JSTS:Journal of Semiconductor Technology and Science

The Institute of Electronics and Information Engineers (대한전자공학회)
권호 표지

Thermopiezoelectric Cantilever for Probe-Based Data Storage System

  • Jang, Seong-Soo (MicroSystems Group Devices and materials Lab. LG Electronics Institute of Technology) ;
  • Jin, Won-Hyeog (MicroSystems Group Devices and materials Lab. LG Electronics Institute of Technology) ;
  • Kim, Young-Sik (MicroSystems Group Devices and materials Lab. LG Electronics Institute of Technology) ;
  • Cho, Il-Joo (MicroSystems Group Devices and materials Lab. LG Electronics Institute of Technology) ;
  • Lee, Dae-Sung (MicroSystems Group Devices and materials Lab. LG Electronics Institute of Technology) ;
  • Nam, Hyo-Jin (MicroSystems Group Devices and materials Lab. LG Electronics Institute of Technology) ;
  • Bu, Jong. U. (MicroSystems Group Devices and Materials Lab. LG Electronics Institute of Technology)
  • Published : 2006.12.31
Download PDF
⟨ Previous Next ⟩

Abstract

Thermopiezoelectric method, using poly silicon heater and a piezoelectric sensor, was proposed for writing and reading in a probe based data storage system. Resistively heated tip writes data bits while scanning over a polymer media and piezoelectric sensor reads data bits from the self-generated charges induced by the deflection of the cantilever. 34${\times}$34 array of thermopiezoelectric nitride cantilevers were fabricated by a single step wafer level transfer method. We analyzed the noise level of the charge amplifier and measured the noise signal. With the sensor and the charge amplifier 20mn of deflection could be detected at a frequency of 10KHz. Reading signal was obtained from the cantilever array and the sensitivity was calculated.

Keywords

References

  1. P. Vettiger, G. Cross, M. Despont, U. Drechsler, U. Durig, B. Gotsmann, W. Haberle, M. A. Lantz, H. E. Rothuizen, R. Stutz, and G. K. Binnig, 'The 'Millipede'-Nanotechnology Entering Data Storage', IEEE Tran. On NanoTech. Vol. 1, pp.39-55, 2002 https://doi.org/10.1109/TNANO.2002.1005425
  2. E.Eleftheriou, T.Antonakopoulos, G. K. Binnig, G. Cherubini, M. Despont, A. Dholakia, U. Durig, M. A. Lantz, H. Pozidis, H. E. Rothuizen and P. Vettiger, 'Millipede ？ MEMS-based Scanning-Probe Data Storage System', IEEE Trans. On Mag. Vol. 39, pp. 938-945, 2003 https://doi.org/10.1109/TMAG.2003.808953
  3. H. Pozidis, W. Haberle, D. Wiesmann, U. Drechsler, M. Despont, T. R. Albrecht, and E.Eleftheriou, 'Demonstration of Thermomechanical Recording at 641 Gbit/in2', IEEE Trans. On Mag. Vol. 40, pp. 2531-2536, 2004 https://doi.org/10.1109/TMAG.2004.830470
  4. Caroline Sunyong Lee, Hyo-Jin Nam, Young-Sik Kim, on-Hyeog Jin, Seong-Moon Cho, and Jong-Uk Bu, 'Mirocantilevers integrated with heaters and piezoelectric detectors for nano data-storage application', Appl. Phys. Lett., Vol.83, pp. 4839-4841, 2003 https://doi.org/10.1063/1.1633009
  5. Hyo-Jin Nam, YougSik Kim, Caroline Sunyong Lee, Won-Hyeog Jin, SeongSoo Jang, Il-Joo Cho and Jong-Uk Bu, 'Integrated Nitride Cantilever Array with Si Heaters and Piezoelectric Detectors for Nano-Data-Storage Application', IEEE MEMS 2005, pp. 247-250, 2005 https://doi.org/10.1109/MEMSYS.2005.1453913
  6. Young-Sik Kim, Caroline Sunyong Lee, Won-Hyeog Jin, SeongSoo Jang, Hyo-Jin Nam and Jong-Uk Bu, '$100{\times}100$ Thermo-Piezoelectric Cantilever Array for SPM Nano-Data-Storage-Application', Sensors and Materials, Vol. 17, pp.057-063, 2005
  7. Michel Despont, Ute Dreschsler, R. Yu, H. B. Pogge, and P. Vettiger, 'Wafer-Scale Micordevice Transfer/Interconnect:Its Application in an AFM-Based Data-Storage System', J. of MEMS, Vol. 13, pp. 895-901, 2004 https://doi.org/10.1109/JMEMS.2004.835769
  8. H. Berhard Pogge, M. Despont, U. Drechsler, C. Prasad, P. Vettiger, R. Yu, 'Three-Dimensonal Integrated CMOS-MEMS Device and Process For Making The Same', Patent No.: US 6,835,589 B2, 2004