• Journal of Sensor Science and Technology
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• v.20 no.1
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• pp.58-63
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• 2011

A low loss radio frequency(RF) micro electro mechanical systems(MEMS) switch driven by a low actuation voltage was designed for the development of a new RF MEMS switch. The RF MEMS switch should be encapsulated. The glass cap and fabricated RF MEMS switch were assembled by the Au/Sn eutectic bonding principle for wafer-level packaging. The through-vias on the glass substrate was made by the glass dry etching and Au electroplating process. The packaged RF MEMS switch had an actuation voltage of 12.5 V, an insertion loss below 0.25 dB, a return loss above 16.6 dB, and an isolation value above 41.4 dB at 6 GHz.

• The Bulletin of The Korean Astronomical Society
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• v.36 no.1
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• pp.65.1-65.1
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• 2011

We built a simple Adaptive Optics (AO) system at laboratory. This AO system is a step toward developing AO system for astronomical use. In this step, the AO system consists of He-Ne laser as a artificial light source, wavefront sensor, MEMS (Micro electro mechanical system) type deformable mirror and several lenses. MEMS deformable mirror allows the compact system at low cost and the only several mm sized collimated beam. We made Shack-Hartmann wavefront sensor using a lenslet array and a fast frame CCD. Its performance is verified using an artificial phase disturber and noting the movement of spot images by the lenslet array. The frame rate of the driving software is about 70 fps, depending on the control parameters. The characteristics of MEMS deformable mirror was measured which includes the voltage-to-deflection relation, influence function, and cross-talk. The total system is operated under closed-loop control for the artificial phase disturber and the wavefront is found to be compensated successfully.

• Advances in nano research
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• v.15 no.2
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• pp.155-163
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• 2023

Exercise is beneficial to the body in some ways. It is vital for people who have heart problems to perform exercise according to their condition. This paper describes how an Android platform can provide early warnings of fatigue during wushu exercise using Photoplethysmography (PPG) signals. Using the data from a micro-electro-mechanical system (MEMS) gyroscope to detect heart rate, this study contributes an algorithm to determine a user's fatigue during wushu exercise. It sends vibration messages to the user's smartphone device when the heart rate exceeds the limit or is too fast during exercise. The heart rate monitoring system in the app records heart rate data in real-time while exercising. A simple pulse sensor and Android app can be used to monitor heart rate. This plug-in sensor measures heart rate based on photoplethysmography (PPG) signals during exercise. Pulse sensors can be easily inserted into the fingertip of the user. An embedded microcontroller detects the heart rate by connecting a pulse sensor transmitted via Bluetooth to the smartphone. In order to measure the impact of physical activity on heart rate, Wushu System tests are conducted using various factors, such as age, exercise speed, and duration. During testing, the Android app was found to detect heart rate with an accuracy of 95.3% and to warn the user when their heart rate rises to an abnormal level.

• Journal of Information Processing Systems
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• v.1 no.1 s.1
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• pp.49-54
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• 2005

With the recent advances in Micro Electro Mechanical System (MEMS) technology, low cost and low power consumption wireless micro sensor nodes have become available. However, energy-efficient routing is one of the most important key technologies in wireless sensor networks as sensor nodes are highly energy-constrained. Therefore, many researchers have proposed routing protocols for sensor networks, especially cluster-based routing protocols, which have many advantages such as reduced control messages, bandwidth re-usability, and improved power control. Some protocols use information on the locations of sensor nodes to construct clusters efficiently. However, it is rare that all sensor nodes know their positions. In this article, we propose another cluster-based routing protocol for sensor networks. This protocol does not use information concerning the locations of sensor nodes, but uses the remaining energy of sensor networks and the desirable number of cluster heads according to the circumstances of the sensor networks. From performance simulation, we found that the proposed protocol shows better performance than the low-energy adaptive clustering hierarchy (LEACH).

• Journal of Korean Society for Geospatial Information Science
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• v.20 no.1
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• pp.65-72
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• 2012

With the development of MEMS, small and low-priced sensors integrating IMU and GPS have produced and exploited for diverse field. In this research, we have judged that MEMS-based IMU/GPS sensor is suitable for light-weighted mobile mapping system and carried out experiments to analyze the characteristics of MTi-G, which was developed from XSens company. From a sensor which fixed to dashboard, coordinates results with no post-processing were achieved for test area. On the whole, the results show satisfactory performances but some errors also were discovered from parts of the road due to sensor properties, XKF characteristics and GPS reception environment. We could confirm the potential of light-weighted mobile mapping system. Experiments considering various GPS reception environments and road condition and more detailed level of accuracy analysis will be performed for further research.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.24 no.2
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• pp.112-115
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• 2011

To stabilize the electric characteristic of Silicon Thin Film Transistor, reducing the current leakage is most important issue. To reduce the current leakage, many ideas were suggested. But the increase of mask layer also increased the cost. On this research Bird's Beak process was use to present element. Using Silvaco simulator, it was proven that it was able to reduce current leakage without mask layer. As a result, it was possible to suggest the structure that can reduce the current leakage to 1.39nA without having mask layer increase. Also, I was able to lead the result that electric characteristic (on/off current ratio) was improved compare from conventional structure.

• Journal of Sensor Science and Technology
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• v.20 no.6
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• pp.363-367
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• 2011

This paper proposes a highly-sensitive gas flow sensor with a simple structure. The sensor is composed of a micro-heater for heating the gas medium and a pair of temperature sensors for detecting temperature differences due to gas flow in a sealed chamber on one axis. Operation of the gas flow sensor depends on the transfer of heat through the air medium. The proposed gas flow sensor has the capability to measure gas flow rates <5 $cm^3$/min with a resolution of approximately 0.01 $cm^3$/min. Furthermore, this paper reports some additional experiment results, including the sensitivity of the proposed gas flow sensor as a function of operating current and the flow of different types of gas(oxygen, carbon dioxide, and nitrogen). The fabrication process of the proposed sensor is very simple, making it a good candidate for mass production.

• Journal of the Institute of Electronics and Information Engineers
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• v.51 no.6
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• pp.78-86
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• 2014

In this paper, a novel intensity-based fiber optic vibration sensor using a mass-spring structure, which consists of four serpentine flexure springs and a rectangular aperture within a proof mass, is proposed and its feasibility test is given by the simulation and experiment. An optical collimator is used to broaden the beam which is modulated by the displacement of the rectangular aperture within the proof mass. The proposed fiber optic vibration sensor has been analyzed and designed in terms of the optical and mechanical parts. A mechanical structure has been designed using theoretical analysis, mathematical modeling, and 3D FEM (Finite Element Method) simulation. The relative aperture displacement according to the base vibration is given using FEM simulation, while the output beam power according to the relative displacement is measured by experiment. The simulated sensor sensitivity of $15.731{\mu}W/G$ and detection range of ${\pm}6.087G$ are given. By using reference signal, the output signal with 0.75% relative error shows a good stability. The proposed vibration sensor structure has the advantages of a simple structure, low cost, and multi-point sensing characteristic. It also has the potential to be made by MEMS (Micro-Electro-Mechanical System) technology.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.22 no.10
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• pp.1307-1313
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• 2018

In recent years, there have been frequent occurrences of collapsing buildings and tilting accidents due to frequent earthquakes and aging of buildings. Various methods have been proposed to prevent disasters on these buildings. In this paper, we propose a system that provides an indication of anomalous phenomena such as collapse and tilting of buildings by real-time monitoring of IoT(Internet of Things) based architectural anomalies. The MEMS sensor is based on the inclinometer sensor and the accelerometer sensor, transmits the detected data to the server in real time, accumulates the data, and provides the service to cope when the set threshold value is different. It is possible to evacuate and repair the collapse and tilting of the building by warning the occurrence of the upper threshold event such as the collapse and tilting of the building.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.47 no.6
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• pp.438-445
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• 2019

In this paper, we present a new approach to extract the g-sensitivity scale-factor error for a MEMS gyroscope. MEMS gyroscopes, based on the use of both angular momentum and the Coriolis effect, have a g-sensitivity error due to mass unbalance. Generally, the g-sensitivity error is not considered in general use of gyroscopes, but it deserves our attention if we are to develop for tactical class performance and reliability. The g-sensitivity error during vehicle flight increases navigation error; so it must be analyzed and compensated for the use of MEMS IMU for high dynamics vehicle systems. Therefore, we analyzed how to extract the g-sensitivity scale-factor error from the inertial sensor error model. Furthermore we propose a new method to extract the g-sensitivity error using flight motion simulator. We verified our proposed method with experimental results.