• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2006.06a
• /
• pp.573-574
• /
• 2006

The planarization technology of Chemical-mechanical polishing(CMP), used for the manufacturing of multi-layer various material interconnects for Large-scale Integrated Circuits (LSI), is also readily adaptable as an enabling technology in MicroElectroMechanical System (MEMS) fabrication, particularly polysilicon surface micromachining. However, general LSI device CMP has partly distinction aspects, the pattern scale and material sorts in comparison with MEMS CMP. This study performed preliminary CMP tests to identify slurry characteristic used in general IC device. The experiment result is possible to verify slurry characteristic in MEMS structure material.

• Steel and Composite Structures
• /
• v.52 no.3
• /
• pp.249-271
• /
• 2024

In this scientific work, an analytical solution for the dynamic analysis of cross-ply and angle-ply laminated composite plates is proposed. Due to technical issues during the manufacturing of composite materials, porosities and micro-voids can be produced within the composite material samples, which can carry on to a reduction in the density and strength of the materials. In this research, the laminated composite plates are assumed to have new distributions of porosities over the plate cross-section. The structure is modeled using a simple integral shear deformation theory in which the transverse shear deformation effect is included. The governing equations of motion are obtained employing the principle of Hamilton's. The solution is determined via Navier's approach. The Maple program is used to obtain the numerical results. In the numerical examples, the effects of geometry, ratio, modulus ratio, fiber orientation angle, number of layers and porosity parameter on the natural frequencies of symmetric and anti-symmetric laminated composite plates is presented and discussed in detail. Also, the impacts of the kinds of porosity distribution models on the natural frequencies of symmetric and anti-symmetric laminated composite plates are investigated.

• Journal of the Korean Society of Manufacturing Process Engineers
• /
• v.15 no.1
• /
• pp.26-33
• /
• 2016

In this study, a new method to develop a fixed diamond wire for silicon wafer machining by the multi-wire cutting method was developed. The new twist diamond wire has improved performance with high breaking strength and chip flutes structure. According to these characteristics, the new twist diamond wire can be used in the higher speed multi-wire cutting process with a long lifetime. Except the design of the new structure, the twist diamond wire is coating by electroless-electroplating process. It is good for reducing breakage and the falling-off of diamond grains. Based on the silicon material removal mechanism and performance of the wire-cutting machine, the optimal processing condition of the new twist diamond wire has been derived via mathematical analysis. At last, through the tensile testing and the machining experiments, the performance of the twist diamond wire has been obtained to achieve the development goals and exceed the single diamond wire.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
• /
• 2008.04a
• /
• pp.276-279
• /
• 2008

In order to measure sound transmission loss (STL) of a shipboard window of small size, a special partition is built into the test opening between two reverberation rooms and the specimen is placed in that partition. For high sound insulation, the filler wall often has multi-layered structure such as double-brick wall or buckhead structure with thick steel plate, absorptive material, and sandwich panels. This paper discusses the installation method of a multi-layered filler wall that consist of gypsum boards, lead plates, and glass wool. The experimental results of various wall structures are introduced. The comparison between the results show that the sound bridge effect plays a significant role in lowering the maximum STL of the filler wall. It is also found that the higher the sound insulation performance of the filler wall is, the more important the franking transmission through other side wall of the test facility is.

• Proceedings of the IEEK Conference
• /
• 2006.06a
• /
• pp.549-550
• /
• 2006

It has become topic continuously at MEMS or semiconductor process to form three-dimensional multilayer structure. In this paper, we devised the new polymer pattern method that has multilayer structure. This is method that uses different kind of polymeric material. Specially, polymers used in this study that we propose became all pattern by photolithography, prevented that process increases. Here, polymer that we use used polymer of epoxy order called "SU-8" and polymer of novolak resin called "AZ-1518". The result, "SU-8" was formed pattern to 3.5um thickness, and "AZ-1518" about pattern 3um thickness. Also, It was been 6um thickness at same pattern area.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2015.08a
• /
• pp.239.2-239.2
• /
• 2015

Graphene is a most interesting material due to its unique and outstanding properties. However, semi-metallic properties of graphene along with zero bandgap energy structure limit further application to optoelectronic devices. Recently, many researchers have shown that band gap can be induced in the Bernal stacked bilayer graphene. Several methods have been used for the controlled growth of the Bernal staked bilayer graphene, but it is still challenging to control the growth process. In this paper, we synthesize the large area Bernal stacked bilayer graphene using multi heating zone low pressure chemical vapor deposition (LPCVD). The synthesized bilayer graphenes are characterized by Raman spectroscopy, optical microscope (OM), scanning electron microscopy (SEM). High resolution transmission electron microscopy (HRTEM) is used for the observation of atomic resolution image of the graphene layers.

• Proceedings of the Materials Research Society of Korea Conference
• /
• 2011.05a
• /
• pp.54.1-54.1
• /
• 2011

Porous hydroxyapatite has been widely used as clinical implanted material. However, it has poor mechanical properties. To increase the strength as well as the biocompatibility of the porous HAp based artificial bone, it was fabricated by multi-extrusion process. Hydroxyapatite and graphite powders were mixed separately with ethylene vinely acetate and steric acid by shear mixing process. Hydroxyapatite composites containing porous microstructure were fabricated by arranging it in the die and subject it to extrusion process. Burn-out and sintering processes were performed to remove the binder and graphite as well as increase the density. The external and internal diameter of cylindrical hollow core were approximately 10.4 mm and 4.2 mm, respectively. The size of pore channel designed to increase bone growth (osteconduction) was around 150 ${\mu}m$ in diameter. X-ray diffraction analysis and SEM observation were performed to identity the crystal structure and the detailed microstructure, respectively.

• Structural Engineering and Mechanics
• /
• v.65 no.4
• /
• pp.465-476
• /
• 2018

This article investigates buckling behavior of a multi-phase nanocrystalline nanobeam resting on Winkler-Pasternak foundation in the framework of nonlocal couple stress elasticity and a higher order refined beam model. In this model, the essential measures to describe the real material structure of nanocrystalline nanobeams and the size effects were incorporated. This non-classical nanobeam model contains couple stress effect to capture grains micro-rotations. Moreover, the nonlocal elasticity theory is employed to study the nonlocal and long-range interactions between the particles. The present model can degenerate into the classical model if the nonlocal parameter, and couple stress effects are omitted. Hamilton's principle is employed to derive the governing equations and the related boundary conditions which are solved applying an analytical approach. The buckling loads are compared with those of nonlocal couple stress-based beams. It is showed that buckling loads of a nanocrystalline nanobeam depend on the grain size, grain rotations, porosities, interface, elastic foundation, shear deformation, surface effect, nonlocality and boundary conditions.

• Proceedings of the Korean Institute of Building Construction Conference
• /
• 2018.05a
• /
• pp.271-272
• /
• 2018

As the supply and demand of natural aggregate becomes more difficult in the domestic construction site continuously, many studies related to the recycled aggregate produced in the construction waste are going on. However, because of the safety and performance of the recycled aggregate, it is not used as aggregate for the structure, and it is mainly used as a nonstructural material. In addition, as the "recycled aggregate quality standard" has been revised in 2017, quality standards for various properties of recycled aggregate have been adjusted, and production technology suitable for recycled aggregate quality standards for concrete is needed. In this study, to improve the quality of recycled aggregate, we applied multistage wind pressure treatment method to the existing recycled aggregate production facility and compared the density, absorption rate, particle size before and after recycled aggregate treatment. As a result, quality criteria in various properties were analyzed satisfactorily.

• Steel and Composite Structures
• /
• v.20 no.3
• /
• pp.693-718
• /
• 2016

This paper presents a finite element procedure based on Bridging multi-scale method (BMM) in order to incorporate the effect of local/cross-sectional deformations (e.g., flange local buckling and web crippling) on the global behaviour of thin-walled members made of fibre-reinforced polymer composite laminates. This method allows the application of local shell elements in critical regions of an existing beam-type model. Therefore, it obviates the need for using computationally expensive shell elements in the whole domain of the structure, which is otherwise necessary to capture the effect of the localized behaviour. Consequently, highly accurate analysis results can be achieved with this method by using significantly smaller finite element model, compared to the existing methods. The proposed method can be used for composite polymer laminates with arbitrary fibre orientation directions in different layers of the material, and under various loading conditions. Comparison with full shell-type finite element analysis results are made in order to illustrate the efficiency and accuracy of the proposed technique.