A Researching about Reducing Leakage Current of Polycrystalline Silicon Thin Film Transistors with Bird's Beak Structure |
Lee, Jin-Min (Institute of Research and Development, ElnT.Co.,Ltd) |
1 | J. I. Ohwada, M. Takabatake, Y. A. Ono, A. Mimura, K. Ono, N. Konishi, IEEE Trans. Electron. Dev, 36, 9, 1923 (1989). DOI |
2 | S. Seki, O. Kogure and B. Tsujiyama, IEEE Electron Dev. Lett, EDL-8, 0, 434 (1987). |
3 | H. Oshima and S. Morozumi, IEDM, 157 (1989). |
4 | K. Suzuki, Digest, SID 92, 39 (1992). |
5 | A. Rodriguez, E. G. Moreno, H. Pattyn, J. F. Nijs, R. P. Mertens, IEEE Trans Electron Dev, 40, 938 (1993). DOI |