\sum_{n=0}^{\infty}\;{\alpha}_n=+{\infty}$, (0.2) 0 < a ${\leq}\;{\beta}_n\;{\leq}$ b < 1 for all $n\;{\geq}\;0$. (0.3) Then it is proved that the modified Krasnoselski-Mann iterative sequence {$x_n$} given by {$x_0\;{\in}\;K$, $y_n\;=\;{\alpha}_{n}f(x_n)+(1-\alpha_n)x_n$, $n\;{\geq}\;0$, $x_{n+1}=(1-{\beta}_n)y_n+{\beta}_nTy_n$, $n\;{\geq}\;0$, (0.4) converges strongly to a point p $\in$ Fix(T} which satisfies the variational inequality

    $\leq$ 0, z $\in$ Fix(T). (0.5) This result improves and extends the corresponding results of Yao et al[Y.Yao, H. Zhou, Y. C. Liou, Strong convergence of a modified Krasnoselski-Mann iterative algorithm for non-expansive mappings, J Appl Math Com-put (2009)29:383-389.

THE UNIQUENESS OF MEROMORPHIC FUNCTIONS WHOSE DIFFERENTIAL POLYNOMIALS SHARE SOME VALUES

  • MENG, CHAO;LI, XU
    • Journal of applied mathematics & informatics
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    • v.33 no.5_6
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    • pp.475-484
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    • 2015
  • In this article, we deal with the uniqueness problems of meromorphic functions concerning differential polynomials and prove the following theorem. Let f and g be two nonconstant meromorphic functions, n ≥ 12 a positive integer. If fn(f3 - 1)f′ and gn(g3 - 1)g′ share (1, 2), f and g share ∞ IM, then f ≡ g. The results in this paper improve and generalize the results given by Meng (C. Meng, Uniqueness theorems for differential polynomials concerning fixed-point, Kyungpook Math. J. 48(2008), 25-35), I. Lahiri and R. Pal (I. Lahiri and R. Pal, Nonlinear differential polynomials sharing 1-points, Bull. Korean Math. Soc. 43(2006), 161-168), Meng (C. Meng, On unicity of meromorphic functions when two differential polynomials share one value, Hiroshima Math.J. 39(2009), 163-179).