• Title/Summary/Keyword: Molecular beam Epitaxy

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Li-doped p-type ZnS Grown by Molecular Beam Epitaxy

  • Lee Sang-Tae
    • Journal of Advanced Marine Engineering and Technology
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    • v.29 no.3
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    • pp.313-318
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    • 2005
  • Li-doped ZnS layers were grown by molecular beam epitaxy. It was found that relatively low growth temperature is suitable for effective incorporation of Li acceptors. The layers grown under optimized conditions exhibited photoluminescence spectra dominated by neutral-acceptor-bound excitons. Such layers also showed electrically p-type behavior in capacitance-voltage characteristics. The net acceptor concentration is estimated to be approximately $3{\times}10^{15}\;cm^{-3}$.

Molecular Beam Epitaxy Grouth of $\textrm{LaAlO}_3$ Thin Film by a Pulsed laser Deposition Technique (펄스레이저증착법을 이용한 $\textrm{LaAlO}_3$ 박막의 Molecular Beam Epitaxy 성장)

  • Kim, In-Seon;Heo, Nam-Hoe;Park, Yong-Gi
    • Korean Journal of Materials Research
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    • v.9 no.1
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    • pp.25-29
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    • 1999
  • We have developed a laser molecular beam epitaxy system for the layer-by-layer growth of oxide thin films. Using this system, we could grow and control oxide thin films of LaAlO$_3$in a molecular layer epitaxy mode on the atomically flat SrTiO$_3$ substrate with a LaAlO$_3$single crystal target. Very clear RHEED oscillations were observed during to growth of a LaAlO$_3$ film for a long period under the optimized conditions of substrate temperature at $650^{\circ}C$, oxygen pressure at 1$\times$10\ulcorner torr, and an incident laser fluence of 4.6J/$\textrm{cm}^2$. The height of mono-layer-LaAlO$_3$ film grown during one period of RHEED intensity oscillation was 3.8$\AA$.

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Property of molecular beam epitaxy-grown ZnSe/GaAs (분자선 에피성장법으로 성장된 ZnSe/GaAs의 특성)

  • Kim, Eun-Do;Son, Young-Ho;Cho, Seong-Jin;Hwang, Do-Weon
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.17 no.2
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    • pp.52-56
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    • 2007
  • We have installed an ultra high vacuum (UHV) molecular beam epitaxy (MBE) system and investigated into the characteristics of MBE-grown ZnSe/GaAs [001] using scanning electron microscopy (SEM), atomic force microscopy (AFM), we confirmed that layer's surface was dense and uniform of molecular layer. We used x-ray diffractometer (XRD) and confirmed two peaks correspond to GaAs [001] substrate and ZnSe epilayer, respectively. We observed photoluminescence (PL) peak approximately at 437 nm and measured PL mapping of 2 inch ZnSe epilayer.

Growth of $CaF_{2}:R^{+3}$ (R=Nd, Er) layers by molecular beam epitaxy (Molecular beam epitaxy법에 의한 희토류 이온$(Nd^{3+},\;Er^{3+})$ 첨가 $CaF_{2}$ 박막의 성장)

  • ;Yefen Chen;Tsuguo Fukuda
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.9 no.1
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    • pp.1-5
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    • 1999
  • The rare-earth ions ($R^{3+}$, R=Nd, Er) doped $CaF_{2}$ layers have been grown on $CaF_{2}$ (111) substrate by molecular beam epitaxy. The surface structure and the crystallinity of $CaF_{2}:R^{3+}$ layers depending on the doping concentration of $R^{3+}$ and layer thickness were studied by reflection high-energy electron diffraction (RHEED). In aspect of application as buffer layer in semiconductor-related hybrid structure, the lattice displacement between $CaF_{2}:R^{3+}$ layers and $CaF_{2}$ (111) substrate was investigated by X-ray rocking curve analysis.

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Construction of an Ultra High Vacuum Molecular Beam Epitaxy System and Optical Property of ZnSe/GaAs(001) Epitaxial films (초고진공 분자선 에피성장 시스템의 제작과 에피성장된 ZnSe/GaAs(001)의 광학특성)

  • Kim, Eun-Do;Son, Young-Ho;Eom, Gi-Seog;Cho, Seong-Jin;Hwang, Do-Weon
    • Journal of the Korean Vacuum Society
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    • v.15 no.5
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    • pp.458-464
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    • 2006
  • The construction and the performance test of an ultra high vacuum (UHV) molecular beam epitaxy (MBE) system has been completed successfully. We have done domestic development and tried performance test for ultra high vacuum molecular beam epitaxy system. This system has reached pressure $2X10-^{10}$ Torr and the substrate has reached temperature $1,100^{\circ}C$. We have investigated into the characteristic of ZnSe/GaAs(001) by using scanning electron microscope (SEM), atomic force microscope (AFM), x-ray diffraction (XRD) and photolumi-nescence (PL).

p-Type Doping of GaSb by Beryllium Grown on GaAs (001) Substrate by Molecular Beam Epitaxy

  • Benyahia, Djalal;Kubiszyn, Lkasz;Michalczewski, Krystian;Keblwski, Artur;Martyniuk, Piotr;Piotrowski, Jozef;Rogalski, Antoni
    • JSTS:Journal of Semiconductor Technology and Science
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    • v.16 no.5
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    • pp.695-701
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    • 2016
  • Be-doped GaSb layers were grown on highly mismatched semi-insulating GaAs substrate (001) with $2^{\circ}$ offcut towards <110> at low growth temperature, by molecular beam epitaxy (MBE). The influence of Be doping on the crystallographic quality, surface morphology, and electrical properties, was assessed by X-ray diffraction, Nomarski microscopy, and Hall effect measurements, respectively. Be impurities are well behaved acceptors with hole concentrations as high as $9{\times}10^{17}cm^{-3}$. In addition, the reduction of GaSb lattice parameter with Be doping was studied.

Molecular Beam Epitaxy of InAs/AlSb HFET's on Si and GaAs Substrates

  • Oh, Jae-Eung;Kim, Mun-Deok
    • JSTS:Journal of Semiconductor Technology and Science
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    • v.6 no.3
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    • pp.131-135
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    • 2006
  • High electron mobility transistors with InAs channels and antimonide barriers were grown on Si and GaAs substrates by means of molecular beam epitaxy. While direct growth of Sb materials on Si substrate generates disordered and coalescences 3-D growth, smooth and mirror-like 2D growth can be repeatedly obtained by inserting AlSb QD layers between them. Room-temperature electron mobilities of over 10,000 $cm^2/V-s$ and 20,000 $cm^2/v-s$ can be routinely obtained on Si and GaAs substrates, respectively, after optimizing the buffer structure as well as maintaining InSb-like interface.

Epitaxial Growth of MgO and CoFe/MgO on Ge(001) Substrates by Molecular Beam Epitaxy

  • Jeon, Kun-Rok;Park, Chang-Yup;Shin, Sung-Chul
    • Proceedings of the Korean Magnestics Society Conference
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    • 2009.12a
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    • pp.190-190
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    • 2009
  • We report the epitaxial growth of MgO and CoFe/MgO on Ge (001) substrates using molecular beam epitaxy. It was found that the epitaxial growth of a MgO film on Ge could be realized at a low growth temperature of $125{\pm}5^{\circ}C$ and the MgO matches the Ge with a cell ratio of $\sqrt{2}$:1 which renders MgO rotated by $45^{\circ}$ relative to Ge. In-situ and ex-situ structural characterizations reveal the epitaxial crystal growth of bcc CoFe/MgO on Ge with the in-plane crystallographic relationship of CoFe(001)[100] || MgO(001)[110] || Ge(001)[100], exhibiting sharp interfaces in the (001) matching planes. The saturation magnetization of the sample is $1430{\pm}20$ emu/cc, which is comparable to the value of bulk CoFe.

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Atomic Layer-by-Layer Growth of $BaTiO_3/SrTiO_3$ Oxide Artificial Lattice in Laser Molecular Beam Epitaxy System Combined Reflection High Energy Electron Diffraction (Reflection High Energy Electron Diffraction이 결합된 Laser Molecular Beam Epitaxy System에서 $BaTiO_3/SrTiO_3$ 산화물 인공격자의 Layer-by-Layer 성장)

  • Lee, Chang-Hun;Kim, Lee-Jun;Jeon, Seong-Jin;Kim, Ju-Ho;Choe, Taek-Jip;Lee, Jae-Chan
    • Proceedings of the Korean Ceranic Society Conference
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    • 2003.10a
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    • pp.179.2-179
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    • 2003
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Potential for Novel Magnetic Structures by Nanowire Growth Mechanisms

  • Lapierre R.R.;Plante M.C.
    • Journal of Magnetics
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    • v.10 no.3
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    • pp.108-112
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    • 2005
  • GaAs nanowires were grown on GaAs (111)B substrates in a gas source molecular beam epitaxy system, using self-assembled Au particles with diameters between 25 and 200 nm as the catalytic agents. The growth rate and structure of the nanowires were investigated for substrate temperatures between 500 and $600^{\circ}C$ to study the mass transport mechanisms that drive the growth of these crystals. The possibilities for fabrication of novel magnetic nanostructures by suitable choice of growth conditions are discussed.