• Title/Summary/Keyword: Min Je-In

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$BCl_3,\;BCl_3/Ar,\;BCl_3/Ne$ 유도결합 플라즈마에 의한 InGaP 건식 식각 비교 (Comparison of InGaef etching $BCl_3,\;BCl_3/Ar\;and\;BCl_3/Ne$ inductively coupled plasmas)

  • 백인규;임완태;이제원;조관식;전민현
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.1
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    • pp.361-365
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    • 2003
  • Planar Inductively Coupled Plasma (PICP) etching of InGaP was performed in $BCl_3,\;BCl_3/Ar\;and\;BCl_3/Ne$ plasmas as a function of ICP source power ($0\;{\sim}\;500\;W$), RIE chuck power ($0\;{\sim}\;150\;W$), chamber pressure ($5\;{\sim}\;15\;mTorr$) and gas composition of $BCl_3/Ar\;and\;BCl_3/Ne$. Total gas flow was fixed at 20 sccm (standard cubic centimeter per minute). Increase of ICP source power and RIE chuck power raised etch rate of InGaP, while that of chamber pressure reduced etch rate. We also found that some addition of Ar and Ne in $BCl_3$ plasma improved etch rate of InGaP. InGaP etch rate was varied from $1580\;{\AA}/min$ with pure $BC_3\;to\;2800\;{\AA}/min$ and $4700\;{\AA}/min$ with 25 % Ar and Ne addition, respectively. Other process conditions were fixed at 300 W ICP source power, 100 W RIE chuck power and 7.5 mTorr chamber pressure. SEM (scanning electron microscopy) and AFM (atomic force microscopy) data showed vertical side wall and smooth surface of InGaP at the same condition. Proper addition of noble gases Ar and Ne (less than about 50 %) in $BCl_3$ inductively coupled plasma have resulted in not only increase of etch rate but also minimum preferential loss and smooth surface morphology by ion-assisted effect.

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$BCl_3$ 기반의 혼합 가스들을 이용한 InP 고밀도 유도결합 플라즈마 식각 (High Density Inductive Coupled Plasma Etching of InP in $BCl_3$-based chemistries)

  • 조관식;임완태;백인규;이제원;전민현
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.1
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    • pp.75-79
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    • 2003
  • We studied InP etch results in high density planar inductively coupled $BCl_3$ and $BCl_3$/Ar plasmas. The investigated process parameters were ICP source power, RIE chuck power, chamber pressure and $BCl_3$/Ar gas composition. It was found that increase of ICP source power and RIE chuck power raised etch rate of InP, while that of chamber pressure decreased etch rate. Etched InP surface was clean and smooth (RMS roughness < 2 nm) with a moderate etch rate ($300\;{\sim}\;500\;{\AA}/min$) after the planar $BCl_3/Ar$ ICP etching. It may make it possible to open a new regime of InP etching with $CH_4/H_2$ - free plasma chemistry. Some amount of Ar addition (< 50%) also improved etch rates of InP, while too much Ar addition reduced etch rates of InP.

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"동몽선습(童蒙先習)"의 저자(著者)에 관한 연구(硏究) (The Study of Writer Who Wrote a Dongmongseonseup)

  • 류부현
    • 한국도서관정보학회지
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    • 제40권3호
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    • pp.389-402
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    • 2009
  • 본 연구는 "동몽선습"의 저자에 대한 정론을 수립할 수 있는 하나의 단서를 마련하는데 그 목적이 있다. 따라서 본 연구에서는 종래 살펴보지 못했던 몇 가지 자료에 의거하여 "동몽선습"의 저자에 관해서 좀 더 심층적으로 살펴보았다. 그 결과 "동몽선습"은 박세무와 민제인의 공저로서 박세무는 "동몽선습" 내용 가운데 전반부인 경부에 해당되는 '(오륜)'을 집필하고, 민제인은 후반부인 사부에 해당되는 '(역대요의)'를 저술한 후 합편한 것으로 판단된다.

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제주도(濟州島) 재래감귤(在來柑橘)의 식물학적(植物學的) 연구(硏究)(I) -재래감귤(在來柑橘)의 정유성분상(精油成分相)과 flavonoid성분(成分)- (Taxonomical and Phytochemical Studies of Citrus Plants Native to Je Ju Island (I) -Flavour Patterns of the Citrus Peel Oils and One of the Citrus Flavonoids-)

  • 김창민;김경식;김문홍;허인옥
    • 생약학회지
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    • 제10권1호
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    • pp.13-16
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    • 1979
  • The essential oil composition by means of gas liquid chromatography, and the occurrence and distribution of flavonoid glycosides in leaves, peels and barks of citrus plants native to Je Ju island were investigated. Results indicate that the occurrence of p-cymene, d,l-limonene, linalool, geraniol and linalyl acetate in the essential oils, and of hesperidin in leaves, peels and barks are fairly common to these species.

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Ovalbumin으로 유발된 아토피피부염 마우스 모델에서 자감초탕(炙甘草湯)의 항알레르기 효과 (Anti-allergic Effects of Jagamcho-tang in Ovalbumin-induced Atopic Dermatitis Mouse Model)

  • 노현민;박승구;김원정;조은희;기현희;김대기;박민철
    • 동의생리병리학회지
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    • 제31권5호
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    • pp.277-283
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    • 2017
  • Activated T helper 2 (Th2) immune function is hallmark of various allergic diseases. We investigated the anti-allergic effect of Jagamcho-tang extract(JE) on ovalbumin(OVA)-induced atopic dermatitis mice model and OVA-stimulated splenocytes isolated from the mice. Mice were intraperitoneally injected OVA/alum solution 2 times at interval of 14 days, followed by oral administration of JE for 7 days. After administration, mice were subcutaneously injected with OVA in ear. JE treatment reduced ear swelling and infiltration of inflammatory cells in ear. Serum levels of interleukin(IL)-4 and immunoglobulins, such as total-IgE and OVA-specific IgE, were decreased in JE treated group. Furthermore, JE treatment decreased OVA-induced Th2-associated cytokines like IL-4, IL-5 and IL-13 mRNA levels in splenocytes. In conclusion, JE reduced allergic immune response via IgE production and Th2 response in OVA-sensitized mice, suggesting that JE could be useful prescription for allergic diseases including atopic dermatitis.

왕초피나무의 성분연구(成分硏究) (A Study on the Chemical Components of Zanthoxylum coreanum Nakai(Rutaceae))

  • 김창민;허인옥
    • 생약학회지
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    • 제12권1호
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    • pp.5-11
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    • 1981
  • The five fractions from the barks of Zanthoxylum coreanum in Je-ju Island are examined in detail chromatographically in this paper. 37 compounds are detected in all of the fractions, and the compounds from each of fractions are found to be presumed that this plant is classified into the same group as that of the temperate Zanthoxylum taxa but is different from the tropical zanthoxylum taxa by its chemical components.

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한국인과 중국인에서 고려삼과 화기삼의 혈압과 맥박에 대한 이중맹검-무작위배정 임상시험 (Double-blind Randomized Controlled Trials on Blood Pressure and Pulse Rate of Korean Ginseng and American Ginseng in Koreans and Chineses)

  • 서정철;이세연;이경민;임성철;정태영;안희덕;한상원;하일도;허정걸;이경림;김명수
    • 동의생리병리학회지
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    • 제18권2호
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    • pp.606-611
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    • 2004
  • In East-South Asia it has been known that Korean ginseng(Panax ginseng) increases blood pressure, whereas American ginseng(Panax quinquefolius) doesn't. This study was designed to find out if Korean ginseng really could increase blood pressure comparing with American ginseng. Double-blind randomized controlled trials on blood pressure and pulse rate of Korean ginseng and American ginseng in Koreans and Chineses was performed. There was no significant difference on blood pressure and pulse rate between Korean ginseng and American ginseng in both Koreans and Chineses by repeated-measures ANOVA. It was revealed that Korean ginseng does not increase blood pressure. Maybe the concept that Korean ginseng increases blood pressure is concerned with commercial interests dealing with American Ginseng.