• Journal of Korean Vacuum Science & Technology
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• v.2 no.2
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• pp.97-100
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• 1998

We have investigated the effects of crystalline activation on solid phase crystallization (SPC) of amorphous silicon (a-Si) thin films. Wet blasting and self ion implantation were employed as the activation treatments to induce macro or micro crystalline damages on deposited a-Si films. Low temperature and larger grain crystallization were obtained by the applied two-step activation. High degree of crystallinity was also observed on both furnace and rapid SPC. crystalline activations showed the promotion of nucleation on the activated regions and the retardation of growth in an amorphous matrix in SPC. The observed behavior of two-step SPC was strongly dependent on the applied activation and annealing processes. It was also found that the diversified effects by macro and micro activations on the SPC were virtually diminished as the annealing temperature increased.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.272-274
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• 2005

A simple method for fabricating micro/nanoscale hierarchical structures is presented using a two-step temperature-directed capillary molding technique. This lithographic method involves a sequential application of molding process in which a uniform polymer-coated surface is molded with a patterned mold by means of capillary force above the glass transition temperature of the polymer. Using this approach, multiscale hierarchical structures for biomimetic functional surfaces can be fabricated with precise control over geometrical parameters and the wettability of a solid surface can be designed in a controllable manner.

• Journal of the Korean Society for Precision Engineering
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• v.14 no.5
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• pp.157-163
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• 1997

In the case of direct connecting the nut of ballscrew to guide table, machining error and misalignment of ballscrew largely affect to the motional accuracy of guideway. For decreasing these influences, two type of floating couplings: leaf spring type and hybrid type which releases the table from nut of ballscrew except feed and rotational direction is proposed in this study. In order to verify practical availability of the proposed floating couplings, motional accuracy, dynamic characteristics and micro step response of hydrostatic guideway, mounted with each type of couplings are tested. The conventional fixed type coupling is also tested as the reference in characteristics. From the results of experiments, it is proved that the hybrid type coupling is superior to other couplings and is available to high precision feeding system with ballscrew.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.10 no.2
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• pp.308-314
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• 2006

A line scan camera is applied to enhance COG(Chip On Glass) inspection accuracy to be measured a few micro unit. The foreign substance detection among various faulty factors has been the most difficult technology in the faulty automatic inspection step since COG pattern is very miniature and complexity. In this paper, we proposed two step area segmentation template matching method to increase matching speed. Futhermore to detect foreign substance(such as dust, scratch) with a few micro unit, the new method using gradient mask and AND operation was proposed. The proposed 2 step template matching method increased 0.3 - 0.4 second matching speed compared with conventional correlation coefficient. Also, the proposed foreign substance applied masks enhanced $5-8\%$ faulty detection rate compared with conventional no mask application method.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.7 no.3
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• pp.30-35
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• 2008

As demands for being economical, precise drilling process is on the increase. Therefore, the objective of this study is to develop a step cutter that can be controllable through micro dimension and can be changed from separate manufacturing processes of drilling and boring into an integrated one. In order to attain this object the step cutter is designed with a 3D geometric modeling and the design could be modified easily by using parametric modeling methodology. Also, collision is not occurred during manufacturing process because of cutting simulation. The step cutter is assembled by parts made up of 5-axis machining and sintering. Validation tests are accomplished. They show that developed cutter has characteristics such as reduction of machining time as well as the good surface roughness of the machined hole. Indeed, reliability could be obtained from a durability test.

• JSTS:Journal of Semiconductor Technology and Science
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• v.6 no.4
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• pp.293-298
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• 2006

Thermopiezoelectric method, using poly silicon heater and a piezoelectric sensor, was proposed for writing and reading in a probe based data storage system. Resistively heated tip writes data bits while scanning over a polymer media and piezoelectric sensor reads data bits from the self-generated charges induced by the deflection of the cantilever. 34${\times}$34 array of thermopiezoelectric nitride cantilevers were fabricated by a single step wafer level transfer method. We analyzed the noise level of the charge amplifier and measured the noise signal. With the sensor and the charge amplifier 20mn of deflection could be detected at a frequency of 10KHz. Reading signal was obtained from the cantilever array and the sensitivity was calculated.

• Journal of the Korean institute of surface engineering
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• v.45 no.4
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• pp.151-154
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• 2012

A hydrophobic surface has been fabricated on aluminum by two-step surface treatment processes consisting of structure modification and surface coating. Nature inspired micro nano scale structures were artificially created on the aluminum surface by a blasting and Ar ion beam etching. And a hydrophobic thin film was coated by a trimethylsilane ($(CH_3)_3SiH$) plasma deposition to minimize the surface energy of the micro nano structure surface. The contact angle of micro nano structured aluminum surface with the trimethylsilane coating was $123^{\circ}$ (surface energy: 9.05 $mJ/m^2$), but the contact angle of only trimethylsilane coated sample without the micro nano surface structure was $92^{\circ}$ (surface energy: 99.15 $mJ/m^2$). In the hydrophobic treatment of aluminum surface, a trimethylsilane coated sample having the micro nano structure was more effective than only trimethylsilane coated sample without the micro nano structure.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2009.10a
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• pp.132-136
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• 2009

The importance and interests for saving of energy and cost in industry has been steadily grown up. Therefore, process optimization to reduce the processing step and energy is one of the most important things. The micro-alloyed steel of which post-heat-treatment is not necessary, has attractive points for high strength materials. However, for the application of non-heat-treated steel to structural parts, it is necessary to confirm the reliability of mechanical properties. In order to estimate mechanical properties. The microstructure, hardness, tensile strength, compressive strength and tensile fatigue strength of micro-alloyed steel having 900MPa tensile strength has been investigated.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.956-959
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• 2002

In this work, a new non-lithographic micro-fabrication technique is presented. The motivation of this work is to overcome the demerits of the most commonly used photo-lithographic techniques. The micro-fabrication technique presented in this work is a two-step process which consists of mechanical scribing followed by chemical etching. This method has many advantages over other micro-fabrication techniques since it is simple, cost-effective, rapid, and flexible. Also, the technique can be used to obtain a metal structure which has sub-micrometer width patterns. In this paper, the concept of this method and its application to microsystem technology are described.

• International Journal of Precision Engineering and Manufacturing
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• v.4 no.5
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• pp.22-26
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• 2003

In this work, a new non-photolithographic micro-fabrication technique is presented. The motivation of this work is to overcome the demerits of the most commonly used photolithographic techniques. The micro-fabrication technique presented in this work is a two-step process which consists of mechanical scribing followed by chemical etching. This method has many advantages over other micro-fabrication techniques since it is simple, cost-effective, rapid, and flexible. Also, the technique can be used to obtain a metal structure which has sub-micrometer width patterns. In this paper, the concept of this method and its application to microsystem technology are described.