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The Faulty Detection of COG Using Image Registration  

JOO KISEE (목포해양대학교 해상운송시스템학부 정보시스템전공)
Jeong Jong-Myeon (목포해양대학교 해양전자통신공학부)
Abstract
A line scan camera is applied to enhance COG(Chip On Glass) inspection accuracy to be measured a few micro unit. The foreign substance detection among various faulty factors has been the most difficult technology in the faulty automatic inspection step since COG pattern is very miniature and complexity. In this paper, we proposed two step area segmentation template matching method to increase matching speed. Futhermore to detect foreign substance(such as dust, scratch) with a few micro unit, the new method using gradient mask and AND operation was proposed. The proposed 2 step template matching method increased 0.3 - 0.4 second matching speed compared with conventional correlation coefficient. Also, the proposed foreign substance applied masks enhanced $5-8\%$ faulty detection rate compared with conventional no mask application method.
Keywords
image subtraction; area segmentation pattern matching; gradient mask;
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