• Journal of the Institute of Electronics Engineers of Korea SD
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• v.39 no.4
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• pp.26-34
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• 2002

A dynamically-allocated topographical model, so-called cell advancing model, has been developed modifying the cell model. Memory requirements are reduced by dynamically allocating completed topography and material information only at surface cells, and setting other cells as a material index. In this paper, this model is presented and verified with applications to etching process by using the analytic model and Monte Carlo model for the incident ion flux, deposition process, and process integration. In case of DRAM cell fabrication process with 5,440,500(130$\times$155$\times$270) cells takes about 22MB memory to represent the topography.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2017.05a
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• pp.71-71
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• 2017

플라즈마를 이용하는 건식 식각 또는 박막 증착 장비(PECVD)의 경우 웨이퍼에 rf bias를 인가하여 이온의 에너지와 입사각을 조절한다. 종래에는 웨이퍼의 가장 자리 3 mm영역을 공정 대상에서 제외하는 exclusion area로 지정하였으나 점차 공정 기술의 발달로 2 mm 이내로 감소하고 있다. 따라서 웨이퍼의 가장 자리에서 발생하는 전기장의 방향 및 크기 변화를 조절할 수 있는 기술의 개발이 필요하게 되었으며 그중 핵심적인 부품이 Si 또는 SiC로 제작되는 edge ring이다. Focus ring이라고도 불리는 이 부품은 웨이퍼 상에서 반경 방향으로 흐르는 가스의 유속이 가장 자리에 근접하면 빨라지는 현상과 이에 의해 식각/증착 화학 반응 속도가 증가하는 문제를 완화하기 위한 것과 적절한 전기 전도도를 부여함으로써 가장 자리의 전기장 분포를 최적화 할 수 있는 새로운 설계 변수로 활용할 수 있다. 스퍼터링의 경우에도 웨이퍼 중앙과 주변 부는 마그네트론 음극의 회전 링과의 입체각이 차이가 나므로 가장 자리의 경우 트렌치나 홀의 내측이 외측에 비해서 증착막의 두께가 얇아지는 문제가 있으며 건식 식각의 경우 홀의 형상이 수직에서 벗어나는 경향이 발생할 수 있다. 또한 사용 시간에 비례해서 edge ring의 형상이 변화하는데 상대적으로 고가품이어서 교체 주기를 설정하는 보다 합리적 기준이 필요하다. 본 연구에서는 전산 유체 역학 모델을 사용하는 ESI사의 CFD-ACE+를 활용하여 edge ring의 형상과 재질이 갖는 영향을 전산 모사하기 위한 기초 작업을 그림 1과 같이 진행하였다. 2D-CCP model에 Ar 가스를 가정하고 비유 전율 10내외 전도도 $0.1/Ohm{\cdot}m$정도의 재질에 대한 용량성 결합 플라즈마에 대해서 계산을 하고 이 때 기판에 인가되는 고주파 전력에 의한 이온의 입사 에너지 분포 및 각도 분포를 Monte Carlo 방법으로 처리하여 계산하였다.

• Journal of the Korean Society of Radiology
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• v.9 no.2
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• pp.73-77
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• 2015

In order to observe the detailed structure of the detector, it was CT scanned to reproduce the detailed structure of the crystal shapes and traverse layer using the Monte Carlo calculation applying the detector model. The uncertainty of measurement was lowered by adjusting the detector core by the edge effect at a higher energy (400 keV or higher) through the offset of peak efficiency of the gamma ray at low energy. It was confirmed that there was the appropriate matching with spatial dependency using the PENELOPE calculation. That was achieved by adjusting the parameters describing the crystal core and rounding of edge and crystal core.

• Nuclear Engineering and Technology
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• v.21 no.2
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• pp.63-72
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• 1989

An analysis for the gamma radiation fields in the research reactor MAPLE-X10 facility has been peformed under the assumption of partial loss of reactor and service pool water to assess the safety from the view point of design. Four photon source terms considered in the analysis were calculated using the ORIGEN-S code. Gamma dose rate calculations over the reactor and service pools during the water-loss accident conditions were performed using QAD-CG code. MCNP code (Monte Carlo Neuron and Photon Transport code), also, was used to assess the scattered radiation fields away from the pools, which is appropriate for calculating the scattered photon dose rates outside of the solid angle subtended by the source and pool walls.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.8 no.4
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• pp.767-773
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• 2004

An UWB communication system are a promising communication technique suitable for the current trends, which are requesting communication methods with the high throughputs and very high speed. A key feature of UWB communication systems is the very narrow pulse used in transmitting the data and PPM(Pulse Position Modulation) for modulating the data. So, the timing accuracy is very important. It is very important to accurately analyze the effect of the timing jitter on the performance of UWB communication systems. In this paper, the methods of analyzing the timing jitter effects on UWB communication systems are introduced. In particular, the channel capacities with timing jitter are calculated including the multiuser access interference.

• Progress in Medical Physics
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• v.16 no.2
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• pp.97-103
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• 2005

The energy spectra and dose calculations were performed for secondary neutrons from a 24 MV LINAC using MCNPX code (V2, 4, 0). The energy spectra for neutrons and photons emitted from the LINAC head, and absorbed dose to water were calculated in water phantom. The absorbed doses calculated with Monte Carlo were $0.66\~0.35$ mGy/photon Gy at the surface to d=5 cm, and calculated with interaction data was 0.52 mGy/photon Gy at the depth of electron equilibrium in water. We have shown that this work can be applied to dose estimation of neutrons from high energy LINAC through the comparison of our results with other results.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.40 no.4
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• pp.336-345
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• 2012

In crack growth life, uncertainties are caused by variance of geometry, applied loads and material properties. Therefore, the reliability estimation for these uncertainties is required to keep the robustness of calculated life. The stress intensity factors are the most important variable in crack growth life calculation, but its equation is hard to know for complex geometry, therefore they are processed by the finite element analysis which takes long time. In this paper, the response surface is considered to increase efficiency of the reliability analysis for crack growth life of a turbine wheel. The approximation model of the stress intensity factors is obtained by the regression analysis for FEA data and the response surface of crack growth life is generated for selected factors. The reliability analysis is operated by the Monte Carlo Simulation for the response surface. The results indicate that the response surface could reduce computations that need for reliability analysis for the turbine wheel, which is hard to derive stress intensity factor equation, successfully.

• Journal of the Institute of Convergence Signal Processing
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• v.11 no.4
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• pp.345-353
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• 2010

A general solution in global self-position location of robot is to generate multiple hypothesis in self-position of robot, which is to look for the most positive self-position by evaluating each hypothesis based on features of observed landmark. Markov Localization(ML) or Monte Carlo Localization(MCL) to be the existing typical method is to evaluate all pairs of landmark features and generated hypotheses, it can be said to be an optimal method in sufficiently calculating resources. But calculating quantities was proportional to the number of pairs to evaluate in general, so calculating quantities was piled up in wide environments in the presence of multiple pairs if using these methods. First of all, the positive and promising pairs is located and evaluated to solve this problem in this paper, and the newly locating method to make effective use of calculating time is proposed. As the basic method, it is used both RANSAC(RANdom SAmple Consensus) algorithm and preemption scheme to be efficiency method of RANSAC algorithm. The calculating quantity on each observation of robot can be suppressed below a certain values in the proposed method, and the high location performance can be determined by an experimental on verification.

• Geophysics and Geophysical Exploration
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• v.13 no.1
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• pp.31-39
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• 2010

The goal of automatic velocity analysis is to extract accurate velocity from voluminous seismic data with efficiency. In this study, we developed an efficient automatic velocity analysis algorithm by using bootstrapped differential semblance (BDS) and Monte Carlo inversion. To estimate more accurate results from automatic velocity analysis, the algorithm we have developed uses BDS, which provides a higher velocity resolution than conventional semblance, as a coherency estimator. In addition, our proposed automatic velocity analysis module is performed with a conditional initial velocity determination step that leads to enhanced efficiency in running time of the module. A new optional root mean square (RMS) velocity constraint, which prevents picking false peaks, is used. The developed automatic velocity analysis module was tested on a synthetic dataset and a marine field dataset from the East Sea, Korea. The stacked sections made using velocity results from our algorithm showed coherent events and improved the quality of the normal moveout-correction result. Moreover, since our algorithm finds interval velocity ($\nu_{int}$) first with interval velocity constraints and then calculates a RMS velocity function from the interval velocity, we can estimate geologically reasonable interval velocities. Boundaries of interval velocities also match well with reflection events in the common midpoint stacked sections.

• Journal of the Computational Structural Engineering Institute of Korea
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• v.20 no.3
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• pp.273-279
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• 2007

Probabilistic Risk Assessment considering statistically random variables is performed for the preliminary design of an Arch Bridge. Component reliabilities of girders have been evaluated using the response surfaces of the design variables at the selected critical sections based on the maximum shear and negative moment locations. Response Surface Method (RSM) is successfully applied for reliability analyses lot this relatively small probability of failure of the complex structure, which is hard to be calculated by Monte-Carlo Simulations or by First Order Second Moment method that can not easily calculate the derivative terms in implicit limit state functions. For the analysis of system reliability, parallel resistance system composed of girders is modeled as a parallel series connection system. The upper and lower probabilities of failure for the structural system have been evaluated and compared with the suggested prediction method for the combination of failure modes. The suggested prediction method for the combination of failure modes reveals the unexpected combinations of element failures in significantly reduced time and efforts, compared with the previous permutation method or conventional system reliability analysis method.