• 제목/요약/키워드: Monitoring machinery

검색결과 327건 처리시간 0.093초

적외선 배경신호 처리를 통한 OES 기반 PECVD공정 모니터링 정확도 개선 (OES based PECVD Process Monitoring Accuracy Improvement by IR Background Signal Subtraction from Emission Signal)

  • 이진영;서석준;김대웅;허민;이재옥;강우석
    • 반도체디스플레이기술학회지
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    • 제18권1호
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    • pp.5-9
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    • 2019
  • Optical emission spectroscopy is used to identify chemical species and monitor the changes of process results during the plasma process. However, plasma process monitoring or fault detection by using emission signal variation monitoring is vulnerable to background signal fluctuations. IR heaters are used in semiconductor manufacturing chambers where high temperature uniformity and fast response are required. During the process, the IR lamp output fluctuates to maintain a stable process temperature. This IR signal fluctuation reacts as a background signal fluctuation to the spectrometer. In this research, we evaluate the effect of infrared background signal fluctuation on plasma process monitoring and improve the plasma process monitoring accuracy by using simple infrared background signal subtraction method. The effect of infrared background signal fluctuation on plasma process monitoring was evaluated on $SiO_2$ PECVD process. Comparing the $SiO_2$ film thickness and the measured emission line intensity from the by-product molecules, the effect of infrared background signal on plasma process monitoring and the necessity of background signal subtraction method were confirmed.

Development of a Data Acquisition System for the Long-term Monitoring of Plum (Japanese apricot) Farm Environment and Soil

  • Akhter, Tangina;Ali, Mohammod;Cha, Jaeyoon;Park, Seong-Jin;Jang, Gyeang;Yang, Kyu-Won;Kim, Hyuck-Joo
    • Journal of Biosystems Engineering
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    • 제43권4호
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    • pp.426-439
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    • 2018
  • Purpose: To continuously monitor soil and climatic properties, a data acquisition system (DAQ) was developed and tested in plum farms (Gyewol-ri and Haechang-ri, Suncheon, Korea). Methods: The DAQ consisted of a Raspberry-Pi processor, a modem, and an ADC board with multiple sensors (soil moisture content (SEN0193), soil temperature (DS18B20), climatic temperature and humidity (DHT22), and rainfall gauge (TR-525M)). In the laboratory, various tests were conducted to calibrate SEN0193 at different soil moistures, soil temperatures, depths, and bulk densities. For performance comparison of the SEN0193 sensor, two commercial moisture sensors (SMS-BTA and WT-1000B) were tested in the field. The collected field data in Raspberry-Pi were transmitted and stored on a web server database through a commercial communications wireless network. Results: In laboratory tests, it was found that the SEN0193 sensor voltage reading increased significantly with an increase in soil bulk density. A linear calibration equation was developed between voltage and soil moisture content depending on the farm soil bulk density. In field tests, the SEN0193 sensor showed linearity (R = 0.76 and 0.73) between output voltage and moisture content; however, the other two sensors showed no linearity, indicating that site-specific calibration is important for accurate sensing. In the long-term monitoring results, it was observed that the measured climate temperature was almost the same as website information. Soil temperature information was higher than the values measured by DS18B20 during spring and summer. However, the local rainfall measured using TR 525M was significantly different from the values on the website. Conclusion: Based on the test results obtained using the developed monitoring system, it is thought that the measurement of various parameters using one device would be helpful in monitoring plum growth. Field data from the local farm monitoring system can be coupled with website information from the weather station and used more efficiently.

회전기계의 상태감시 및 진단 시스템 개발 (Development of Condition Monitoring and Diagnosis System for Rotating Machinery)

  • 함종석;이종원;박성호;양보석;황원우;최연선;전오성
    • 한국소음진동공학회:학술대회논문집
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    • 한국소음진동공학회 2003년도 춘계학술대회논문집
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    • pp.950-955
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    • 2003
  • This paper introduces an enhanced condition monitoring and diagnosis system recently developed for rotating machinery. In the system, the data aquisition/monitoring signal processing, machine condition classifier, case-based reasoning and demonstration modules are effectively integrated with user-friendliness so that machine operators can easily monitor and diagnose the status of rotating machinery in operation. Some of the new features include the directional spectrum, case-based reasoning and neural network techniques. And the demonstrator modules for fault diagnosis of a Bear driving system and for basic understanding of the rotor dynamics are provided to help the potential users better understand the system.

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DEVELOPMENT OF A MOBULAR ENVIRONMENT MONITORING SYSTEM FOR GREENIIOUSE

  • Ryu, K.H.;Kim, H.J.
    • 한국농업기계학회:학술대회논문집
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    • 한국농업기계학회 1996년도 International Conference on Agricultural Machinery Engineering Proceedings
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    • pp.1081-1089
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    • 1996
  • In Korean agriculture, an automatic environment control system for greenhouse is essential to save labor and to increase the quality of products. The existing environment monitoring systems have weighed on greenhouse growers and researchers because of their high cost and difficult applications. Many sensors are widely used for monitoring the greenhouse environment, but most of commercial sensors are expensive and not suitable for use in greenhouses. Thus , the development of an environment monitoring system for exclusive use in greenhouses is essential . The objective of this study was to develop modular environment monitoring systems, which are low-cost , reliable and easy -to -use. The results showed that the sensors for indoor and outdoor environments and nutrient solution had the ranges and accuracies appropriate for use in greenhouses. Also the modular environment systems developed showed a satisfactory performance in terms of stability and reliability in the measurement and acquisition of the greenhouse environment data.

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고압 전동기 고정자 권선의 운전중 절연감시 시스템 개발 (Development of On-tine Partial Discharge Monitoring System for High-Voltage Motor Stator Windings)

  • 황돈하;심우용;박도영;강동식;김용주;송상옥;김회동
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2001년도 추계학술대회 논문집 전기물성,응용부문
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    • pp.224-226
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    • 2001
  • In this paper, a novel high-voltage motor monitoring system (HVMMS) is proposed. This system monitors the insulation condition of the stator winding by on-line measurements of partial discharge (PD). Sensor, EMC (Epoxy-Mica Coupler) is used for PD measurement PD signals are continuously measured and digitized with a peak-hold A/D converter to build the database of the high-voltage motor's insulation condition. Also, this system can communicate with the central monitoring system via RS-485. This helps more efficient operation and maintenance of the generator.

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Development of an environment field monitoring system to measure crop growth

  • Kim, Yeon-Soo;Kim, Du-Han;Chung, Sun-Ok;Choi, Chang-Hyun;Choi, Tae-Hyun;Kim, Yong-Joo
    • 농업과학연구
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    • 제46권1호
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    • pp.57-65
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    • 2019
  • The purpose of this study was to develop an environment field monitoring system to measure crop growth. The environment field monitoring system consisted of sensors, a data acquisition system, and GPS. The sensors used in the environment field monitoring system consisted of an ambient sensor, a soil sensor, and an intensity sensor. The temperature and humidity of the atmosphere were measured with the ambient sensor. The temperature, humidity, and EC of the soil were measured with the soil sensor. The data acquisition system was developed using the Arduino controller. The field monitoring data were collected before a rainy day, on a rainy day, and after the rainy day. The measured data using the environment field monitoring system were compared with the Daejeon regional meteorological office data. The correlation between the data from the environment field monitoring system and the data from the Daejeon regional meteorological office was analyzed for performance evaluation. The correlation of the temperature and humidity of the atmosphere was analyzed because the Daejeon regional meteorological office only provided data for the temperature and humidity of the atmosphere. The correlation coefficients were 0.86 and 0.90, respectively. The result showed a good correlation between the data from the environment field monitoring system and the data from the Daejeon regional meteorological office. Therefore, the developed system could be applied to monitoring the field environment of agricultural crops.

능동기기 무선센터 모니터링 시스템 구축에 관한 기초연구 (A basic study of wireless sensor monitoring system configuration for active machinery)

  • 박창대;임병주;이후락;최봉우;황성재;정경열
    • 한국마린엔지니어링학회:학술대회논문집
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    • 한국마린엔지니어링학회 2012년도 전기공동학술대회 논문집
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    • pp.119-120
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    • 2012
  • In the various industry plant, it need a condition monitoring system for an active machine that used an detachable wireless sensors. In this paper, IEEE802.15.4 standard based detachable wireless sensor monitoring system configure results will be introduced.

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Implementation of Remote Monitoring Scenario using CDMA Short Message Service for Protected Crop Production Environment

  • Bae, Keun-Soo;Chung, Sun-Ok;Kim, Ki-Dae;Hur, Seung-Oh;Kim, Hak-Jin
    • Journal of Biosystems Engineering
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    • 제36권4호
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    • pp.279-284
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    • 2011
  • Protected vegetable production area is greater than 26% of the total vegetable production area in Korea, and portion of protected production area is increasing for flowers and fruits. To secure stable productivity and profitability, continuous and intensive monitoring and control of protected crop production environment is critical, which is labor- and time-consuming. Failure to maintain proper environmental conditions (e.g., light, temperature, humidity) leads to significant damage to crop growth and quality, therefore farmers should visit or be present close to the production area. To overcome these problems, application of remote monitoring and control of crop production environment has been increasing. Wireless monitoring and control systems have used CDMA, internet, and smart phone communications. Levels of technology adoption are different for farmers' needs for their cropping systems. In this paper, potential of wireless remote monitoring of protected agricultural environment using CDMA SMS text messages was reported. Monitoring variables were outside weather (precipitation, wind direction and velocity, temperature, and humidity), inside ambient condition (temperature, humidity, $CO_2$ level, and light intensity), irrigation status (irrigation flow rate and pressure), and soil condition (volumetric water content and matric potential). Scenarios and data formats for environment monitoring were devised, tested, and compared. Results of this study would provide useful information for adoption of wireless remote monitoring techniques by farmers.

Directional Wigner-Ville Distribution and Its Application for Rotating- Machinery Condition Monitoring

  • Kim, Dong-Wan;Ha, Jae-Hong;Shin, Hae-Gon;Lee, Yoon-Hee;Kim, Young-Baik
    • 한국원자력학회:학술대회논문집
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    • 한국원자력학회 1996년도 춘계학술발표회논문집(1)
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    • pp.587-593
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    • 1996
  • Vibration analysis is one of the most powerful tools available for the detection and isolation of incipient faults in mechanical systems. The methods of vibration analysis in use today and under continuous study are broad band vibration monitoring, time domain analysis, and frequency domain analysis. In recent years, great interest has been generated concerning the use of time-frequency representation and its application for a machinery diagnostics and condition monitoring system. The objective of the research described in this paper was to develop a new diagnostic tool for the rotating machinery. This paper introduces a new time-frequency representation, Directional Wigner-Ville Distribution, which analyses the time- frequency structure of the rotating machinery vibration.

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기기의 감시 및 분석을 위한 데이터 획득 시스템에 관한 연구 (A Study on the Data Acquisition System for Machinery Monitoring and its Condition Analysis)

  • 남택근;이돈출;노영오;임정빈
    • 해양환경안전학회:학술대회논문집
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    • 해양환경안전학회 2007년도 추계학술발표회
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    • pp.145-148
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    • 2007
  • 본 연구에서는 기기의 감시 및 분석을 위해 필요한 데이터 획득 시스템의 개발에 관해 논의한다 선박에서의 회전기기 및 운전기기의 운전상태 감시와 분석을 위해서는 시스템에 적합한 데이터 획득시스템을 구축하여야 하고 이러한 데이터 획득 시스템을 간단하고 경제적으로 구성하는 것은 중요하다고 할 수 있다. 아울러 사용 환경 혹은 사용자 인터페이스를 사용자의 의도에 따라 손쉽게 변경할 수 있어야 할 것이다. 본 연구에서는 이러한 데이터 획득 시스템을 구성하기 위한 기본적인 요소들에 대해 살펴보고, 일정시간 동안 자동적으로 데이터를 저장하는 방법과 네트웍을 통해 데이터를 획득하는 시스템 구성에 관해 논의한다. 최종적으로 실제 계측을 통해 구성된 데이터획득 시스템이 유용성을 확인한다.

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