non-polar a-plane GaN growth on r-plane sapphire substrate by MOCVD

  • Son, Ji-Su (Green-energy Research Center, Korea Electronics Technology Institute) ;
  • Baek, Kwang-Hyun (Green-energy Research Center, Korea Electronics Technology Institute) ;
  • Kim, Ji-Hoon (Green-energy Research Center, Korea Electronics Technology Institute) ;
  • Song, Hoo-Young (Green-energy Research Center, Korea Electronics Technology Institute) ;
  • Kim, Tae-Geun (Department of Electronic Engineering, Korea University) ;
  • Hwang, Sung-Min (Green-energy Research Center, Korea Electronics Technology Institute)
  • Published : 2010.08.18

Abstract

We report a high crystalline nonpolar a-plane (11-20) GaN on r-plane (1-102) sapphire substrates with $+0.15^{\circ}$, $-0.15^{\circ}$, $+0.2^{\circ}$, $-0.2^{\circ}$ and $+0.4^{\circ}$ misoriented by metalorganic chemical-vapor deposition (MOCVD). The multi-quantum wells (MQWs) active region is consists of 5 periods the nonpolar a-plane InGaN/GaN (a-InGaN/GaN) on a high quality a-plane GaN (a-GaN) template grown by using the multibuffer layer technique. The full widths at half maximum (FWHMs) of x-ray rocking curve (XRC) obtained from phiscan of the specimen that was grown up to nonpolar a-plane GaN layers with double crystal x-ray diffraction. The FWHM values of $+0.4^{\circ}$ misoriented sapphire substrate were decreased down to 426 arc sec for $0^{\circ}$ and 531 arc sec for $-90^{\circ}$, respectively. Also, the samples were characterized by photoluminescence (PL).

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