• Title/Summary/Keyword: Multi-layer deposition

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Role of Detached Particles During Initial Filtration Phase (여과초기에서의 탈착된 입자의 거동)

  • Kim, Ja-Kyum;Tobiason, John E.
    • Journal of Korean Society of Water and Wastewater
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    • v.19 no.1
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    • pp.16-24
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    • 2005
  • Mathematical model was developed to verify a sequential particle removal taking place in a granular media gravity filter. Consequential multi-layer filtration cycle model was applied to verify the fraction of filter effluent particles that are filter influent particles that were never removed as well as the fraction of filter effluent particles that were detached after deposition were performed through laboratory experiments. Three sizes of marker particles were injected ahead of the filter column as a pulse in the presence of four sizes of polystyrene particles that were used as a primary source of particles in the raw suspension to investigate particle attachment alone in contrast to net removal from attachment and detachment. Microscopic counting of filter effluent particles was assumed to reflect attachment. Experimental results indicated that particle detachment is significant beginning from the early phase of filtration. For each size of fluorescent microspheres at one filter depth, fluorescent microsphere removal increased with filter runtime to a maximum due to ripening. The detached fraction of effluent particles increased with particle size and filter depth. The presence of detached particles and the increasing fraction of detached particles in deeper bed were confirmed.

Characterization of 0.5 % Ce-doped Ba($Zr_{0.2}Ti_{0.8}$)$O_3$ Thin Films Grown by RF Magnetron Sputtering Method (RF 마그네트론 스퍼터링법으로 성장시킨 0.5 % Ce-doped Ba($Zr_{0.2}Ti_{0.8}$)$O_3$(BCZT) 박막의 특성분석)

  • 최원석;박용섭;이준신;홍병유
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2002.07a
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    • pp.301-304
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    • 2002
  • We investigated the structural and electrical properties of Ce-doped Ba($Zr_{0.2}Ti_{0.8}$)$O_3$(BCZT) thin films with a mole fraction of x=0.2 and a thickness about 100 nm. BCZT films were prepared on Pt/Ti/$SiO_2$/Si substrate by a RF magnetron sputtering system. We have measured the thickness profile with Ar/$O_2$ ratio and the surface roughness. It was observed that the oxygen gas, which introduced during the film deposition, have an influence on the roughness of the film and the film roughness was reduced by annealing from 2.33 nm to 2.02 m (RMS at $500^{\circ}C$, Ar:6 scrim, $O_2$:6 sccm). We have found that annealing procedure after top electrode deposit can reduce the dissipation factor.

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non-polar a-plane GaN growth on r-plane sapphire substrate by MOCVD

  • Son, Ji-Su;Baek, Kwang-Hyun;Kim, Ji-Hoon;Song, Hoo-Young;Kim, Tae-Geun;Hwang, Sung-Min
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.08a
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    • pp.229-229
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    • 2010
  • We report a high crystalline nonpolar a-plane (11-20) GaN on r-plane (1-102) sapphire substrates with $+0.15^{\circ}$, $-0.15^{\circ}$, $+0.2^{\circ}$, $-0.2^{\circ}$ and $+0.4^{\circ}$ misoriented by metalorganic chemical-vapor deposition (MOCVD). The multi-quantum wells (MQWs) active region is consists of 5 periods the nonpolar a-plane InGaN/GaN (a-InGaN/GaN) on a high quality a-plane GaN (a-GaN) template grown by using the multibuffer layer technique. The full widths at half maximum (FWHMs) of x-ray rocking curve (XRC) obtained from phiscan of the specimen that was grown up to nonpolar a-plane GaN layers with double crystal x-ray diffraction. The FWHM values of $+0.4^{\circ}$ misoriented sapphire substrate were decreased down to 426 arc sec for $0^{\circ}$ and 531 arc sec for $-90^{\circ}$, respectively. Also, the samples were characterized by photoluminescence (PL).

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Fabrication process and device characterization of distributed feedback InGaAsP/InP laser diodes for optical fiber communication module (광통신 모듈용 분포 귀환형 InGaAsP/InP 레이저 다이오드 제작 및 소자 특성평가)

  • Jeon, Kyung-Nam;Kim, Keun-Joo
    • Journal of the Semiconductor & Display Technology
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    • v.10 no.4
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    • pp.131-138
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    • 2011
  • We fabricated distributed feedback InGaAsP/InP laser diodes for optical fiber communication module and characterized the lasing properties in continuous wave operation. The active layer of 7-period InGaAsP(1.127 eV)/InGaAsP(0.954 eV) multi-quantum well structure was grown by the metal-organic chemical vapor deposition. The grating for waveguide was also fabricated by the implementation of the Mach-Zehender holographic method of two laser beams interference of He- Cd laser and the fabricated laser diode has the dimension of the laser length of $400{\mu}m$ and the ridge width of $1.2{\mu}m$. The laser diode shows the threshold current of 3.59 mA, the threshold voltage of 1.059 V. For the room-temperature operation with the current of 13.54 mA and the voltage of 1.12 V, the peak wavelength is about 1309.70 nm and optical power is 13.254 mW.

Study on Adhesion of DLC Films with Interlayer (중간층을 이용한 DLC 박막의 밀착력에 관한 연구)

  • Kim, Gang-Sam;Cho, Yong-Ki
    • Journal of the Korean institute of surface engineering
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    • v.43 no.3
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    • pp.127-131
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    • 2010
  • Adhesion of DLC film is very significant property that exhibits wear resistance, chemical inertness and high hardness when being deposited to metal substrate. This study was considered that change adhesion of DLC film produced by Plasma Enhanced Chemical Vapor Deposition can be presented through inserting interlayer (Cr, Si-C:H). The thickness of interlayer was result of changing adhesion and residual stress. It was showed that the maximum 12 N of adhesion is on DLC film of Cr interlayer, and that a tendency is to be increased residual stress depend on the thickness. DLC film of Si-C:H interlayer represented 16 N of adhesion at $1{\mu}m$, whereas adhesion is decreased when the thickness is increased. For the interlayer at multi-layer, it was the best that adhesion of Cr/Si-C:H/DLC film was 33 N. Si-C:H interlayer at DLC film controled adhesion of the whole film. It was relaxed the internal stress of DLC film produced by inserting Cr, Si-C:H interlayer.

Characterization of the Annealing Effect of 0.5 % Ce-doped Ba(Zr0.2Ti0.8)O3 Thin Films Grown by Rf Magnetron Sputtering Method (RF 마그네트론 스퍼터링법으로 성장시킨 0.5% Ce-doped Ba(Zr0.2Ti0.8)O3 (BCZT) 박막의 열처리 특성분석)

  • 최원석;박용섭;이준신;홍병유
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.16 no.5
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    • pp.361-364
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    • 2003
  • It was investigated that the structural and electrical Properties of Ce-doped Ba(Zr$_{x}$Ti$_{1-x}$ )O$_3$ (BCZT) thin films with a mole fraction of x=0.2 and a thickness about 100 nm. BCZT films were prepared on Pt/Ti/SiO$_2$/Si substrate by a RF magnetron sputtering system. We have measured the thickness profile with Ar/O$_2$ ratio and the surface roughness. It was observed that the oxygen gas, which introduced during the film deposition, have an influence on the roughness of the film and the film roughness was reduced by annealing from 2.33 nm to 2.02 nm (RMS at 500 $^{\circ}C$, Ar:6 sccm, $O_2$:6 sccm). It was found that annealing procedure after top electrode deposit can reduce the dissipation factor.

A Study on the Mechanical Property of Sillicon Diamond-like-carbon Coating for Insulation of Electrically Assisted Forming Die Component (통전성형 금형 부품 절연을 위한 Si-DLC코팅 기계적 특성 연구)

  • Kim, Woo-young;Lee, Hyun-woo;Yang, Dae-ho;Hong, Sung-tae
    • Transactions of the Korean Society of Automotive Engineers
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    • v.23 no.6
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    • pp.656-662
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    • 2015
  • In the present study, multi-layered Si DLC (Silicon Diamond-Like Carbon) coatings with HMDSO (Hexamethyldisiloxane) buffer layers are applied on SKD 11 substrates by PECVD (Plasma Enhanced Chemical Vapor Deposition) with different HMDSO gas flow rates, while the gas flow rate of $C_2H_2$ is fixed to enhance the electric resistivity of forming dies for electrically assisted forming. The HMDSO buffer layer is introduced to increase adhesion between the base metal and Si-DLC layers. The result of evaluation of electric resistivity and adhesion strength shows that the properties are affected by the flow rate of HMDSO, while the flow rate of 80 sccm results in the coating with the highest electric resistivity and adhesion strength among the selected flow rates.

Design and Characteristics of Anti-reflection Coating using Multi-layer Thin Film on the Ferrule Facet (다층 박막을 이용한 패럴 단면의 무반사 코팅 설계 및 특성)

  • Ki, Hyun-Chul;Yang, Mung-Hark;Kim, Seon-Hoon;Kim, Tea-Un;Kim, Hwe-Jong;Gu, Hal-Bon
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.20 no.11
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    • pp.991-994
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    • 2007
  • In this paper, we have designed the anti-reflection(AR) coating for $1400{\sim}1600$ nm wavelength range on the ferrule facet of optical connector. The low-temperature ion-assisted deposition was applied to AR coating on the ferrule facet in order to avoid damage of optical connector. We have measured the refractive index of coating film($Ta_2O_5\;and\;SiO_2$) using the ellipsometer and optimized the film thickness using the SEM and thickness measurement equipment. UV-VIS-NIR spectrophotometer is used to measure transmissivity of the AR coated ferrule facet. The refractive index of $Ta_2O_5\;and\;SiO_2$ is $2.123{\sim}2.125$ and $1.44{\sim}1.442$, respectively, for $1400{\sim}1600$ nm wavelength range. The transmissivity of the AR coated ferule facet is more than 99.8 % for $1425{\sim}1575$ nm wavelength range and more than 99.5 % for $1400{\sim}1600$ nm wavelength range. The return loss of the AR coated ferrule facet is 30.1 dB.

Improvement of Electrochemical Characteristics by Changing Morphologies of Carbon Electrode (탄소 전극 형상 변화에 따른 전기화학 커패시터 특성 향상)

  • Min, Hyung-Seob;Kim, Sang-Sig;Cheong, Deock-Soo;Choi, Won-Kook;Oh, Young-Jei;Lee, Jeon-Kook
    • Korean Journal of Materials Research
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    • v.19 no.10
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    • pp.544-549
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    • 2009
  • Activated carbon (AC) with very large surface area has high capacitance per weight. However, such activation methods tend to suffer from low yields, below 50%, and are low in electrode density and capacitance per volume. Carbon NanoFibers (CNFs) had high surface area polarizability, high electrical conductivity and chemical stability, as well as extremely high mechanical strength and modulus, which make them an important material for electrochemical capacitors. The electrochemical properties of immobilized CNF electrodes were studied for use as in electrical double layer capacitor (EDLC) applications. Immobilized CNFs on Ni foam grown by thermal chemical vapor deposition (CVD) were successfully fabricated. CNFs had a uniform diameter range from 50 to 60 nm. Surface area was 56 m$^2$/g. CNF electrodes were compared with AC and multi wall carbon nanotube (MWNT) electrodes. The electrochemical performance of the various electrodes was examined with aqueous electrolyte of 2M KOH. Equivalent series resistance (ESR) of the CNF electrodes was lower than that of AC and MWNT electrodes. The specific capacitance of 47.5 F/g of the CNF electrodes was achieved with discharge current density of 1 mA/cm$^2$.

Investigation of Applicability of Additive Manufacturing Processes to Appropriate Technologies for Developing Countries (개발 도상국들을 위한 적층 제조 공정의 적정 기술 분야 적용성 고찰)

  • Ahn, Dong-Gyu
    • Journal of Appropriate Technology
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    • v.7 no.2
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    • pp.188-195
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    • 2021
  • In recent years, additive manufacturing (AM) processes have emerged as an important manufacturing technology for a multi-item small sized production to lead the 4th industrial revolution. The layer-by-layer deposition characteristics of AM process can rapidly produce physical parts with three-dimensional geometry and desired functionality in a relatively low cost environment. The goal of this paper is to investigate the applicability of AM process to appropriate technologies for developing countries. Through the review of examples of appropriate technology of the AM process, the possibility of a practical usage of the AM process for the appropriate technologies is examined. In addition, significant applications of the AM process to the appropriate technology are introduced. Finally, future issues related to production of physical parts for developing countries using the AM process are discussed from the viewpoint of the appropriate technology.