Proceedings of the Korean Society of Precision Engineering Conference (한국정밀공학회:학술대회논문집)
- 2002.05a
- /
- Pages.956-959
- /
- 2002
- /
- 2005-8446(pISSN)
Non-lithographic Micro-structure Fabrication Technology and Its Application
Non-lithography 방법에 의한 마이크로 구조물 제작 및 응용
Abstract
In this work, a new non-lithographic micro-fabrication technique is presented. The motivation of this work is to overcome the demerits of the most commonly used photo-lithographic techniques. The micro-fabrication technique presented in this work is a two-step process which consists of mechanical scribing followed by chemical etching. This method has many advantages over other micro-fabrication techniques since it is simple, cost-effective, rapid, and flexible. Also, the technique can be used to obtain a metal structure which has sub-micrometer width patterns. In this paper, the concept of this method and its application to microsystem technology are described.