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Fabrication of Micro/Nano-patterns using MC-SPL(Mechano-Chemical Scanning Probe Lithography) Process  

Sung, In-Ha (Dept. of Mechanical Engineering, Graduate School of Yonsei University)
Kim, Dae-Eun (School of Mechanical Engineering, Yonsei University)
Publication Information
International Journal of Precision Engineering and Manufacturing / v.4, no.5, 2003 , pp. 22-26 More about this Journal
Abstract
In this work, a new non-photolithographic micro-fabrication technique is presented. The motivation of this work is to overcome the demerits of the most commonly used photolithographic techniques. The micro-fabrication technique presented in this work is a two-step process which consists of mechanical scribing followed by chemical etching. This method has many advantages over other micro-fabrication techniques since it is simple, cost-effective, rapid, and flexible. Also, the technique can be used to obtain a metal structure which has sub-micrometer width patterns. In this paper, the concept of this method and its application to microsystem technology are described.
Keywords
Abrasive interaction; Mechano-chemical process; Nano wear; Self-assembled monolayer;
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Times Cited By KSCI : 1  (Citation Analysis)
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